[Scan]
initial_time=2016-01-18T19:47:46
final_time=2016-01-18T19:48:05
ip_count=19
run=1024
dataset=5
scan=395
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.80241E-1
ql1_imon=1.34123E-8
ql2_vset=
ql2_vmon=-8.96382E-1
ql2_imon=1.90208E-9
ql3_vset=
ql3_vmon=-9.04651E0
ql3_imon=1.73748E-10
ql4_vset=
ql4_vmon=-9.04191E0
ql4_imon=-4.19378E-11
mult1=-9.37917E-9
mult2=-2.78847E-9
rf_tmon=-3.20863E-3
rf_agc=3.41868E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.67172E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.20701E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54038E1
cs_ef1b_imon=3.16636E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.0194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04693E1
cs_ea1_imon=1.11015E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38436E0
lens1_imon=3.07063E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.34906E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.04855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.35372E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.26663E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=2.35567E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.08435E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=9.52297E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=1.97504E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.36177E-8
tplens_vset=1.4E-1
tplens_vmon=1.68568E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.5232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03028E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=4.00956E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31699E0
ionrepsh_imon=8.40452E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.1649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74785E1
cs_ef2b_imon=3.13022E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56888E0
os_ea2_imon=-7.73168E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.16845E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09394E0
os_ef2alow_imon=-2.31741E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34879E-1
os_ef2bup_imon=-5.12194E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11158E1
os_restr2_imon=3.43882E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23002E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.09147E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.09564E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68504E1
iondef4_imon=1.10276E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.01894E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81116E-1
olens1_imon=7.92801E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14983E0
cs_ionaccel_imon=-7.25748E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.8199E-6
window_vset=0.0E0
window_vmon=2.53018E-1
window_imon=-6.84045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39206E-4
mask2_vset=0.0E0
mask2_vmon=-1.8624E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.4241E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35536E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.41262E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08279E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31822E1
cs_fil1_imon=7.10207E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.07138E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68907E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61048E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.46864E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.18265E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22729E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33461E-3
inlet_lpb_pmon=2.99088E-1
chamber_ion_pmon=1.2014E-7
chamber_cvt_pmon=2.51863E-3
foreline_cvt_pmon=2.51863E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.56513E-1
res40_imon=-2.33827E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.80194E-1	-8.96025E-1	-9.04696E0	-9.0415E0	4.48227E-3	9.52721E-2	2.73159E1	-3.26597E1	-3.26554E1	2.6834E1	1.19861E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.02133E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.80289E-1	-8.96287E-1	-9.04689E0	-9.04162E0	4.36306E-3	9.53674E-2	2.73259E1	-3.26499E1	-3.26321E1	2.68425E1	1.19595E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.79979E-1	-8.9612E-1	-9.04686E0	-9.04188E0	4.55379E-3	9.51529E-2	2.7297E1	-3.26457E1	-3.2615E1	2.68212E1	1.20084E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.98819E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.80027E-1	-8.96192E-1	-9.04684E0	-9.04226E0	4.43459E-3	9.50098E-2	2.73405E1	-3.26826E1	-3.26124E1	2.6836E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.80027E-1	-8.96525E-1	-9.0471E0	-9.04207E0	4.36306E-3	9.5129E-2	2.73287E1	-3.26626E1	-3.26413E1	2.68556E1	1.19991E-7	2.52236E-3	2.52236E-3	6.2863E-3	3.00348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.80241E-1	-8.9674E-1	-9.04706E0	-9.04214E0	4.57764E-3	9.52005E-2	2.73148E1	-3.26516E1	-3.26175E1	2.68384E1	1.19913E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.80218E-1	-8.96502E-1	-9.04677E0	-9.04133E0	4.07696E-3	9.50336E-2	2.73299E1	-3.26527E1	-3.26432E1	2.68536E1	1.20258E-7	2.5216E-3	2.5216E-3	6.31251E-3	3.01121E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.80289E-1	-8.96811E-1	-9.04663E0	-9.04157E0	4.24385E-3	9.50098E-2	2.73381E1	-3.26649E1	-3.26349E1	2.68499E1	1.20116E-7	2.51527E-3	2.51527E-3	6.28423E-3	3.03418E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.80218E-1	-8.96573E-1	-9.04644E0	-9.04164E0	4.43459E-3	9.50813E-2	2.73147E1	-3.26717E1	-3.262E1	2.68226E1	1.20004E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01995E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.80218E-1	-8.96549E-1	-9.04689E0	-9.04176E0	4.33922E-3	9.5129E-2	2.73297E1	-3.26536E1	-3.26536E1	2.68268E1	1.20137E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.80098E-1	-8.96716E-1	-9.04684E0	-9.0421E0	4.57764E-3	9.5129E-2	2.72809E1	-3.2639E1	-3.26826E1	2.68154E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.80003E-1	-8.96668E-1	-9.04663E0	-9.04193E0	4.64916E-3	9.52244E-2	2.73754E1	-3.26603E1	-3.26356E1	2.68394E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.80313E-1	-8.96454E-1	-9.04677E0	-9.04198E0	4.36306E-3	9.52721E-2	2.73167E1	-3.26505E1	-3.26701E1	2.68256E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.80408E-1	-8.9674E-1	-9.04706E0	-9.04205E0	4.43459E-3	9.50098E-2	2.73235E1	-3.26503E1	-3.26374E1	2.68379E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.80265E-1	-8.96549E-1	-9.0466E0	-9.042E0	4.50611E-3	9.49144E-2	2.73581E1	-3.26657E1	-3.27055E1	2.68089E1	1.19663E-7	2.51891E-3	2.51891E-3	6.32222E-3	2.98092E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.80384E-1	-8.96573E-1	-9.04634E0	-9.04198E0	4.26769E-3	9.49383E-2	2.73169E1	-3.26331E1	-3.2639E1	2.68366E1	1.20092E-7	2.5207E-3	2.5207E-3	6.3074E-3	3.02042E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.80551E-1	-8.96502E-1	-9.04667E0	-9.04205E0	4.26769E-3	9.51529E-2	2.73267E1	-3.26627E1	-3.26044E1	2.68202E1	1.2026E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9943E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.80384E-1	-8.96525E-1	-9.04684E0	-9.04183E0	4.48227E-3	9.46999E-2	2.73291E1	-3.26603E1	-3.26284E1	2.68376E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.80408E-1	-8.96549E-1	-9.04672E0	-9.04181E0	4.41074E-3	9.52959E-2	2.7337E1	-3.26384E1	-3.25664E1	2.68377E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.80241E-1	-8.96382E-1	-9.04651E0	-9.04191E0	4.31538E-3	9.53674E-2	2.73351E1	-3.2647E1	-3.2626E1	2.68504E1	1.2014E-7	2.51863E-3	2.51863E-3	6.33461E-3	2.99088E-1