[Scan]
initial_time=2016-01-18T19:39:37
final_time=2016-01-18T19:39:57
ip_count=19
run=1024
dataset=5
scan=377
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-8.8048E-1
ql1_imon=1.34141E-8
ql2_vset=
ql2_vmon=-8.96645E-1
ql2_imon=1.92256E-9
ql3_vset=
ql3_vmon=-9.04644E0
ql3_imon=1.58799E-10
ql4_vset=
ql4_vmon=-9.04205E0
ql4_imon=-2.44617E-11
mult1=-1.23602E-8
mult2=-2.89572E-9
rf_tmon=6.52163E-4
rf_agc=3.92081E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.68145E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.99136E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54167E1
cs_ef1b_imon=3.17564E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02395E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=1.09589E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40801E0
lens1_imon=2.80812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64702E1
os_ef1alow_imon=3.00273E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0342E1
cs_ea2_imon=1.33454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84207E1
cs_ef1a_imon=2.9915E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.36569E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1118E1
os_restr1_imon=4.28756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14861E1
os_ea1_imon=2.35402E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.0802E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20704E0
cs_ionrep_imon=9.46647E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02096E1
cs_anode1_imon=1.97128E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.38826E-8
tplens_vset=1.4E-1
tplens_vmon=1.68049E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27257E1
iondef3_imon=1.50794E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.56382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.06375E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=8.42464E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74751E1
cs_ef2b_imon=3.22242E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5471E0
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71326E1
cs_ef2a_imon=3.08394E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12941E0
os_ef2alow_imon=-2.42461E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36305E-1
os_ef2bup_imon=-5.18664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11186E1
os_restr2_imon=3.43799E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01672E1
cs_anode2_imon=2.09852E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72609E1
iondef1_imon=1.11752E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68647E1
iondef4_imon=1.09851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.05643E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.98027E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11579E0
cs_ionaccel_imon=-7.96589E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47608E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56611E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=3.11785E-1
window_imon=-7.47936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82698E2
mask1_imon=2.39103E-4
mask2_vset=0.0E0
mask2_vmon=-1.84629E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.69066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.02592E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.43711E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07647E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66366E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=7.28029E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.27632E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69988E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.68745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.20034E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31669E-1
cs_fil2_imon=-2.23211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22732E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73107E-1
res40_imon=-2.34228E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.80361E-1	-8.96716E-1	-9.04665E0	-9.04181E0	3.95775E-3	9.50336E-2	2.73375E1	-3.26602E1	-3.26124E1	2.68111E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.80504E-1	-8.96764E-1	-9.04675E0	-9.0416E0	3.95775E-3	9.48906E-2	2.73504E1	-3.2637E1	-3.26052E1	2.6822E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.80337E-1	-8.96645E-1	-9.04663E0	-9.04169E0	4.12464E-3	9.50098E-2	2.7311E1	-3.26997E1	-3.26455E1	2.68376E1	1.19809E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.80432E-1	-8.96549E-1	-9.04686E0	-9.04148E0	4.12464E-3	9.47475E-2	2.7321E1	-3.26667E1	-3.26136E1	2.68279E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02659E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.80361E-1	-8.96525E-1	-9.04672E0	-9.0416E0	4.1008E-3	9.48429E-2	2.73057E1	-3.26849E1	-3.2629E1	2.68328E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.80313E-1	-8.96406E-1	-9.04686E0	-9.04138E0	4.33922E-3	9.49621E-2	2.73345E1	-3.26615E1	-3.26416E1	2.68484E1	1.20055E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.80337E-1	-8.9612E-1	-9.0467E0	-9.04136E0	4.22001E-3	9.48191E-2	2.73213E1	-3.26561E1	-3.26098E1	2.67818E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.80122E-1	-8.96525E-1	-9.04677E0	-9.04181E0	4.31538E-3	9.52244E-2	2.73075E1	-3.26413E1	-3.26207E1	2.68166E1	1.20017E-7	2.51662E-3	2.51662E-3	6.28006E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.80265E-1	-8.96573E-1	-9.04655E0	-9.04148E0	4.12464E-3	9.50336E-2	2.73171E1	-3.26543E1	-3.26248E1	2.68442E1	1.19653E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.80337E-1	-8.96788E-1	-9.04665E0	-9.04157E0	4.24385E-3	9.50575E-2	2.72949E1	-3.26236E1	-3.26506E1	2.68454E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.02659E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.80504E-1	-8.96716E-1	-9.04677E0	-9.04176E0	4.50611E-3	9.48191E-2	2.73111E1	-3.26554E1	-3.2638E1	2.6825E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.03027E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.80647E-1	-8.96549E-1	-9.04696E0	-9.04152E0	4.43459E-3	9.47237E-2	2.7321E1	-3.26608E1	-3.2629E1	2.68389E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.8048E-1	-8.96406E-1	-9.04655E0	-9.04152E0	4.33922E-3	9.50098E-2	2.73126E1	-3.26527E1	-3.26237E1	2.68088E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80265E-1	-8.96454E-1	-9.04684E0	-9.0416E0	4.33922E-3	9.46045E-2	2.7321E1	-3.26652E1	-3.26358E1	2.68724E1	1.20078E-7	2.52197E-3	2.52197E-3	6.3282E-3	3.00247E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.80599E-1	-8.96525E-1	-9.04701E0	-9.04155E0	4.19617E-3	9.50813E-2	2.73082E1	-3.26548E1	-3.26138E1	2.6849E1	1.19883E-7	2.51838E-3	2.51838E-3	6.31879E-3	3.00251E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.80408E-1	-8.96263E-1	-9.04665E0	-9.04183E0	4.14848E-3	9.51529E-2	2.73267E1	-3.26681E1	-3.26338E1	2.68563E1	1.19925E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.01475E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.80432E-1	-8.96311E-1	-9.04663E0	-9.04219E0	4.57764E-3	9.50336E-2	2.73222E1	-3.26384E1	-3.26136E1	2.6822E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80599E-1	-8.9612E-1	-9.04653E0	-9.04191E0	4.57764E-3	9.49621E-2	2.73629E1	-3.26732E1	-3.25953E1	2.68364E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.80575E-1	-8.96382E-1	-9.04682E0	-9.04205E0	4.41074E-3	9.48191E-2	2.73333E1	-3.26254E1	-3.26452E1	2.68267E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02659E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.8048E-1	-8.96645E-1	-9.04644E0	-9.04205E0	4.64916E-3	9.49144E-2	2.72609E1	-3.2659E1	-3.27257E1	2.68647E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1