[Scan]
initial_time=2016-01-18T19:42:21
final_time=2016-01-18T19:42:41
ip_count=19
run=1024
dataset=5
scan=383
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.80194E-1
ql1_imon=1.3385E-8
ql2_vset=
ql2_vmon=-8.96382E-1
ql2_imon=1.91561E-9
ql3_vset=
ql3_vmon=-9.0466E0
ql3_imon=1.59872E-10
ql4_vset=
ql4_vmon=-9.04129E0
ql4_imon=8.2612E-12
mult1=-1.09061E-8
mult2=-2.87612E-9
rf_tmon=-2.64539E-3
rf_agc=3.54033E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.72484E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68717E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1958E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.17443E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=1.10382E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.84778E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.34608E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.04649E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.36272E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.36484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=9.4124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.38216E-8
tplens_vset=1.4E-1
tplens_vmon=1.66306E0
tplens_imon=-4.14704E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26868E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.05362E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=8.56523E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5441E0
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00702E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28658E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.44329E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30108E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.12906E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.11287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.94186E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-8.5356E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47594E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39311E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-5.18391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.69644E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93678E3
defgrida_imon=6.83486E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.50177E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63916E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.45826E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08296E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6668E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=7.43114E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.97194E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69297E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.15007E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41252E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22788E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06744E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.80384E-1	-8.9643E-1	-9.04682E0	-9.04181E0	4.55379E-3	9.53197E-2	2.73375E1	-3.26608E1	-3.26189E1	2.68621E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02396E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.80432E-1	-8.96716E-1	-9.04677E0	-9.04176E0	4.3869E-3	9.51052E-2	2.73201E1	-3.26621E1	-3.26104E1	2.68356E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.80361E-1	-8.96811E-1	-9.04701E0	-9.04195E0	4.93526E-3	9.51052E-2	2.7344E1	-3.26638E1	-3.2636E1	2.68644E1	1.20191E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.80289E-1	-8.97002E-1	-9.04686E0	-9.04162E0	4.52995E-3	9.4986E-2	2.73104E1	-3.26762E1	-3.26502E1	2.68725E1	1.20042E-7	2.52025E-3	2.52025E-3	6.33919E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.80241E-1	-8.96835E-1	-9.04665E0	-9.04174E0	4.33922E-3	9.48906E-2	2.72991E1	-3.26506E1	-3.26374E1	2.68213E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.80146E-1	-8.96716E-1	-9.04686E0	-9.04195E0	4.43459E-3	9.49144E-2	2.73139E1	-3.26307E1	-3.2613E1	2.68169E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.80003E-1	-8.96764E-1	-9.04677E0	-9.04224E0	4.45843E-3	9.52244E-2	2.73105E1	-3.26783E1	-3.26338E1	2.68262E1	1.20042E-7	2.51814E-3	2.51814E-3	6.34982E-3	3.00348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.79693E-1	-8.96478E-1	-9.04663E0	-9.04202E0	4.3869E-3	9.53674E-2	2.73213E1	-3.26729E1	-3.2605E1	2.68274E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.79884E-1	-8.96645E-1	-9.04686E0	-9.04219E0	4.62532E-3	9.52482E-2	2.7334E1	-3.26349E1	-3.26054E1	2.68319E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.79979E-1	-8.96788E-1	-9.04684E0	-9.04207E0	4.72069E-3	9.51529E-2	2.73411E1	-3.26903E1	-3.265E1	2.6825E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.79979E-1	-8.96621E-1	-9.04679E0	-9.04186E0	4.673E-3	9.50098E-2	2.73381E1	-3.26729E1	-3.26068E1	2.68581E1	1.19749E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.80027E-1	-8.96478E-1	-9.04651E0	-9.04171E0	4.3869E-3	9.50813E-2	2.73201E1	-3.26579E1	-3.26356E1	2.68435E1	1.19872E-7	2.52585E-3	2.52585E-3	6.31299E-3	3.03349E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09279E0	-8.80075E-1	-8.96287E-1	-9.04653E0	-9.04148E0	4.48227E-3	9.5129E-2	2.73838E1	-3.26729E1	-3.26158E1	2.68394E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.80265E-1	-8.96478E-1	-9.04653E0	-9.0421E0	4.86374E-3	9.50098E-2	2.73087E1	-3.26699E1	-3.26236E1	2.68442E1	1.19766E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.98554E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.80551E-1	-8.96716E-1	-9.04639E0	-9.04169E0	4.74453E-3	9.5129E-2	2.72883E1	-3.26476E1	-3.26392E1	2.68358E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.97901E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.80313E-1	-8.96406E-1	-9.04634E0	-9.0421E0	4.673E-3	9.47952E-2	2.73163E1	-3.26478E1	-3.26183E1	2.68394E1	1.19861E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.9978E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.80337E-1	-8.96239E-1	-9.04655E0	-9.04193E0	4.45843E-3	9.49621E-2	2.73284E1	-3.26462E1	-3.25899E1	2.67716E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.80122E-1	-8.96382E-1	-9.04646E0	-9.042E0	4.26769E-3	9.47475E-2	2.73086E1	-3.26585E1	-3.26289E1	2.68563E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32661E-3	3.01216E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.79717E-1	-8.96335E-1	-9.04663E0	-9.04169E0	4.29153E-3	9.46999E-2	2.73243E1	-3.26885E1	-3.26116E1	2.68215E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.80194E-1	-8.96382E-1	-9.0466E0	-9.04129E0	4.14848E-3	9.50336E-2	2.73145E1	-3.26868E1	-3.26484E1	2.68388E1	1.20055E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00197E-1