[Scan]
initial_time=2016-01-18T19:44:37
final_time=2016-01-18T19:44:57
ip_count=19
run=1024
dataset=5
scan=388
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.80575E-1
ql1_imon=1.33544E-8
ql2_vset=
ql2_vmon=-8.96025E-1
ql2_imon=1.95525E-9
ql3_vset=
ql3_vmon=-9.0467E0
ql3_imon=1.21343E-10
ql4_vset=
ql4_vmon=-9.04188E0
ql4_imon=-3.86238E-11
mult1=-9.90129E-9
mult2=-2.78009E-9
rf_tmon=-3.94317E-3
rf_agc=3.50906E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.67342E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.15677E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04417E1
cs_ea1_imon=1.09553E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39179E0
lens1_imon=2.75405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.36518E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.04829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.36046E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.38358E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23888E0
cs_ionrep_imon=9.39077E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=3.38337E-8
tplens_vset=1.4E-1
tplens_vmon=1.67688E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2662E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26508E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.09461E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29956E0
ionrepsh_imon=8.57605E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52788E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00724E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38269E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.44905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28991E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.08027E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.10959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.11116E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.02357E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.91588E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56699E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-6.69758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=8.28044E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=7.18454E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=6.91777E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.34098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.43375E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07702E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66253E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31801E1
cs_fil1_imon=6.95662E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76771E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68973E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73148E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4388E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.3918E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.80361E-1	-8.96287E-1	-9.04713E0	-9.04162E0	4.62532E-3	9.48191E-2	2.73346E1	-3.26654E1	-3.26243E1	2.67914E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.99613E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.80384E-1	-8.96382E-1	-9.04684E0	-9.04169E0	4.3869E-3	9.45091E-2	2.73639E1	-3.26817E1	-3.26168E1	2.68388E1	1.19985E-7	2.51972E-3	2.51972E-3	6.31827E-3	3.01155E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.80527E-1	-8.96335E-1	-9.04713E0	-9.04193E0	4.12464E-3	9.51529E-2	2.73387E1	-3.26708E1	-3.26585E1	2.68412E1					
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.80527E-1	-8.9643E-1	-9.04651E0	-9.04222E0	4.24385E-3	9.49383E-2	2.73309E1	-3.26615E1	-3.26104E1	2.68142E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.80742E-1	-8.96287E-1	-9.04667E0	-9.04183E0	4.36306E-3	9.50575E-2	2.73255E1	-3.2638E1	-3.26068E1	2.68262E1	1.19601E-7	2.51552E-3	2.51552E-3	6.35692E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.80527E-1	-8.96001E-1	-9.04667E0	-9.04171E0	4.3869E-3	9.5129E-2	2.7346E1	-3.26488E1	-3.2593E1	2.68334E1	1.19757E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.80861E-1	-8.96072E-1	-9.04694E0	-9.04193E0	4.50611E-3	9.48668E-2	2.7364E1	-3.26807E1	-3.25834E1	2.68683E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.80527E-1	-8.96239E-1	-9.04701E0	-9.04207E0	4.52995E-3	9.51052E-2	2.73246E1	-3.26496E1	-3.26107E1	2.68447E1	1.19872E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.01742E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.80456E-1	-8.96025E-1	-9.04691E0	-9.04212E0	4.24385E-3	9.52244E-2	2.73309E1	-3.2632E1	-3.26302E1	2.68388E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.80623E-1	-8.96096E-1	-9.04703E0	-9.04198E0	4.3869E-3	9.51767E-2	2.73063E1	-3.26735E1	-3.26098E1	2.68298E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.8048E-1	-8.96072E-1	-9.04684E0	-9.042E0	3.8147E-3	9.50098E-2	2.73009E1	-3.2644E1	-3.26182E1	2.68172E1	1.19925E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.03081E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.80694E-1	-8.96096E-1	-9.04691E0	-9.04188E0	4.22001E-3	9.50813E-2	2.73327E1	-3.26506E1	-3.2647E1	2.68244E1	1.19809E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.80265E-1	-8.95953E-1	-9.04675E0	-9.04167E0	4.57764E-3	9.50813E-2	2.73405E1	-3.26326E1	-3.25515E1	2.68148E1	1.19851E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.80218E-1	-8.96096E-1	-9.04696E0	-9.04174E0	4.57764E-3	9.51767E-2	2.73257E1	-3.26785E1	-3.26095E1	2.6846E1	1.20031E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.0041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.80313E-1	-8.96358E-1	-9.04698E0	-9.04183E0	4.48227E-3	9.52482E-2	2.73429E1	-3.26645E1	-3.26362E1	2.6819E1	1.19646E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.80337E-1	-8.96287E-1	-9.04703E0	-9.04174E0	4.43459E-3	9.50336E-2	2.73472E1	-3.26669E1	-3.26158E1	2.68046E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.80218E-1	-8.96358E-1	-9.04708E0	-9.042E0	4.48227E-3	9.49621E-2	2.73027E1	-3.26464E1	-3.26242E1	2.68064E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.80432E-1	-8.96144E-1	-9.0467E0	-9.04205E0	4.64916E-3	9.5129E-2	2.73145E1	-3.26425E1	-3.26325E1	2.68458E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.80551E-1	-8.96454E-1	-9.04675E0	-9.04174E0	4.24385E-3	9.52244E-2	2.73069E1	-3.27035E1	-3.25906E1	2.6819E1	1.2033E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.80575E-1	-8.96025E-1	-9.0467E0	-9.04188E0	4.36306E-3	9.50098E-2	2.73187E1	-3.26508E1	-3.2662E1	2.6822E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1