[Scan]
initial_time=2016-01-18T19:40:59
final_time=2016-01-18T19:41:20
ip_count=19
run=1024
dataset=5
scan=380
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.80551E-1
ql1_imon=1.34125E-8
ql2_vset=
ql2_vmon=-8.96406E-1
ql2_imon=1.92624E-9
ql3_vset=
ql3_vmon=-9.04648E0
ql3_imon=1.86002E-10
ql4_vset=
ql4_vmon=-9.04167E0
ql4_imon=-2.84076E-11
mult1=-1.12455E-8
mult2=-2.42918E-9
rf_tmon=-5.25745E-3
rf_agc=3.38022E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.66675E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.24575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04898E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04724E1
cs_ea1_imon=1.12942E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4026E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.33418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.03928E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.36635E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11544E1
os_restr1_imon=4.2585E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.38142E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24248E0
cs_ionrep_imon=9.4845E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.95052E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.37662E-8
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.276E1
iondef3_imon=1.51262E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.24932E1
iondef2_imon=1.56634E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03025E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.02925E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=8.41383E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.15317E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55912E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37068E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11646E1
os_restr2_imon=3.46203E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72114E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.0959E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.96881E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16378E0
cs_ionaccel_imon=-9.79699E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.4754E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.99778E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-7.16609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=7.22419E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=6.82404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.47069E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07563E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31797E1
cs_fil1_imon=7.91167E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.8458E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.70256E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24143E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.19519E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2267E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.89946E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.79955E-1	-8.96573E-1	-9.04667E0	-9.04169E0	4.41074E-3	9.51529E-2	2.73063E1	-3.26496E1	-3.26018E1	2.68279E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9978E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.80146E-1	-8.96764E-1	-9.0466E0	-9.04191E0	4.29153E-3	9.51052E-2	2.73333E1	-3.26434E1	-3.26038E1	2.68226E1	1.19933E-7	2.51593E-3	2.51593E-3	6.32644E-3	3.00249E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.80265E-1	-8.96716E-1	-9.04639E0	-9.04174E0	4.3869E-3	9.51052E-2	2.73328E1	-3.26549E1	-3.2616E1	2.68196E1					
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.80313E-1	-8.96573E-1	-9.04629E0	-9.04143E0	4.41074E-3	9.52005E-2	2.73181E1	-3.26797E1	-3.26189E1	2.68424E1	1.19595E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.80241E-1	-8.96549E-1	-9.0466E0	-9.04198E0	4.17233E-3	9.52959E-2	2.73189E1	-3.26681E1	-3.2638E1	2.68358E1	1.19749E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.80456E-1	-8.96692E-1	-9.04646E0	-9.04174E0	4.17233E-3	9.5129E-2	2.73315E1	-3.26446E1	-3.2614E1	2.6852E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.80432E-1	-8.96835E-1	-9.04672E0	-9.04183E0	4.22001E-3	9.50336E-2	2.73309E1	-3.26597E1	-3.26536E1	2.68154E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.80694E-1	-8.96811E-1	-9.04665E0	-9.04164E0	4.33922E-3	9.5129E-2	2.7298E1	-3.26555E1	-3.26219E1	2.68881E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.80837E-1	-8.9674E-1	-9.04672E0	-9.04171E0	4.24385E-3	9.50575E-2	2.73147E1	-3.26807E1	-3.26116E1	2.68478E1	1.19902E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.81028E-1	-8.96597E-1	-9.04686E0	-9.04193E0	4.62532E-3	9.52721E-2	2.73213E1	-3.2641E1	-3.26044E1	2.68328E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.811E-1	-8.96692E-1	-9.04667E0	-9.04198E0	4.52995E-3	9.48429E-2	2.73099E1	-3.26482E1	-3.26152E1	2.68364E1	1.19965E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.80909E-1	-8.96454E-1	-9.04644E0	-9.04191E0	4.43459E-3	9.4986E-2	2.73369E1	-3.26609E1	-3.26038E1	2.6843E1	1.20084E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0201E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.80694E-1	-8.96406E-1	-9.04665E0	-9.04176E0	4.29153E-3	9.51052E-2	2.73033E1	-3.26428E1	-3.25942E1	2.68484E1	1.19595E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.80599E-1	-8.96502E-1	-9.04641E0	-9.04167E0	4.43459E-3	9.46283E-2	2.72868E1	-3.26685E1	-3.26054E1	2.68383E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02922E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.8079E-1	-8.96502E-1	-9.04696E0	-9.04174E0	4.60148E-3	9.5129E-2	2.72793E1	-3.26759E1	-3.26056E1	2.68214E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.80742E-1	-8.96525E-1	-9.04696E0	-9.04171E0	4.48227E-3	9.49621E-2	2.73576E1	-3.2636E1	-3.26148E1	2.68208E1	1.20106E-7	2.50989E-3	2.50989E-3	6.32896E-3	3.00966E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.80861E-1	-8.9612E-1	-9.04703E0	-9.04176E0	4.05312E-3	9.50575E-2	2.73802E1	-3.26362E1	-3.26134E1	2.68593E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.80623E-1	-8.9643E-1	-9.04703E0	-9.04171E0	4.17233E-3	9.47714E-2	2.73526E1	-3.26851E1	-3.26324E1	2.68366E1	1.20209E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.80551E-1	-8.96478E-1	-9.04655E0	-9.04164E0	4.29153E-3	9.48191E-2	2.73213E1	-3.26999E1	-3.2638E1	2.68154E1	1.20243E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99594E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.80551E-1	-8.96406E-1	-9.04648E0	-9.04167E0	4.48227E-3	9.50098E-2	2.72114E1	-3.24932E1	-3.276E1	2.684E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.98481E-1