[Scan]
initial_time=2016-01-18T19:43:43
final_time=2016-01-18T19:44:03
ip_count=19
run=1024
dataset=5
scan=386
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08738E-4
ql1_vset=
ql1_vmon=-8.80861E-1
ql1_imon=1.33882E-8
ql2_vset=
ql2_vmon=-8.96096E-1
ql2_imon=1.91121E-9
ql3_vset=
ql3_vmon=-9.04682E0
ql3_imon=1.5707E-10
ql4_vset=
ql4_vmon=-9.04191E0
ql4_imon=-2.90632E-11
mult1=-1.02822E-8
mult2=-2.73059E-9
rf_tmon=-5.21539E-3
rf_agc=3.2931E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.68842E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67402E0
bslens_imon=2.25289E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=2.00154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05049E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53979E1
cs_ef1b_imon=3.15954E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=1.09615E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39031E0
lens1_imon=2.71936E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64808E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03586E1
cs_ea2_imon=1.34775E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84463E1
cs_ef1a_imon=3.04203E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.35772E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11654E1
os_restr1_imon=4.26548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14951E1
os_ea1_imon=2.3501E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63567E1
os_ef1bup_imon=3.08694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24353E0
cs_ionrep_imon=9.35275E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93607E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02052E1
cs_anode1_imon=1.97352E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.36532E-8
tplens_vset=1.4E-1
tplens_vmon=1.65E0
tplens_imon=-1.63922E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26452E1
iondef3_imon=1.49871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.56703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98096E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=4.06677E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26924E0
ionrepsh_imon=8.47491E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17049E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74607E1
cs_ef2b_imon=3.12624E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58634E0
os_ea2_imon=-6.78138E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06036E2
lens4b_imon=2.00707E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71133E1
cs_ef2a_imon=3.17826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07389E0
os_ef2alow_imon=-2.41338E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.388E-1
os_ef2bup_imon=-5.16044E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11267E1
os_restr2_imon=3.44735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.28422E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01597E1
cs_anode2_imon=2.08355E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.127E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.07624E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81259E-1
olens1_imon=7.92762E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15384E0
cs_ionaccel_imon=-6.91797E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47499E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.82257E-6
window_vset=0.0E0
window_vmon=2.40052E-1
window_imon=-7.2548E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86456E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.04245E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.57231E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.29221E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41581E0
defgridb_imon=6.08748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.45065E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07579E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66528E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31793E1
cs_fil1_imon=7.5485E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.90207E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69031E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69936E-2
os_fil2_imon=-2.46914E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.37501E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29114E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27375E-1
res40_imon=-2.42087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.80384E-1	-8.96525E-1	-9.04651E0	-9.04176E0	4.26769E-3	9.49144E-2	2.7324E1	-3.26638E1	-3.2629E1	2.68377E1	1.19766E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.01475E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.80384E-1	-8.96311E-1	-9.0466E0	-9.04219E0	4.22001E-3	9.47714E-2	2.73283E1	-3.26742E1	-3.26195E1	2.68337E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.80647E-1	-8.96263E-1	-9.04675E0	-9.04224E0	4.33922E-3	9.48668E-2	2.73382E1	-3.26613E1	-3.26225E1	2.68364E1	1.20213E-7	2.51962E-3	2.51962E-3	6.34131E-3	3.00197E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.80551E-1	-8.9643E-1	-9.04689E0	-9.04214E0	4.69685E-3	9.48429E-2	2.72967E1	-3.26366E1	-3.26159E1	2.68429E1	1.20267E-7	2.51562E-3	2.51562E-3	6.28813E-3	3.00075E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.80766E-1	-8.96311E-1	-9.04682E0	-9.04191E0	4.60148E-3	9.48429E-2	2.73351E1	-3.26738E1	-3.2648E1	2.68313E1	1.19967E-7	2.5216E-3	2.5216E-3	6.32784E-3	2.99906E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.80337E-1	-8.96382E-1	-9.04682E0	-9.04191E0	4.45843E-3	9.48191E-2	2.73253E1	-3.26628E1	-3.26159E1	2.68519E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.80384E-1	-8.95929E-1	-9.04689E0	-9.04167E0	4.3869E-3	9.50098E-2	2.73087E1	-3.26627E1	-3.26224E1	2.6825E1	1.20101E-7	2.52253E-3	2.52253E-3	6.3074E-3	2.98948E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.80289E-1	-8.96025E-1	-9.04684E0	-9.04212E0	4.50611E-3	9.52244E-2	2.73303E1	-3.26398E1	-3.26422E1	2.68454E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.80241E-1	-8.95858E-1	-9.04729E0	-9.04202E0	4.52995E-3	9.50575E-2	2.73273E1	-3.26374E1	-3.2617E1	2.68262E1	1.20017E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.80265E-1	-8.96025E-1	-9.04732E0	-9.04191E0	4.31538E-3	9.49144E-2	2.73193E1	-3.26632E1	-3.26478E1	2.68394E1	1.20226E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.80623E-1	-8.9581E-1	-9.0471E0	-9.04202E0	4.48227E-3	9.53197E-2	2.73169E1	-3.26596E1	-3.26089E1	2.68337E1	1.2026E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02769E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.80361E-1	-8.96025E-1	-9.04677E0	-9.04174E0	4.60148E-3	9.51767E-2	2.73141E1	-3.26452E1	-3.26368E1	2.68268E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.80051E-1	-8.96215E-1	-9.04689E0	-9.04195E0	4.43459E-3	9.51529E-2	2.73155E1	-3.26677E1	-3.26295E1	2.68233E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.80122E-1	-8.96454E-1	-9.04677E0	-9.04191E0	4.33922E-3	9.50336E-2	2.73333E1	-3.26717E1	-3.26254E1	2.68316E1	1.19749E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99686E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.8017E-1	-8.96335E-1	-9.04648E0	-9.04233E0	4.43459E-3	9.49621E-2	2.73008E1	-3.26701E1	-3.26401E1	2.68126E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.80456E-1	-8.96454E-1	-9.04667E0	-9.04205E0	4.62532E-3	9.50813E-2	2.73057E1	-3.2659E1	-3.26455E1	2.68273E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.98554E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.80432E-1	-8.96382E-1	-9.04677E0	-9.04179E0	4.3869E-3	9.50813E-2	2.73546E1	-3.26366E1	-3.26236E1	2.68178E1	1.20106E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.9841E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.80551E-1	-8.96287E-1	-9.04665E0	-9.04191E0	4.24385E-3	9.46283E-2	2.73124E1	-3.26383E1	-3.26205E1	2.68382E1	1.19595E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.80837E-1	-8.96406E-1	-9.04696E0	-9.04157E0	4.31538E-3	9.45807E-2	2.73393E1	-3.26685E1	-3.26301E1	2.68286E1	1.19819E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00144E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.80861E-1	-8.96096E-1	-9.04682E0	-9.04191E0	4.19617E-3	9.48191E-2	2.73105E1	-3.26404E1	-3.26452E1	2.68172E1	1.19851E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.02769E-1