[Scan]
initial_time=2016-01-18T19:50:00
final_time=2016-01-18T19:50:19
ip_count=19
run=1024
dataset=5
scan=400
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.79836E-1
ql1_imon=1.33947E-8
ql2_vset=
ql2_vmon=-8.96382E-1
ql2_imon=1.89081E-9
ql3_vset=
ql3_vmon=-9.04665E0
ql3_imon=1.40321E-10
ql4_vset=
ql4_vmon=-9.04226E0
ql4_imon=-3.0148E-11
mult1=-9.84219E-9
mult2=-2.74089E-9
rf_tmon=-4.43869E-3
rf_agc=3.28431E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.69604E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.70961E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=2.00421E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05079E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.16578E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=1.11511E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38908E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.34942E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.36026E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11694E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15488E1
os_ea1_imon=2.35072E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22024E0
cs_ionrep_imon=9.36724E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.37428E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.51152E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.58514E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.07183E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29929E0
ionrepsh_imon=8.59211E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5382E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.31677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.09182E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11388E1
os_restr2_imon=3.44365E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.27698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.08639E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73434E1
iondef1_imon=1.12183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.12562E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.97952E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-8.5356E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-6.66154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39329E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.78158E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93749E3
defgrida_imon=6.60296E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.13387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.437E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07624E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66482E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31868E1
cs_fil1_imon=6.7584E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.90587E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69635E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61048E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.41042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.5749E-1
res40_imon=-2.28794E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80289E-1	-8.96096E-1	-9.04653E0	-9.04174E0	4.07696E-3	9.50575E-2	2.73429E1	-3.26669E1	-3.26218E1	2.68136E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-8.80003E-1	-8.9612E-1	-9.04684E0	-9.04217E0	4.29153E-3	9.53197E-2	2.73135E1	-3.26482E1	-3.26218E1	2.68442E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09325E0	-8.80194E-1	-8.96096E-1	-9.04648E0	-9.04186E0	4.12464E-3	9.52482E-2	2.72821E1	-3.26744E1	-3.26526E1	2.68348E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.80098E-1	-8.96049E-1	-9.04672E0	-9.04229E0	4.36306E-3	9.53197E-2	2.73033E1	-3.26759E1	-3.2608E1	2.68454E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09317E0	-8.80313E-1	-8.96406E-1	-9.04665E0	-9.04169E0	4.26769E-3	9.54866E-2	2.73257E1	-3.26815E1	-3.26408E1	2.68442E1	1.19861E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.80551E-1	-8.96335E-1	-9.04658E0	-9.04167E0	4.43459E-3	9.53436E-2	2.73177E1	-3.2647E1	-3.26687E1	2.68244E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09263E0	-8.80551E-1	-8.96049E-1	-9.04639E0	-9.04183E0	4.64916E-3	9.52005E-2	2.72919E1	-3.26735E1	-3.26284E1	2.6852E1	1.19809E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09309E0	-8.80408E-1	-8.96239E-1	-9.04686E0	-9.04198E0	4.93526E-3	9.53197E-2	2.72835E1	-3.26771E1	-3.2608E1	2.68478E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-8.80075E-1	-8.96049E-1	-9.0466E0	-9.04202E0	4.88758E-3	9.52244E-2	2.72973E1	-3.26554E1	-3.2632E1	2.68388E1	1.20435E-7	2.52977E-3	2.52977E-3	6.32936E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.79955E-1	-8.96025E-1	-9.04672E0	-9.04231E0	4.79221E-3	9.52244E-2	2.73417E1	-3.26452E1	-3.26609E1	2.6837E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-8.80265E-1	-8.96096E-1	-9.04675E0	-9.04214E0	4.69685E-3	9.51529E-2	2.73611E1	-3.27151E1	-3.25717E1	2.68319E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.80265E-1	-8.96263E-1	-9.04686E0	-9.04191E0	4.50611E-3	9.52244E-2	2.73347E1	-3.26437E1	-3.26112E1	2.68267E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.80241E-1	-8.96049E-1	-9.04715E0	-9.04164E0	4.43459E-3	9.50575E-2	2.73019E1	-3.26604E1	-3.26044E1	2.68188E1	1.19979E-7	2.52197E-3	2.52197E-3	6.3074E-3	3.00741E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.80361E-1	-8.96287E-1	-9.0467E0	-9.04155E0	4.48227E-3	9.52482E-2	2.73369E1	-3.26458E1	-3.26645E1	2.68532E1	1.20337E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01748E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.80456E-1	-8.96311E-1	-9.04708E0	-9.04169E0	4.52995E-3	9.51767E-2	2.73309E1	-3.26729E1	-3.26158E1	2.68262E1	1.20174E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.80337E-1	-8.96335E-1	-9.04689E0	-9.04186E0	4.36306E-3	9.51529E-2	2.73291E1	-3.26615E1	-3.26464E1	2.68484E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.80218E-1	-8.96454E-1	-9.04682E0	-9.04186E0	4.74453E-3	9.55105E-2	2.73435E1	-3.26645E1	-3.2638E1	2.68376E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.80432E-1	-8.96502E-1	-9.04686E0	-9.04179E0	4.64916E-3	9.50336E-2	2.73254E1	-3.26544E1	-3.25994E1	2.6825E1	1.20004E-7	2.51203E-3	2.51203E-3	6.36144E-3	3.03027E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.80265E-1	-8.96311E-1	-9.04665E0	-9.04191E0	4.3869E-3	9.52005E-2	2.73514E1	-3.26669E1	-3.26561E1	2.68388E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.79836E-1	-8.96382E-1	-9.04665E0	-9.04226E0	4.673E-3	9.51529E-2	2.73434E1	-3.26649E1	-3.26337E1	2.68424E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1