[Scan]
initial_time=2016-01-18T19:43:16
final_time=2016-01-18T19:43:35
ip_count=19
run=1024
dataset=5
scan=385
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.80551E-1
ql1_imon=1.34012E-8
ql2_vset=
ql2_vmon=-8.96263E-1
ql2_imon=1.90054E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=1.41013E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=-3.89338E-11
mult1=-1.06434E-8
mult2=-2.82041E-9
rf_tmon=-2.93826E-3
rf_agc=3.4403E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.70374E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6727E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=2.01129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=3.15857E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02415E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.10272E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44276E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.36712E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=3.05442E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.3682E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.26679E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14545E1
os_ea1_imon=2.36523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=9.49466E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=1.96602E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.3873E-8
tplens_vset=1.4E-1
tplens_vmon=1.69216E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27179E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.0821E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33468E0
ionrepsh_imon=8.5284E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34159E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53702E0
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00867E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.03776E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11382E1
os_restr2_imon=3.43752E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.07991E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.11653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.06873E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.96357E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-8.46352E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.93651E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.66124E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64769E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.44186E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0844E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66464E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=7.76151E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0038E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69087E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69912E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60279E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22848E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.51483E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.8048E-1	-8.96192E-1	-9.04684E0	-9.04193E0	4.64916E-3	9.52959E-2	2.73033E1	-3.26915E1	-3.25858E1	2.6831E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99175E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.8048E-1	-8.96049E-1	-9.0467E0	-9.04186E0	4.43459E-3	9.52482E-2	2.73033E1	-3.26212E1	-3.26549E1	2.6825E1	1.20278E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.80623E-1	-8.96311E-1	-9.04641E0	-9.04241E0	4.62532E-3	9.5129E-2	2.73022E1	-3.26474E1	-3.26474E1	2.68325E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.80623E-1	-8.96215E-1	-9.04648E0	-9.04164E0	4.52995E-3	9.50098E-2	2.73159E1	-3.26687E1	-3.26549E1	2.68556E1	1.20092E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.80384E-1	-8.96215E-1	-9.04653E0	-9.04167E0	4.50611E-3	9.54628E-2	2.73568E1	-3.26615E1	-3.26074E1	2.68394E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.80527E-1	-8.96263E-1	-9.04672E0	-9.0415E0	4.52995E-3	9.50813E-2	2.73369E1	-3.26681E1	-3.26068E1	2.684E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.80623E-1	-8.96502E-1	-9.04658E0	-9.04176E0	4.62532E-3	9.51529E-2	2.73128E1	-3.26508E1	-3.26278E1	2.68495E1	1.20043E-7	2.51935E-3	2.51935E-3	6.31837E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.80551E-1	-8.96716E-1	-9.04703E0	-9.04181E0	4.43459E-3	9.51767E-2	2.73057E1	-3.26725E1	-3.26101E1	2.68247E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.8048E-1	-8.96716E-1	-9.04691E0	-9.04193E0	4.69685E-3	9.51052E-2	2.72835E1	-3.26476E1	-3.26122E1	2.6828E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.80575E-1	-8.9674E-1	-9.04689E0	-9.0421E0	4.60148E-3	9.47952E-2	2.73105E1	-3.26651E1	-3.26116E1	2.68286E1	1.19705E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.02396E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.80766E-1	-8.96573E-1	-9.04684E0	-9.04193E0	4.48227E-3	9.50098E-2	2.73446E1	-3.26514E1	-3.26496E1	2.68343E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.80623E-1	-8.96692E-1	-9.04682E0	-9.04214E0	4.43459E-3	9.52721E-2	2.73418E1	-3.26603E1	-3.26101E1	2.685E1	1.20209E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.80814E-1	-8.96764E-1	-9.04703E0	-9.04229E0	4.55379E-3	9.48191E-2	2.73015E1	-3.26651E1	-3.25791E1	2.68298E1	1.20191E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99879E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80504E-1	-8.96358E-1	-9.04694E0	-9.04217E0	4.52995E-3	9.51052E-2	2.73159E1	-3.26597E1	-3.26092E1	2.68382E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.80575E-1	-8.96549E-1	-9.04696E0	-9.04219E0	4.3869E-3	9.50813E-2	2.73357E1	-3.26664E1	-3.26113E1	2.68292E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.80504E-1	-8.96168E-1	-9.04653E0	-9.04205E0	4.26769E-3	9.48906E-2	2.73328E1	-3.26431E1	-3.26113E1	2.6825E1	1.19766E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.02277E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.80647E-1	-8.96239E-1	-9.04675E0	-9.04195E0	4.48227E-3	9.5129E-2	2.73267E1	-3.26753E1	-3.25972E1	2.68394E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.80456E-1	-8.96287E-1	-9.0466E0	-9.04212E0	4.57764E-3	9.50336E-2	2.73257E1	-3.26537E1	-3.26254E1	2.68383E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.80408E-1	-8.96144E-1	-9.04675E0	-9.04217E0	4.55379E-3	9.4986E-2	2.73552E1	-3.26425E1	-3.26065E1	2.6816E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.80551E-1	-8.96263E-1	-9.04672E0	-9.04176E0	4.62532E-3	9.50575E-2	2.72997E1	-3.27179E1	-3.26284E1	2.68214E1	1.198E-7	2.52492E-3	2.52492E-3	6.33977E-3	2.9943E-1