[Scan]
initial_time=2016-01-18T19:41:27
final_time=2016-01-18T19:41:47
ip_count=19
run=1024
dataset=5
scan=381
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.80218E-1
ql1_imon=1.34199E-8
ql2_vset=
ql2_vmon=-8.96311E-1
ql2_imon=1.94787E-9
ql3_vset=
ql3_vmon=-9.04667E0
ql3_imon=1.74642E-10
ql4_vset=
ql4_vmon=-9.04164E0
ql4_imon=-2.21133E-11
mult1=-9.6561E-9
mult2=-2.78648E-9
rf_tmon=-5.26947E-3
rf_agc=3.2889E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.67127E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67624E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19506E1
lens5a_imon=2.01589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=3.16578E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04268E1
cs_ea1_imon=1.0829E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39262E0
lens1_imon=2.62466E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.36499E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.36731E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.26896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=2.3447E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63287E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26154E0
cs_ionrep_imon=9.56898E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93742E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=1.9689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.37451E-8
tplens_vset=1.4E-1
tplens_vmon=1.69334E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.50798E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02989E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.07274E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=8.60981E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.19817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58303E0
os_ea2_imon=-6.59907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.16903E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47879E-1
os_ef2bup_imon=-5.12786E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11105E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.27451E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73514E1
iondef1_imon=1.1236E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.12971E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.95928E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-7.81481E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47496E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-7.81481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39318E-4
mask2_vset=0.0E0
mask2_vmon=-1.87047E1
mask2_imon=-4.78747E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.78866E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.10556E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.42594E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07948E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66562E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3181E1
cs_fil1_imon=7.82758E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.92989E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6924E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72444E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.19781E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13952E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.80456E-1	-8.96454E-1	-9.04677E0	-9.04157E0	4.3869E-3	9.52959E-2	2.73375E1	-3.26024E1	-3.26331E1	2.68202E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00563E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.80527E-1	-8.96358E-1	-9.04665E0	-9.0421E0	4.673E-3	9.53436E-2	2.73443E1	-3.26676E1	-3.25832E1	2.68262E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.80694E-1	-8.96358E-1	-9.04648E0	-9.04198E0	4.26769E-3	9.4986E-2	2.73138E1	-3.26677E1	-3.26295E1	2.68233E1	1.19601E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.80361E-1	-8.96168E-1	-9.04667E0	-9.04171E0	4.33922E-3	9.54866E-2	2.73399E1	-3.26667E1	-3.26142E1	2.68279E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.80456E-1	-8.96382E-1	-9.04675E0	-9.04195E0	4.60148E-3	9.52005E-2	2.73351E1	-3.26789E1	-3.26254E1	2.68364E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.80575E-1	-8.96382E-1	-9.04672E0	-9.04245E0	4.52995E-3	9.49383E-2	2.73574E1	-3.26446E1	-3.26392E1	2.6845E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.80504E-1	-8.96215E-1	-9.04655E0	-9.04205E0	4.64916E-3	9.48906E-2	2.7321E1	-3.2648E1	-3.26315E1	2.6828E1	1.19819E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.80432E-1	-8.96287E-1	-9.0467E0	-9.0416E0	4.69685E-3	9.49621E-2	2.73216E1	-3.26502E1	-3.2636E1	2.68372E1	1.20017E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.80527E-1	-8.96168E-1	-9.04679E0	-9.04191E0	4.57764E-3	9.50575E-2	2.73341E1	-3.26596E1	-3.26283E1	2.68314E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.96671E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.80241E-1	-8.96502E-1	-9.04679E0	-9.04176E0	4.72069E-3	9.50336E-2	2.73417E1	-3.27003E1	-3.26278E1	2.68382E1	1.19979E-7	2.51265E-3	2.51265E-3	6.30221E-3	2.95588E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.80384E-1	-8.96549E-1	-9.04663E0	-9.04148E0	4.52995E-3	9.4986E-2	2.73535E1	-3.26526E1	-3.26201E1	2.68545E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.95876E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.80337E-1	-8.96215E-1	-9.04665E0	-9.04152E0	4.33922E-3	9.4986E-2	2.73375E1	-3.26771E1	-3.26014E1	2.68357E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.80361E-1	-8.96382E-1	-9.04684E0	-9.04179E0	4.24385E-3	9.4676E-2	2.73231E1	-3.2644E1	-3.26476E1	2.68312E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.80241E-1	-8.96573E-1	-9.04677E0	-9.04191E0	4.43459E-3	9.47475E-2	2.73388E1	-3.26542E1	-3.26572E1	2.6888E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.80361E-1	-8.96549E-1	-9.04696E0	-9.04236E0	4.24385E-3	9.47237E-2	2.73333E1	-3.26861E1	-3.2605E1	2.68232E1	1.19872E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.02813E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.80313E-1	-8.96478E-1	-9.04667E0	-9.042E0	4.3869E-3	9.49144E-2	2.73275E1	-3.26679E1	-3.2659E1	2.68489E1	1.19653E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02396E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.80265E-1	-8.96478E-1	-9.04691E0	-9.04169E0	4.3869E-3	9.48906E-2	2.73069E1	-3.26434E1	-3.26122E1	2.69002E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80504E-1	-8.96263E-1	-9.04689E0	-9.04236E0	4.55379E-3	9.48906E-2	2.7311E1	-3.26555E1	-3.26089E1	2.6828E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.80456E-1	-8.96549E-1	-9.04667E0	-9.04174E0	4.8399E-3	9.51052E-2	2.7346E1	-3.26759E1	-3.26218E1	2.68178E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.80218E-1	-8.96311E-1	-9.04667E0	-9.04164E0	4.55379E-3	9.51529E-2	2.73514E1	-3.26585E1	-3.26032E1	2.68304E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1