[Scan]
initial_time=2016-01-18T19:44:10
final_time=2016-01-18T19:44:30
ip_count=19
run=1024
dataset=5
scan=387
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.80194E-1
ql1_imon=1.34396E-8
ql2_vset=
ql2_vmon=-8.96358E-1
ql2_imon=1.92163E-9
ql3_vset=
ql3_vmon=-9.04682E0
ql3_imon=1.58799E-10
ql4_vset=
ql4_vmon=-9.04202E0
ql4_imon=-3.16978E-11
mult1=-9.921E-9
mult2=-2.83239E-9
rf_tmon=-5.16132E-3
rf_agc=3.20538E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.68136E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.37553E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19466E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.16146E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=1.10707E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40921E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03492E1
cs_ea2_imon=1.34283E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=3.03928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.36104E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.27364E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14597E1
os_ea1_imon=2.3551E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63341E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21184E0
cs_ionrep_imon=9.40879E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.36549E-8
tplens_vset=1.4E-1
tplens_vmon=1.68409E0
tplens_imon=-1.15493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.52128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98126E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.07298E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=8.45709E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53268E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06048E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41873E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=3.44545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.10923E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.12339E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.96037E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-8.10312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47486E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.38966E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=8.26242E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.30711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33326E1
os_fil1_imon=9.43543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08368E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66271E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31849E1
cs_fil1_imon=7.08276E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5755E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69059E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22942E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54063E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22702E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16955E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.80456E-1	-8.96311E-1	-9.04675E0	-9.0416E0	4.24385E-3	9.51529E-2	2.73346E1	-3.26815E1	-3.26065E1	2.68274E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9978E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.8048E-1	-8.96192E-1	-9.04658E0	-9.04183E0	4.24385E-3	9.51529E-2	2.72904E1	-3.26334E1	-3.26156E1	2.68196E1	1.20055E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.80408E-1	-8.96335E-1	-9.04629E0	-9.04152E0	4.45843E-3	9.53674E-2	2.73248E1	-3.26532E1	-3.26034E1	2.68447E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.80527E-1	-8.96144E-1	-9.04653E0	-9.04202E0	4.07696E-3	9.55105E-2	2.73171E1	-3.26891E1	-3.26098E1	2.68532E1	1.19891E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.80408E-1	-8.96239E-1	-9.04644E0	-9.042E0	4.14848E-3	9.50575E-2	2.73712E1	-3.26603E1	-3.26068E1	2.68472E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.80241E-1	-8.96597E-1	-9.0466E0	-9.04167E0	4.26769E-3	9.45807E-2	2.73177E1	-3.26318E1	-3.26192E1	2.68349E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.80194E-1	-8.96454E-1	-9.04658E0	-9.04129E0	4.05312E-3	9.47952E-2	2.73228E1	-3.2662E1	-3.2613E1	2.68436E1	1.20196E-7	2.51641E-3	2.51641E-3	6.33131E-3	3.01381E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.79979E-1	-8.96454E-1	-9.04665E0	-9.04195E0	4.3869E-3	9.47952E-2	2.72831E1	-3.26364E1	-3.26132E1	2.68322E1	1.19697E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.80361E-1	-8.96358E-1	-9.04672E0	-9.04171E0	4.43459E-3	9.47237E-2	2.73051E1	-3.26614E1	-3.2649E1	2.684E1	1.19913E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.8017E-1	-8.96621E-1	-9.04691E0	-9.04186E0	4.36306E-3	9.51052E-2	2.73192E1	-3.26713E1	-3.26401E1	2.6855E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.80122E-1	-8.96549E-1	-9.04644E0	-9.04191E0	4.19617E-3	9.50813E-2	2.73346E1	-3.26602E1	-3.26284E1	2.68382E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.80384E-1	-8.96287E-1	-9.04682E0	-9.04171E0	4.17233E-3	9.52244E-2	2.73159E1	-3.265E1	-3.26104E1	2.68394E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.80599E-1	-8.96549E-1	-9.04696E0	-9.04202E0	4.60148E-3	9.51529E-2	2.7382E1	-3.27402E1	-3.25359E1	2.684E1	1.20122E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.80623E-1	-8.96549E-1	-9.04658E0	-9.04171E0	4.45843E-3	9.51052E-2	2.73063E1	-3.26572E1	-3.26248E1	2.68322E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.80265E-1	-8.96454E-1	-9.04648E0	-9.04214E0	4.24385E-3	9.50813E-2	2.73358E1	-3.26313E1	-3.26437E1	2.68508E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.80361E-1	-8.96621E-1	-9.04651E0	-9.04193E0	4.31538E-3	9.51767E-2	2.73249E1	-3.26494E1	-3.26524E1	2.68124E1	1.19861E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9926E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.80599E-1	-8.96668E-1	-9.04689E0	-9.042E0	4.12464E-3	9.49383E-2	2.73099E1	-3.26536E1	-3.26314E1	2.68298E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.80504E-1	-8.96478E-1	-9.04679E0	-9.04143E0	4.22001E-3	9.50575E-2	2.73516E1	-3.26303E1	-3.26401E1	2.684E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.80289E-1	-8.96382E-1	-9.04679E0	-9.04164E0	4.41074E-3	9.50813E-2	2.73116E1	-3.2675E1	-3.26354E1	2.6819E1	1.19713E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.0201E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.80194E-1	-8.96358E-1	-9.04682E0	-9.04202E0	4.45843E-3	9.49383E-2	2.73315E1	-3.26765E1	-3.26386E1	2.68472E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1