[Scan]
initial_time=2016-01-18T19:40:04
final_time=2016-01-18T19:40:24
ip_count=19
run=1024
dataset=5
scan=378
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.80504E-1
ql1_imon=1.34043E-8
ql2_vset=
ql2_vmon=-8.96406E-1
ql2_imon=1.91181E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=1.97124E-10
ql4_vset=
ql4_vmon=-9.04152E0
ql4_imon=-2.98023E-13
mult1=-7.60789E-9
mult2=-1.71592E-9
rf_tmon=-1.44847E-2
rf_agc=2.28384E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.66996E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=2.00421E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=3.16398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02408E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04734E1
cs_ea1_imon=1.10626E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39203E0
lens1_imon=2.78394E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.93909E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.34659E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.05334E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.37095E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.27004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.35461E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.1247E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=9.43095E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93714E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.00458E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.37839E-8
tplens_vset=1.4E-1
tplens_vmon=1.6609E0
tplens_imon=3.38173E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2603E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25275E1
iondef2_imon=1.55506E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.9819E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.07387E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.11244E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56652E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08459E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28058E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11892E1
os_restr2_imon=3.43716E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.08243E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72272E1
iondef1_imon=1.09812E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.11909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.13742E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.97798E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-7.56253E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.3296E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.69852E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.59045E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=5.95171E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33311E1
os_fil1_imon=9.42666E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0772E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66799E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31797E1
cs_fil1_imon=7.299E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.65649E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.70703E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50917E-2
os_fil2_imon=-2.02927E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.25729E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-1.95719E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22795E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72817E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.80861E-1	-8.96263E-1	-9.0467E0	-9.04183E0	4.55379E-3	9.47952E-2	2.73255E1	-3.26512E1	-3.26116E1	2.68611E1	1.19544E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01995E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.80671E-1	-8.96478E-1	-9.04667E0	-9.04152E0	4.48227E-3	9.5129E-2	2.73418E1	-3.26738E1	-3.26248E1	2.68593E1	1.20004E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.80671E-1	-8.96692E-1	-9.04655E0	-9.04188E0	4.41074E-3	9.51052E-2	2.73039E1	-3.26667E1	-3.26402E1	2.6843E1	1.19721E-7	2.51838E-3	2.51838E-3	6.33021E-3	3.00522E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.8079E-1	-8.96621E-1	-9.04663E0	-9.04148E0	4.57764E-3	9.4986E-2	2.73417E1	-3.2649E1	-3.26189E1	2.68742E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.80671E-1	-8.96907E-1	-9.04677E0	-9.04181E0	4.17233E-3	9.50575E-2	2.73173E1	-3.26701E1	-3.26352E1	2.68381E1	1.19953E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.80647E-1	-8.96883E-1	-9.04644E0	-9.04169E0	4.3869E-3	9.52959E-2	2.73081E1	-3.26512E1	-3.26128E1	2.68394E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.80647E-1	-8.96811E-1	-9.04651E0	-9.04157E0	4.17233E-3	9.51767E-2	2.73116E1	-3.26655E1	-3.26124E1	2.68322E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80599E-1	-8.96668E-1	-9.04653E0	-9.04186E0	4.36306E-3	9.50098E-2	2.73117E1	-3.2641E1	-3.26206E1	2.68495E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.80671E-1	-8.96382E-1	-9.04653E0	-9.04126E0	4.45843E-3	9.48429E-2	2.73171E1	-3.26567E1	-3.26032E1	2.68477E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.80742E-1	-8.96525E-1	-9.04663E0	-9.04148E0	4.52995E-3	9.48668E-2	2.73225E1	-3.26567E1	-3.25737E1	2.68118E1	1.20226E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.80766E-1	-8.96764E-1	-9.04655E0	-9.04169E0	4.3869E-3	9.5129E-2	2.73694E1	-3.26573E1	-3.2632E1	2.68587E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.8098E-1	-8.9674E-1	-9.04684E0	-9.04131E0	4.19617E-3	9.50336E-2	2.73339E1	-3.26645E1	-3.26452E1	2.68358E1	1.20017E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.80718E-1	-8.96502E-1	-9.04679E0	-9.04188E0	4.24385E-3	9.49383E-2	2.73252E1	-3.26396E1	-3.26148E1	2.68226E1	1.19705E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.8048E-1	-8.96645E-1	-9.04641E0	-9.04138E0	4.14848E-3	9.49144E-2	2.7301E1	-3.26735E1	-3.26306E1	2.67955E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.80766E-1	-8.96716E-1	-9.04675E0	-9.04183E0	4.17233E-3	9.50336E-2	2.7332E1	-3.26609E1	-3.26107E1	2.68184E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.98156E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.80718E-1	-8.96764E-1	-9.04701E0	-9.0416E0	4.45843E-3	9.50575E-2	2.73163E1	-3.26301E1	-3.26124E1	2.68478E1	1.19713E-7	2.50803E-3	2.50803E-3	6.31858E-3	2.99613E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.80265E-1	-8.96478E-1	-9.04691E0	-9.0415E0	4.62532E-3	9.50336E-2	2.73308E1	-3.2607E1	-3.26536E1	2.6855E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.80146E-1	-8.96406E-1	-9.04686E0	-9.04136E0	4.64916E-3	9.51529E-2	2.73157E1	-3.27015E1	-3.26248E1	2.68208E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.80337E-1	-8.96406E-1	-9.04675E0	-9.04129E0	4.69685E-3	9.50336E-2	2.72925E1	-3.26338E1	-3.26122E1	2.68526E1	1.20226E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.80504E-1	-8.96406E-1	-9.04672E0	-9.04152E0	4.3869E-3	9.50098E-2	2.72272E1	-3.25275E1	-3.2603E1	2.6843E1	1.20209E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1