[Scan]
initial_time=2016-01-18T19:46:25
final_time=2016-01-18T19:46:45
ip_count=19
run=1024
dataset=5
scan=392
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.80551E-1
ql1_imon=1.34079E-8
ql2_vset=
ql2_vmon=-8.96144E-1
ql2_imon=1.99473E-9
ql3_vset=
ql3_vmon=-9.04672E0
ql3_imon=1.69432E-10
ql4_vset=
ql4_vmon=-9.04167E0
ql4_imon=-4.68016E-11
mult1=-1.00053E-8
mult2=-2.7745E-9
rf_tmon=-4.90296E-3
rf_agc=3.35439E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.64235E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63912E0
bslens_imon=2.3741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19633E1
lens5a_imon=2.00815E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05298E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.16794E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02235E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04657E1
cs_ea1_imon=1.09946E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43133E0
lens1_imon=2.79649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03605E1
cs_ea2_imon=1.34187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.0346E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.35539E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.26031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14877E1
os_ea1_imon=2.35267E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.10451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21414E0
cs_ionrep_imon=9.47763E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93574E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=1.95197E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.34922E-8
tplens_vset=1.4E-1
tplens_vmon=1.73142E0
tplens_imon=-1.41884E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.52075E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.57437E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.9828E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.08621E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29862E0
ionrepsh_imon=8.3941E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.16388E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.14236E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49268E0
os_ea2_imon=-6.9283E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00718E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=3.44149E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.30185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.09901E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73634E1
iondef1_imon=1.11452E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.11152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.0662E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.89986E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-9.22035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56723E1
einzel_imon=7.96174E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=7.15998E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.55762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50172E3
multb_neg_imon=7.2665E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31775E0
defgridb_imon=6.2748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.42372E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07876E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65899E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3182E1
cs_fil1_imon=7.65339E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2992E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68391E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.68622E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78213E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.77409E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.74619E-1
res40_imon=-2.32037E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.80265E-1	-8.96358E-1	-9.04629E0	-9.04169E0	4.45843E-3	9.5129E-2	2.73222E1	-3.26838E1	-3.26213E1	2.68196E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02659E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.80456E-1	-8.96549E-1	-9.04648E0	-9.04233E0	4.26769E-3	9.49383E-2	2.73145E1	-3.26508E1	-3.26388E1	2.68419E1	1.19653E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.80241E-1	-8.96716E-1	-9.04672E0	-9.04191E0	4.36306E-3	9.50336E-2	2.73016E1	-3.26856E1	-3.26307E1	2.68233E1	1.19843E-7	2.51731E-3	2.51731E-3	6.33863E-3	3.01051E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.80289E-1	-8.96621E-1	-9.0466E0	-9.04193E0	4.52995E-3	9.4986E-2	2.73087E1	-3.26645E1	-3.26446E1	2.68316E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.80456E-1	-8.96573E-1	-9.04682E0	-9.04205E0	4.36306E-3	9.47952E-2	2.73297E1	-3.26573E1	-3.25966E1	2.68358E1	1.19851E-7	2.51739E-3	2.51739E-3	6.28056E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.80504E-1	-8.96287E-1	-9.04655E0	-9.04195E0	4.41074E-3	9.47714E-2	2.73085E1	-3.2658E1	-3.26218E1	2.68334E1	1.20017E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.80408E-1	-8.96406E-1	-9.04672E0	-9.04179E0	4.62532E-3	9.4676E-2	2.73075E1	-3.26408E1	-3.26236E1	2.68377E1	1.20139E-7	2.51886E-3	2.51886E-3	6.35038E-3	3.00494E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.80241E-1	-8.96788E-1	-9.0467E0	-9.04193E0	4.43459E-3	9.4986E-2	2.73285E1	-3.26819E1	-3.26188E1	2.68532E1	1.20106E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.80432E-1	-8.9674E-1	-9.04632E0	-9.04226E0	4.62532E-3	9.50098E-2	2.73145E1	-3.26408E1	-3.26543E1	2.68364E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.80122E-1	-8.96549E-1	-9.04639E0	-9.04207E0	4.8399E-3	9.5129E-2	2.73387E1	-3.26626E1	-3.26319E1	2.68348E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.80194E-1	-8.96597E-1	-9.04667E0	-9.04195E0	4.74453E-3	9.50098E-2	2.73237E1	-3.26801E1	-3.26008E1	2.6843E1	1.198E-7	2.52276E-3	2.52276E-3	6.28056E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.80194E-1	-8.96406E-1	-9.04658E0	-9.0421E0	4.31538E-3	9.49383E-2	2.73105E1	-3.26218E1	-3.26536E1	2.68334E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.80241E-1	-8.9643E-1	-9.0467E0	-9.04174E0	4.45843E-3	9.50098E-2	2.73285E1	-3.26801E1	-3.26386E1	2.6831E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.80337E-1	-8.96049E-1	-9.04648E0	-9.042E0	4.36306E-3	9.52959E-2	2.73075E1	-3.26398E1	-3.26362E1	2.68334E1	1.19653E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.80647E-1	-8.96525E-1	-9.04655E0	-9.04198E0	4.24385E-3	9.50813E-2	2.73039E1	-3.2678E1	-3.26517E1	2.68512E1	1.19861E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.80504E-1	-8.9643E-1	-9.04655E0	-9.04219E0	4.48227E-3	9.47952E-2	2.73145E1	-3.26803E1	-3.26166E1	2.68395E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.80837E-1	-8.96311E-1	-9.04663E0	-9.04231E0	4.55379E-3	9.48906E-2	2.73284E1	-3.26719E1	-3.25997E1	2.6845E1	1.19705E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80361E-1	-8.96168E-1	-9.04665E0	-9.04179E0	4.62532E-3	9.52721E-2	2.73411E1	-3.26596E1	-3.26431E1	2.68499E1	1.19653E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.8048E-1	-8.96406E-1	-9.04667E0	-9.04181E0	4.36306E-3	9.52721E-2	2.73045E1	-3.26331E1	-3.2613E1	2.6825E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.80551E-1	-8.96144E-1	-9.04672E0	-9.04167E0	4.55379E-3	9.50336E-2	2.73634E1	-3.26591E1	-3.26296E1	2.68334E1	1.198E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1