[Scan]
initial_time=2016-01-18T19:42:48
final_time=2016-01-18T19:43:08
ip_count=19
run=1024
dataset=5
scan=384
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08877E-4
ql1_vset=
ql1_vmon=-8.80075E-1
ql1_imon=1.3399E-8
ql2_vset=
ql2_vmon=-8.96358E-1
ql2_imon=1.90855E-9
ql3_vset=
ql3_vmon=-9.04684E0
ql3_imon=1.66726E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=-1.14083E-11
mult1=-9.18017E-9
mult2=-2.89572E-9
rf_tmon=-5.5477E-3
rf_agc=3.15512E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.71314E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67575E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=2.01263E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1255E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.15028E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04706E1
cs_ea1_imon=1.09661E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.90546E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.34896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.04973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.36561E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.36664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=9.59986E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=1.96638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.38506E-8
tplens_vset=1.4E-1
tplens_vmon=1.66727E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25782E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.57787E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98054E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.1496E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=8.63733E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53689E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.37083E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.54487E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11382E1
os_restr2_imon=3.43824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.27621E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73281E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67899E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.08199E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.96059E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-6.98589E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39398E-4
mask2_vset=0.0E0
mask2_vmon=-1.85665E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.27466E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.93579E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34141E0
defgridb_imon=6.27609E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.44522E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07972E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6638E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=8.35015E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.18507E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69298E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25945E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.39627E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.46388E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.80527E-1	-8.96716E-1	-9.04691E0	-9.04152E0	4.26769E-3	9.49621E-2	2.73393E1	-3.26614E1	-3.26349E1	2.68447E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
2.0E0	2.1E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.80527E-1	-8.96621E-1	-9.04682E0	-9.04174E0	4.36306E-3	9.51052E-2	2.73069E1	-3.26512E1	-3.26278E1	2.6843E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.80265E-1	-8.96668E-1	-9.04677E0	-9.0416E0	4.55379E-3	9.5129E-2	2.73225E1	-3.26602E1	-3.2593E1	2.68286E1	1.19653E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.80504E-1	-8.96621E-1	-9.04696E0	-9.04164E0	4.50611E-3	9.48429E-2	2.73393E1	-3.26762E1	-3.26001E1	2.68487E1	1.19851E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.80504E-1	-8.96859E-1	-9.04698E0	-9.04136E0	4.52995E-3	9.47714E-2	2.73393E1	-3.26615E1	-3.26278E1	2.68232E1	1.1959E-7	2.51287E-3	2.51287E-3	6.31798E-3	3.01104E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.80408E-1	-8.96382E-1	-9.04675E0	-9.04164E0	4.52995E-3	9.5129E-2	2.73604E1	-3.26554E1	-3.26398E1	2.68677E1	1.20069E-7	2.51225E-3	2.51225E-3	6.34037E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.8048E-1	-8.9643E-1	-9.04658E0	-9.04164E0	4.64916E-3	9.51767E-2	2.73316E1	-3.2672E1	-3.2629E1	2.68244E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.80432E-1	-8.96549E-1	-9.04698E0	-9.04195E0	4.673E-3	9.50336E-2	2.73405E1	-3.26573E1	-3.26378E1	2.68364E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.80432E-1	-8.96549E-1	-9.04663E0	-9.042E0	4.57764E-3	9.50336E-2	2.7358E1	-3.26807E1	-3.26236E1	2.68701E1	1.19595E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.80551E-1	-8.96358E-1	-9.04684E0	-9.04176E0	4.41074E-3	9.52005E-2	2.73664E1	-3.26831E1	-3.2596E1	2.68118E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.80551E-1	-8.96525E-1	-9.04686E0	-9.04207E0	4.36306E-3	9.50813E-2	2.73339E1	-3.2641E1	-3.2638E1	2.6831E1	1.20084E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.00942E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.80694E-1	-8.96382E-1	-9.04694E0	-9.04207E0	4.64916E-3	9.48191E-2	2.73647E1	-3.26779E1	-3.2629E1	2.68192E1	1.19953E-7	2.50882E-3	2.50882E-3	6.31817E-3	2.97901E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.80265E-1	-8.96549E-1	-9.04708E0	-9.04183E0	4.81606E-3	9.4986E-2	2.73375E1	-3.27017E1	-3.26272E1	2.68605E1	1.19851E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9841E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.80122E-1	-8.96406E-1	-9.04679E0	-9.04186E0	4.74453E-3	9.49621E-2	2.73345E1	-3.26663E1	-3.26086E1	2.68683E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.80265E-1	-8.9674E-1	-9.04667E0	-9.04162E0	4.50611E-3	9.50575E-2	2.73075E1	-3.27163E1	-3.25871E1	2.68148E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.79979E-1	-8.96692E-1	-9.04686E0	-9.04198E0	4.60148E-3	9.4986E-2	2.73514E1	-3.26528E1	-3.26327E1	2.68229E1	1.19595E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.03027E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.80027E-1	-8.96525E-1	-9.04686E0	-9.04207E0	4.52995E-3	9.52005E-2	2.73439E1	-3.26235E1	-3.26616E1	2.68335E1	1.20002E-7	2.51428E-3	2.51428E-3	6.3121E-3	3.006E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.79884E-1	-8.96645E-1	-9.04694E0	-9.04183E0	4.72069E-3	9.50098E-2	2.7355E1	-3.26657E1	-3.26452E1	2.68316E1	1.19963E-7	2.52029E-3	2.52029E-3	6.33706E-3	3.00479E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.80408E-1	-8.96406E-1	-9.04684E0	-9.04183E0	4.93526E-3	9.48906E-2	2.7308E1	-3.26567E1	-3.26166E1	2.68477E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.80075E-1	-8.96358E-1	-9.04684E0	-9.04198E0	4.93526E-3	9.50575E-2	2.73281E1	-3.26596E1	-3.25782E1	2.67899E1	1.2026E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99686E-1