[Scan]
initial_time=2016-01-18T19:48:39
final_time=2016-01-18T19:48:59
ip_count=19
run=1024
dataset=5
scan=397
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.80098E-1
ql1_imon=1.33927E-8
ql2_vset=
ql2_vmon=-8.96287E-1
ql2_imon=1.87479E-9
ql3_vset=
ql3_vmon=-9.04677E0
ql3_imon=1.54734E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=-1.89424E-11
mult1=-9.9812E-9
mult2=-2.74456E-9
rf_tmon=-4.1339E-3
rf_agc=3.33997E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=1.71837E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.39814E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.99925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53837E1
cs_ef1b_imon=3.16962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.10272E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41975E0
lens1_imon=2.78748E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.647E1
os_ef1alow_imon=2.99234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.35544E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.0394E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.35436E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11359E1
os_restr1_imon=4.25839E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1507E1
os_ea1_imon=2.36594E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.08292E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=9.42033E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93569E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01904E1
cs_anode1_imon=1.96265E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.36906E-8
tplens_vset=1.4E-1
tplens_vmon=1.67978E0
tplens_imon=-2.49335E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.52462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.55683E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.07695E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29929E0
ionrepsh_imon=8.37266E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33569E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.14166E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58834E0
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71317E1
cs_ef2a_imon=3.17103E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09142E0
os_ef2alow_imon=-2.38256E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27107E-1
os_ef2bup_imon=-5.13193E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11088E1
os_restr2_imon=3.43394E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.07695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.11582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.10281E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.12885E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.94812E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13781E0
cs_ionaccel_imon=-9.03491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.82584E-6
window_vset=0.0E0
window_vmon=2.52607E-1
window_imon=-7.23031E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39219E-4
mask2_vset=0.0E0
mask2_vmon=-1.85507E1
mask2_imon=-5.92108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.61877E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.76577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.88965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59159E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.44584E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66107E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31834E1
cs_fil1_imon=7.20464E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0059E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68857E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.46709E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27441E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.36613E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32639E-1
cs_fil2_imon=-2.37863E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1657E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22707E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.94928E-1
res40_imon=-2.41087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.79765E-1	-8.96454E-1	-9.04648E0	-9.04193E0	4.3869E-3	9.52721E-2	2.73482E1	-3.26691E1	-3.25841E1	2.68111E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.79884E-1	-8.96382E-1	-9.04648E0	-9.04233E0	4.22001E-3	9.54628E-2	2.7318E1	-3.26793E1	-3.26285E1	2.68313E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.80003E-1	-8.96287E-1	-9.04644E0	-9.04202E0	4.41074E-3	9.52959E-2	2.72999E1	-3.26619E1	-3.25814E1	2.6836E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01742E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.79955E-1	-8.96049E-1	-9.04651E0	-9.04164E0	4.43459E-3	9.52482E-2	2.73273E1	-3.26723E1	-3.26512E1	2.68166E1	1.19991E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.80337E-1	-8.96382E-1	-9.04684E0	-9.04198E0	4.43459E-3	9.52482E-2	2.72978E1	-3.26427E1	-3.26128E1	2.68069E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.80098E-1	-8.96764E-1	-9.04655E0	-9.04188E0	4.3869E-3	9.52482E-2	2.73399E1	-3.26537E1	-3.25953E1	2.68424E1	1.20028E-7	2.50646E-3	2.50646E-3	6.3074E-3	2.98829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.79955E-1	-8.96645E-1	-9.04675E0	-9.04195E0	4.52995E-3	9.53197E-2	2.73123E1	-3.26248E1	-3.26194E1	2.68442E1	1.19697E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.80098E-1	-8.96668E-1	-9.04691E0	-9.04167E0	4.29153E-3	9.54866E-2	2.7298E1	-3.26453E1	-3.26447E1	2.68211E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.80146E-1	-8.9643E-1	-9.0471E0	-9.042E0	4.50611E-3	9.56059E-2	2.73298E1	-3.26474E1	-3.26442E1	2.68451E1	1.20146E-7	2.52123E-3	2.52123E-3	6.31744E-3	3.03654E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.80098E-1	-8.96716E-1	-9.04701E0	-9.04188E0	4.69685E-3	9.5129E-2	2.73175E1	-3.26767E1	-3.26425E1	2.68306E1	1.19963E-7	2.51557E-3	2.51557E-3	6.30149E-3	3.00761E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.79931E-1	-8.96573E-1	-9.04696E0	-9.04217E0	4.48227E-3	9.55105E-2	2.73628E1	-3.26741E1	-3.25809E1	2.68292E1	1.20106E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.80051E-1	-8.9643E-1	-9.04672E0	-9.04229E0	4.69685E-3	9.5129E-2	2.73633E1	-3.26933E1	-3.25905E1	2.68517E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.80218E-1	-8.96621E-1	-9.04679E0	-9.04207E0	4.36306E-3	9.51767E-2	2.73309E1	-3.2647E1	-3.26765E1	2.68316E1	1.19925E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.00942E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.8017E-1	-8.96525E-1	-9.04672E0	-9.042E0	4.36306E-3	9.5129E-2	2.73171E1	-3.26597E1	-3.25864E1	2.68308E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.79931E-1	-8.96525E-1	-9.04655E0	-9.0421E0	4.24385E-3	9.53436E-2	2.73345E1	-3.26639E1	-3.25834E1	2.6849E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.80027E-1	-8.96573E-1	-9.04646E0	-9.04214E0	4.41074E-3	9.52244E-2	2.73287E1	-3.26691E1	-3.26166E1	2.68273E1	1.2033E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.79908E-1	-8.96835E-1	-9.0467E0	-9.04207E0	4.72069E-3	9.54151E-2	2.73418E1	-3.26646E1	-3.25795E1	2.68436E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.80194E-1	-8.96692E-1	-9.04658E0	-9.04195E0	4.673E-3	9.4986E-2	2.72797E1	-3.26632E1	-3.26272E1	2.6825E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.80218E-1	-8.96454E-1	-9.0466E0	-9.04205E0	4.86374E-3	9.50813E-2	2.73163E1	-3.26567E1	-3.2639E1	2.6834E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.80098E-1	-8.96287E-1	-9.04677E0	-9.04176E0	4.81606E-3	9.51052E-2	2.73141E1	-3.26759E1	-3.26296E1	2.68346E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.03545E-1