[Scan]
initial_time=2016-01-18T19:39:09
final_time=2016-01-18T19:39:29
ip_count=19
run=1024
dataset=5
scan=376
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08792E-4
ql1_vset=
ql1_vmon=-8.80718E-1
ql1_imon=1.33929E-8
ql2_vset=
ql2_vmon=-8.96358E-1
ql2_imon=1.87562E-9
ql3_vset=
ql3_vmon=-9.04691E0
ql3_imon=1.4962E-10
ql4_vset=
ql4_vmon=-9.0416E0
ql4_imon=-1.44839E-11
mult1=-1.09061E-8
mult2=-3.48366E-9
rf_tmon=-1.11164E-3
rf_agc=3.71966E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.71326E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68075E0
bslens_imon=2.4292E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19798E1
lens5a_imon=1.9986E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05052E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53626E1
cs_ef1b_imon=3.15666E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04553E1
cs_ea1_imon=1.08991E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42949E0
lens1_imon=2.57244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64893E1
os_ef1alow_imon=2.9738E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.041E1
cs_ea2_imon=1.35252E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84917E1
cs_ef1a_imon=3.04026E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.36589E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11013E1
os_restr1_imon=4.26817E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14859E1
os_ea1_imon=2.36259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63596E1
os_ef1bup_imon=3.08286E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19272E0
cs_ionrep_imon=9.56211E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91968E2
cs_nozzle_imon=1.93585E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01858E1
cs_anode1_imon=1.96401E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.38656E-8
tplens_vset=1.4E-1
tplens_vmon=1.64327E0
tplens_imon=-1.56576E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26036E1
iondef3_imon=1.52846E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27458E1
iondef2_imon=1.5718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98298E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.09884E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27169E0
ionrepsh_imon=8.61081E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33541E1
lens5b_imon=2.17454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74648E1
cs_ef2b_imon=3.1159E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56063E0
os_ea2_imon=-8.03019E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.16805E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.072E0
os_ef2alow_imon=-2.47616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.46791E-1
os_ef2bup_imon=-5.06122E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11313E1
os_restr2_imon=3.4607E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.28826E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01876E1
cs_anode2_imon=2.08812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7347E1
iondef1_imon=1.09101E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.10697E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.10219E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.98125E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13565E0
cs_ionaccel_imon=-9.70655E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47369E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5657E1
einzel_imon=8.01097E-6
window_vset=0.0E0
window_vmon=2.50515E-1
window_imon=-8.23776E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.3944E-4
mask2_vset=0.0E0
mask2_vmon=-1.86834E1
mask2_imon=-6.21818E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.92029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.9396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=8.18474E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55677E0
defgridb_imon=6.09115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33319E1
os_fil1_imon=9.43381E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08131E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66491E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31795E1
cs_fil1_imon=8.43119E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.85346E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69658E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72564E-2
os_fil2_imon=-2.62143E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.13599E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29454E-1
cs_fil2_imon=-2.37663E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40549E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68823E-1
res40_imon=-2.29991E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.80599E-1	-8.96573E-1	-9.04708E0	-9.04176E0	4.52995E-3	9.53197E-2	2.73358E1	-3.26732E1	-3.2603E1	2.68123E1	1.19819E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01209E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.80742E-1	-8.96502E-1	-9.04701E0	-9.04205E0	4.36306E-3	9.52959E-2	2.73021E1	-3.26597E1	-3.26218E1	2.6835E1	1.19941E-7	2.51287E-3	2.51287E-3	6.3445E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.80623E-1	-8.9674E-1	-9.04689E0	-9.04188E0	4.31538E-3	9.52721E-2	2.73482E1	-3.26608E1	-3.2629E1	2.68563E1	1.19925E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.99348E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.80647E-1	-8.96835E-1	-9.04677E0	-9.04191E0	4.14848E-3	9.52244E-2	2.73334E1	-3.26632E1	-3.26467E1	2.68283E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09317E0	-8.80671E-1	-8.96788E-1	-9.04644E0	-9.04152E0	4.14848E-3	9.52721E-2	2.73281E1	-3.26596E1	-3.26408E1	2.68277E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.80504E-1	-8.96955E-1	-9.04663E0	-9.04167E0	4.55379E-3	9.51767E-2	2.73249E1	-3.26681E1	-3.26314E1	2.68268E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.80551E-1	-8.96764E-1	-9.04653E0	-9.04224E0	4.43459E-3	9.50098E-2	2.73189E1	-3.26543E1	-3.2611E1	2.68352E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80289E-1	-8.9674E-1	-9.04644E0	-9.04171E0	4.50611E-3	9.50575E-2	2.73476E1	-3.26785E1	-3.26319E1	2.68483E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.80504E-1	-8.96597E-1	-9.04658E0	-9.04191E0	4.52995E-3	9.50813E-2	2.73069E1	-3.26615E1	-3.2596E1	2.68341E1	1.19809E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.80527E-1	-8.96764E-1	-9.04679E0	-9.04174E0	4.74453E-3	9.52005E-2	2.72751E1	-3.27059E1	-3.25846E1	2.68352E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.80265E-1	-8.96764E-1	-9.04655E0	-9.04155E0	4.86374E-3	9.49144E-2	2.73315E1	-3.26909E1	-3.26368E1	2.68719E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.80742E-1	-8.9643E-1	-9.04663E0	-9.04167E0	4.64916E-3	9.50098E-2	2.73213E1	-3.26627E1	-3.26062E1	2.68106E1	1.19819E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.80599E-1	-8.96668E-1	-9.04653E0	-9.04193E0	4.52995E-3	9.47952E-2	2.73111E1	-3.26759E1	-3.26386E1	2.68563E1	1.19749E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.80718E-1	-8.96621E-1	-9.04677E0	-9.04167E0	4.60148E-3	9.51767E-2	2.73163E1	-3.26897E1	-3.26178E1	2.68322E1	1.19872E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.0041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.8048E-1	-8.96406E-1	-9.04684E0	-9.04164E0	4.29153E-3	9.52959E-2	2.73267E1	-3.26861E1	-3.2641E1	2.68382E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.80551E-1	-8.96406E-1	-9.04655E0	-9.04176E0	4.45843E-3	9.52005E-2	2.73104E1	-3.26579E1	-3.26484E1	2.68209E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.80909E-1	-8.96621E-1	-9.04644E0	-9.04183E0	4.17233E-3	9.51529E-2	2.73153E1	-3.26332E1	-3.26224E1	2.68412E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.80766E-1	-8.96382E-1	-9.04679E0	-9.04179E0	4.3869E-3	9.51767E-2	2.73405E1	-3.26874E1	-3.2659E1	2.68364E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.8079E-1	-8.96502E-1	-9.04665E0	-9.04169E0	4.41074E-3	9.51767E-2	2.72986E1	-3.26573E1	-3.2649E1	2.68262E1	1.19902E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.80718E-1	-8.96358E-1	-9.04691E0	-9.0416E0	4.36306E-3	9.49621E-2	2.7347E1	-3.27458E1	-3.26036E1	2.68388E1	1.19953E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9841E-1