[Scan]
initial_time=2016-01-18T19:53:16
final_time=2016-01-18T19:53:35
ip_count=19
run=1024
dataset=6
scan=401
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.36451E-8
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=1.92775E-9
ql3_vset=
ql3_vmon=-9.13222E0
ql3_imon=1.62148E-10
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=3.92199E-12
mult1=-9.31021E-9
mult2=-2.73894E-9
rf_tmon=-5.19376E-3
rf_agc=3.35392E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.65931E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19152E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04796E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53968E1
cs_ef1b_imon=2.85706E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04392E1
cs_ea1_imon=2.45124E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37846E0
lens1_imon=2.38752E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.48356E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84701E1
cs_ef1a_imon=2.94742E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.3787E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1154E1
os_restr1_imon=4.24786E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14834E1
os_ea1_imon=2.3447E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.20713E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91956E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=3.04438E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.38565E-8
tplens_vset=1.4E-1
tplens_vmon=1.6314E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26437E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.55824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.02832E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24797E0
ionrepsh_imon=1.83113E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34076E1
lens5b_imon=2.15463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53348E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.15767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05977E0
os_ef2alow_imon=-2.4877E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06498E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1132E1
os_restr2_imon=3.44299E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01751E1
cs_anode2_imon=2.25063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73004E1
iondef1_imon=1.11511E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68508E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.77175E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=8.01927E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16779E0
cs_ionaccel_imon=-1.7857E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5666E1
einzel_imon=7.69131E-6
window_vset=0.0E0
window_vmon=2.47225E-1
window_imon=-8.30005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82662E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.86049E1
mask2_imon=-7.32698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.56922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93673E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.21882E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25791E0
defgridb_imon=5.8526E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.334E1
os_fil1_imon=9.44581E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07051E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67072E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=1.00678E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63663E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68678E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.04848E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.47225E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22831E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.72904E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.17084E-1	-7.98464E-1	-9.13222E0	-9.14314E0	4.81606E-3	9.48668E-2	2.73299E1	-3.26838E1	-3.26183E1	2.6855E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
2.0E0	5.2E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17037E-1	-7.98011E-1	-9.13212E0	-9.14304E0	4.64916E-3	9.49621E-2	2.73069E1	-3.26346E1	-3.2596E1	2.684E1	1.19851E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.17156E-1	-7.97582E-1	-9.13184E0	-9.14302E0	4.55379E-3	9.48429E-2	2.72998E1	-3.26502E1	-3.26113E1	2.68314E1	1.20017E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01347E-1
4.0E0	1.2E1	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.1737E-1	-7.97844E-1	-9.13162E0	-9.14276E0	4.74453E-3	9.51052E-2	2.7347E1	-3.26236E1	-3.26561E1	2.68088E1	1.19851E-7	2.51847E-3	2.51847E-3	6.2752E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17394E-1	-7.97987E-1	-9.13186E0	-9.14271E0	4.3869E-3	9.49144E-2	2.73305E1	-3.26815E1	-3.25883E1	2.68298E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.17585E-1	-7.98249E-1	-9.13229E0	-9.14285E0	4.72069E-3	9.50098E-2	2.73237E1	-3.26567E1	-3.26573E1	2.68298E1	1.20158E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17013E-1	-7.97939E-1	-9.132E0	-9.14297E0	4.76837E-3	9.51767E-2	2.73275E1	-3.26529E1	-3.26143E1	2.68311E1	1.1966E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17156E-1	-7.97606E-1	-9.1321E0	-9.14302E0	4.72069E-3	9.50336E-2	2.73105E1	-3.26338E1	-3.2638E1	2.68496E1	1.20003E-7	2.51823E-3	2.51823E-3	6.32247E-3	3.00293E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16989E-1	-7.97796E-1	-9.13193E0	-9.14252E0	4.41074E-3	9.51529E-2	2.73173E1	-3.2678E1	-3.26089E1	2.68448E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16965E-1	-7.97892E-1	-9.13196E0	-9.14252E0	4.88758E-3	9.51052E-2	2.73574E1	-3.26573E1	-3.26428E1	2.68238E1	1.20297E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.00942E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16894E-1	-7.98059E-1	-9.13181E0	-9.14307E0	4.74453E-3	9.52482E-2	2.73105E1	-3.26831E1	-3.26056E1	2.68262E1	1.20226E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02133E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16989E-1	-7.98178E-1	-9.13181E0	-9.14278E0	4.64916E-3	9.53436E-2	2.73352E1	-3.26661E1	-3.26472E1	2.68418E1	1.19965E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16751E-1	-7.98154E-1	-9.13184E0	-9.14278E0	4.55379E-3	9.50575E-2	2.73492E1	-3.27117E1	-3.2593E1	2.6828E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16751E-1	-7.98059E-1	-9.13186E0	-9.14285E0	4.64916E-3	9.54866E-2	2.73181E1	-3.2639E1	-3.26036E1	2.68112E1	1.19766E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.00144E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16965E-1	-7.97892E-1	-9.13191E0	-9.14261E0	4.48227E-3	9.52244E-2	2.73099E1	-3.26561E1	-3.26831E1	2.68478E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17013E-1	-7.97939E-1	-9.13186E0	-9.14271E0	4.45843E-3	9.54628E-2	2.73406E1	-3.2664E1	-3.26358E1	2.68364E1	1.19925E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.01209E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16751E-1	-7.97963E-1	-9.1321E0	-9.14273E0	4.72069E-3	9.53436E-2	2.73193E1	-3.2649E1	-3.26166E1	2.68406E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.1687E-1	-7.98178E-1	-9.13203E0	-9.14271E0	4.86374E-3	9.52482E-2	2.73116E1	-3.26767E1	-3.26042E1	2.68319E1	1.19861E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.1718E-1	-7.98249E-1	-9.13215E0	-9.14316E0	4.52995E-3	9.56297E-2	2.73213E1	-3.26831E1	-3.26224E1	2.68082E1	1.19697E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16798E-1	-7.97725E-1	-9.13222E0	-9.14278E0	4.93526E-3	9.52482E-2	2.73004E1	-3.26655E1	-3.26437E1	2.68508E1	1.20004E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99175E-1