[Scan]
initial_time=2016-01-18T19:49:33
final_time=2016-01-18T19:49:52
ip_count=19
run=1024
dataset=5
scan=399
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.80361E-1
ql1_imon=1.34055E-8
ql2_vset=
ql2_vmon=-8.96239E-1
ql2_imon=1.92819E-9
ql3_vset=
ql3_vmon=-9.04684E0
ql3_imon=1.28889E-10
ql4_vset=
ql4_vmon=-9.04174E0
ql4_imon=-4.06981E-11
mult1=-1.01498E-8
mult2=-2.70065E-9
rf_tmon=-5.71408E-3
rf_agc=3.27748E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.68567E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.53054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=2.01443E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04851E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.17191E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=1.11067E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40741E0
lens1_imon=2.75405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.37275E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84749E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.36074E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.28085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.38466E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=9.31867E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93665E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.37327E-8
tplens_vset=1.4E-1
tplens_vmon=1.68109E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27017E1
iondef2_imon=1.5959E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.06293E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=8.44267E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58736E0
os_ea2_imon=-4.86804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.24829E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34064E-1
os_ef2bup_imon=-5.05578E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=3.43356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.1305E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.07342E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.94678E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17459E0
cs_ionaccel_imon=-6.51738E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.86419E-1
window_imon=-7.81481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82697E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.86939E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.25664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.41964E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0823E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66547E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=8.58441E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04585E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69222E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.40529E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22727E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83318E-1
res40_imon=-2.29515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.79669E-1	-8.96239E-1	-9.04675E0	-9.04198E0	4.74453E-3	9.49144E-2	2.73491E1	-3.26666E1	-3.26133E1	2.68476E1	1.20435E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01871E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.79836E-1	-8.96382E-1	-9.04689E0	-9.04157E0	4.57764E-3	9.50098E-2	2.73843E1	-3.26435E1	-3.26441E1	2.68151E1	1.20092E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.79526E-1	-8.96144E-1	-9.04679E0	-9.042E0	4.55379E-3	9.4986E-2	2.7285E1	-3.26909E1	-3.26006E1	2.68526E1	1.19829E-7	2.51611E-3	2.51611E-3	6.34164E-3	3.01337E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.79908E-1	-8.96144E-1	-9.04698E0	-9.04179E0	4.55379E-3	9.50098E-2	2.73281E1	-3.2695E1	-3.26095E1	2.6858E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09333E0	-8.79908E-1	-8.96144E-1	-9.04675E0	-9.04188E0	4.45843E-3	9.50575E-2	2.72904E1	-3.26358E1	-3.26138E1	2.68647E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.79955E-1	-8.96263E-1	-9.04679E0	-9.042E0	4.41074E-3	9.52482E-2	2.73234E1	-3.26644E1	-3.25947E1	2.6849E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.80003E-1	-8.96597E-1	-9.04715E0	-9.04193E0	4.17233E-3	9.53674E-2	2.73129E1	-3.26831E1	-3.26206E1	2.68406E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.80241E-1	-8.96144E-1	-9.04686E0	-9.04198E0	3.91006E-3	9.5129E-2	2.72877E1	-3.26194E1	-3.2617E1	2.67986E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.80051E-1	-8.96263E-1	-9.04689E0	-9.04202E0	4.05312E-3	9.50098E-2	2.73423E1	-3.26496E1	-3.26366E1	2.68358E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.03712E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.80003E-1	-8.96478E-1	-9.04703E0	-9.04195E0	4.17233E-3	9.48668E-2	2.72974E1	-3.26006E1	-3.26514E1	2.68453E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.8017E-1	-8.9643E-1	-9.04675E0	-9.04169E0	3.91006E-3	9.50336E-2	2.73663E1	-3.26823E1	-3.25428E1	2.67932E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.80051E-1	-8.96525E-1	-9.04708E0	-9.04195E0	4.14848E-3	9.52959E-2	2.73088E1	-3.26536E1	-3.26101E1	2.68581E1	1.20122E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.04505E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.79884E-1	-8.96406E-1	-9.04677E0	-9.04188E0	4.62532E-3	9.53197E-2	2.73576E1	-3.26614E1	-3.26508E1	2.68232E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.80527E-1	-8.9643E-1	-9.04691E0	-9.04195E0	4.31538E-3	9.47475E-2	2.73502E1	-3.26452E1	-3.26122E1	2.6822E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.80384E-1	-8.96287E-1	-9.0471E0	-9.04186E0	4.24385E-3	9.49144E-2	2.73405E1	-3.26338E1	-3.26302E1	2.68593E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.79955E-1	-8.96096E-1	-9.04694E0	-9.04186E0	4.1008E-3	9.4986E-2	2.7318E1	-3.26474E1	-3.26572E1	2.68358E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02133E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.80313E-1	-8.96049E-1	-9.04655E0	-9.04205E0	4.36306E-3	9.46999E-2	2.73246E1	-3.26673E1	-3.26307E1	2.67968E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.80337E-1	-8.96454E-1	-9.0466E0	-9.04229E0	4.26769E-3	9.50575E-2	2.7298E1	-3.26508E1	-3.26124E1	2.68209E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.80337E-1	-8.96263E-1	-9.04686E0	-9.04195E0	4.50611E-3	9.51529E-2	2.72408E1	-3.2649E1	-3.27611E1	2.68232E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.80361E-1	-8.96239E-1	-9.04684E0	-9.04174E0	4.64916E-3	9.51052E-2	2.73267E1	-3.27017E1	-3.26188E1	2.68496E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1