[Scan]
initial_time=2016-01-18T19:54:09
final_time=2016-01-18T19:54:29
ip_count=19
run=1024
dataset=6
scan=403
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.17084E-1
ql1_imon=1.3621E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.91942E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=1.0637E-10
ql4_vset=
ql4_vmon=-9.14266E0
ql4_imon=-2.56896E-11
mult1=-9.9465E-9
mult2=-2.70781E-9
rf_tmon=-7.94773E-3
rf_agc=3.13484E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.6459E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6391E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1961E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.0479E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=2.85512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05481E1
cs_ea1_imon=2.45352E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35814E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.51371E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84052E1
cs_ef1a_imon=2.93801E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.38596E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.25274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.35799E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.19467E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.03892E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.39283E-8
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.52452E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26556E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.09458E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.82409E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.16116E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57474E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37668E-1
os_ef2bup_imon=-4.96208E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.46239E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72612E1
iondef1_imon=1.1049E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68496E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.09297E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=8.08195E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.57587E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.64019E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.05115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33415E1
os_fil1_imon=9.43976E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07359E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67126E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=1.00536E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62216E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68839E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.07531E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.77601E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22869E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32632E-3
inlet_lpb_pmon=2.99061E-1
chamber_ion_pmon=1.19707E-7
chamber_cvt_pmon=2.50902E-3
foreline_cvt_pmon=2.50902E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.79114E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.16703E-1	-7.98154E-1	-9.13174E0	-9.14319E0	4.64916E-3	9.50098E-2	2.73263E1	-3.26874E1	-3.26018E1	2.68292E1	1.19601E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.9952E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.1687E-1	-7.98059E-1	-9.13165E0	-9.14285E0	4.673E-3	9.4986E-2	2.73484E1	-3.26326E1	-3.26272E1	2.6831E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09263E0	-8.16727E-1	-7.98202E-1	-9.13186E0	-9.14304E0	4.64916E-3	9.47952E-2	2.73228E1	-3.2652E1	-3.26054E1	2.68508E1	1.20137E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.9829E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09225E0	-8.16703E-1	-7.98416E-1	-9.13193E0	-9.14319E0	4.50611E-3	9.51529E-2	2.72957E1	-3.2675E1	-3.26189E1	2.68331E1	1.1979E-7	2.52659E-3	2.52659E-3	6.3074E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0934E0	-8.16846E-1	-7.98011E-1	-9.13224E0	-9.14264E0	4.29153E-3	9.51529E-2	2.73145E1	-3.26501E1	-3.26286E1	2.68396E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09302E0	-8.17323E-1	-7.97868E-1	-9.13186E0	-9.14237E0	4.72069E-3	9.53436E-2	2.73254E1	-3.26571E1	-3.26051E1	2.68481E1	1.19878E-7	2.5145E-3	2.5145E-3	6.3409E-3	3.02066E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-8.1718E-1	-7.97987E-1	-9.13196E0	-9.14264E0	4.43459E-3	9.52005E-2	2.73057E1	-3.26392E1	-3.2623E1	2.68334E1	1.19933E-7	2.51621E-3	2.51621E-3	6.30124E-3	3.00432E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09248E0	-8.16989E-1	-7.97987E-1	-9.13191E0	-9.1429E0	4.50611E-3	9.50336E-2	2.73093E1	-3.26567E1	-3.26044E1	2.68454E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09302E0	-8.17037E-1	-7.98082E-1	-9.13191E0	-9.14266E0	4.36306E-3	9.50575E-2	2.73576E1	-3.26254E1	-3.26148E1	2.68394E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3514E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-8.1718E-1	-7.98059E-1	-9.13169E0	-9.14273E0	4.29153E-3	9.54151E-2	2.72962E1	-3.26384E1	-3.26319E1	2.68424E1	1.19979E-7	2.51525E-3	2.51525E-3	6.33166E-3	3.01866E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.17323E-1	-7.98106E-1	-9.13181E0	-9.14276E0	4.41074E-3	9.55105E-2	2.73429E1	-3.265E1	-3.26356E1	2.68298E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.17108E-1	-7.98321E-1	-9.132E0	-9.1428E0	4.55379E-3	9.53197E-2	2.73424E1	-3.27017E1	-3.26038E1	2.68514E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16798E-1	-7.98488E-1	-9.13212E0	-9.14264E0	4.45843E-3	9.5129E-2	2.73183E1	-3.2647E1	-3.26518E1	2.68346E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16822E-1	-7.9844E-1	-9.1321E0	-9.14292E0	4.74453E-3	9.4986E-2	2.73382E1	-3.26548E1	-3.26199E1	2.68325E1	1.20278E-7	2.5068E-3	2.5068E-3	6.3514E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.17108E-1	-7.98249E-1	-9.13227E0	-9.14273E0	4.79221E-3	9.49621E-2	2.7324E1	-3.26862E1	-3.2613E1	2.68597E1	1.20031E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.98554E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.1706E-1	-7.98273E-1	-9.13246E0	-9.14297E0	4.57764E-3	9.53197E-2	2.73108E1	-3.26676E1	-3.26149E1	2.68298E1	1.19911E-7	2.52088E-3	2.52088E-3	6.31375E-3	2.99494E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16989E-1	-7.98368E-1	-9.13253E0	-9.14261E0	4.60148E-3	9.5439E-2	2.72898E1	-3.26572E1	-3.26171E1	2.68269E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16894E-1	-7.98011E-1	-9.13217E0	-9.14266E0	4.62532E-3	9.5129E-2	2.73269E1	-3.26483E1	-3.26116E1	2.68439E1	1.20005E-7	2.52106E-3	2.52106E-3	6.32483E-3	3.00087E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16965E-1	-7.97915E-1	-9.13243E0	-9.14247E0	4.57764E-3	9.55343E-2	2.73247E1	-3.26679E1	-3.25942E1	2.68298E1	1.20026E-7	2.5157E-3	2.5157E-3	6.33658E-3	3.00798E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.17084E-1	-7.98154E-1	-9.13219E0	-9.14266E0	4.673E-3	9.52721E-2	2.72612E1	-3.26556E1	-3.26356E1	2.68496E1	1.19707E-7	2.50902E-3	2.50902E-3	6.32632E-3	2.99061E-1