[Scan]
initial_time=2016-01-18T19:47:19
final_time=2016-01-18T19:47:38
ip_count=19
run=1024
dataset=5
scan=394
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.80194E-1
ql1_imon=1.34237E-8
ql2_vset=
ql2_vmon=-8.96358E-1
ql2_imon=1.91462E-9
ql3_vset=
ql3_vmon=-9.04684E0
ql3_imon=1.53279E-10
ql4_vset=
ql4_vmon=-9.04179E0
ql4_imon=-2.21968E-11
mult1=-1.04687E-8
mult2=-2.79577E-9
rf_tmon=-4.06705E-3
rf_agc=3.38459E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.74953E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=2.02345E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04776E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54127E1
cs_ef1b_imon=3.16398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04549E1
cs_ea1_imon=1.09697E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=3.01E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03348E1
cs_ea2_imon=1.36951E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=3.04217E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.35519E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.35546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=9.65753E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.95305E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.35278E-8
tplens_vset=1.4E-1
tplens_vmon=1.68289E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2675E1
iondef3_imon=1.51659E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.55228E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03019E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.07449E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=8.42104E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.19468E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52127E0
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.50883E-1
os_ef2bup_imon=-5.10984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11382E1
os_restr2_imon=3.44185E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.29496E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.12257E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.1144E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.07879E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.91882E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-8.03104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-2.55301E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.17372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.81323E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51585E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.41711E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08014E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66188E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31845E1
cs_fil1_imon=7.97174E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.44936E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68907E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49939E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.05329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64678E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22686E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.55688E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.80623E-1	-8.96239E-1	-9.04672E0	-9.04214E0	4.55379E-3	9.52244E-2	2.73175E1	-3.2688E1	-3.25759E1	2.68279E1	1.20226E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.80599E-1	-8.95929E-1	-9.04677E0	-9.04191E0	4.76837E-3	9.52005E-2	2.73075E1	-3.26976E1	-3.25483E1	2.68144E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.80718E-1	-8.96025E-1	-9.04701E0	-9.04183E0	4.76837E-3	9.51767E-2	2.73216E1	-3.26649E1	-3.26065E1	2.68435E1	1.19978E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.0041E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.80337E-1	-8.96239E-1	-9.04682E0	-9.04167E0	4.45843E-3	9.51529E-2	2.73033E1	-3.26434E1	-3.26422E1	2.68226E1	1.19891E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.02875E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.80432E-1	-8.96025E-1	-9.04696E0	-9.04143E0	4.52995E-3	9.50098E-2	2.73189E1	-3.26356E1	-3.26543E1	2.68268E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.80766E-1	-8.96525E-1	-9.04684E0	-9.04176E0	4.60148E-3	9.51052E-2	2.73273E1	-3.26374E1	-3.26026E1	2.68599E1	1.19819E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.80623E-1	-8.96478E-1	-9.04706E0	-9.04164E0	4.57764E-3	9.50575E-2	2.73195E1	-3.26284E1	-3.26008E1	2.68208E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.80408E-1	-8.96287E-1	-9.04691E0	-9.0421E0	4.81606E-3	9.54628E-2	2.73285E1	-3.26783E1	-3.2644E1	2.68256E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.80337E-1	-8.96215E-1	-9.04725E0	-9.04191E0	4.673E-3	9.5439E-2	2.73222E1	-3.26685E1	-3.25682E1	2.68292E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.8048E-1	-8.9643E-1	-9.04682E0	-9.04183E0	4.93526E-3	9.52482E-2	2.73502E1	-3.26464E1	-3.26056E1	2.68316E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09673E0	-8.80456E-1	-8.96287E-1	-9.04686E0	-9.04207E0	4.79221E-3	9.53436E-2	2.73173E1	-3.26627E1	-3.26321E1	2.68076E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.80361E-1	-8.96406E-1	-9.04641E0	-9.04174E0	4.81606E-3	9.50336E-2	2.73187E1	-3.26514E1	-3.26703E1	2.68028E1	1.19965E-7	2.51552E-3	2.51552E-3	6.35692E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.80384E-1	-8.96287E-1	-9.04686E0	-9.04233E0	4.64916E-3	9.53436E-2	2.72991E1	-3.26176E1	-3.26212E1	2.68076E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.80194E-1	-8.96358E-1	-9.04694E0	-9.04198E0	4.48227E-3	9.51052E-2	2.73526E1	-3.26615E1	-3.26506E1	2.68412E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.80003E-1	-8.96335E-1	-9.04691E0	-9.04207E0	4.62532E-3	9.5129E-2	2.72898E1	-3.2662E1	-3.26266E1	2.68036E1	1.19953E-7	2.52923E-3	2.52923E-3	6.31817E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.80146E-1	-8.96502E-1	-9.04727E0	-9.04226E0	4.31538E-3	9.53913E-2	2.73147E1	-3.26567E1	-3.26188E1	2.68166E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9874E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.80742E-1	-8.96168E-1	-9.04725E0	-9.04195E0	4.43459E-3	9.52482E-2	2.73333E1	-3.26723E1	-3.26567E1	2.68448E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.80814E-1	-8.96335E-1	-9.04679E0	-9.04155E0	4.19617E-3	9.49383E-2	2.73291E1	-3.26879E1	-3.26945E1	2.68484E1	1.20004E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.80814E-1	-8.96478E-1	-9.04684E0	-9.04145E0	4.19617E-3	9.50575E-2	2.73063E1	-3.26301E1	-3.26148E1	2.6843E1	1.19809E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.80194E-1	-8.96358E-1	-9.04684E0	-9.04179E0	4.14848E-3	9.50336E-2	2.7285E1	-3.26655E1	-3.2675E1	2.68244E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1