[Scan]
initial_time=2016-01-18T19:55:03
final_time=2016-01-18T19:55:22
ip_count=19
run=1024
dataset=6
scan=405
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.35763E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.96606E-9
ql3_vset=
ql3_vmon=-9.13184E0
ql3_imon=8.8203E-11
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-3.09229E-11
mult1=-9.60794E-9
mult2=-2.67669E-9
rf_tmon=-3.66526E-3
rf_agc=3.32435E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.6601E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=2.0166E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.84827E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04573E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05177E1
cs_ea1_imon=2.46186E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3413E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.50445E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84652E1
cs_ef1a_imon=2.94053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.3859E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.24481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=2.35957E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22319E0
cs_ionrep_imon=1.1997E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93608E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.0328E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.39688E-8
tplens_vset=1.4E-1
tplens_vmon=1.65736E0
tplens_imon=-2.56414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26861E1
iondef2_imon=1.55541E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.97971E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.04546E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26036E0
ionrepsh_imon=1.82795E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.1833E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55708E0
os_ea2_imon=-9.53678E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00563E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.1492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.44149E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29043E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24605E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.1329E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=8.05007E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82679E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.85785E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.87903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50052E3
multb_neg_imon=6.64189E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61226E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33394E1
os_fil1_imon=9.42168E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67075E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=1.0038E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63759E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6894E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.80295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.04721E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.2176E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22861E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86922E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.17013E-1	-7.97844E-1	-9.13224E0	-9.14266E0	4.76837E-3	9.50575E-2	2.73437E1	-3.26523E1	-3.26557E1	2.68462E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0071E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.1706E-1	-7.97963E-1	-9.13208E0	-9.14273E0	4.62532E-3	9.52005E-2	2.73461E1	-3.26717E1	-3.26148E1	2.68244E1	1.20113E-7	2.51752E-3	2.51752E-3	6.33297E-3	3.01365E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17132E-1	-7.97844E-1	-9.13188E0	-9.14307E0	4.41074E-3	9.5439E-2	2.72837E1	-3.2659E1	-3.26527E1	2.68319E1	1.20092E-7	2.5195E-3	2.5195E-3	6.31949E-3	3.02042E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16655E-1	-7.97486E-1	-9.13196E0	-9.14264E0	4.24385E-3	9.53913E-2	2.73405E1	-3.26506E1	-3.26278E1	2.68472E1	1.1979E-7	2.51182E-3	2.51182E-3	6.32328E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16441E-1	-7.97629E-1	-9.13188E0	-9.14257E0	4.45843E-3	9.51529E-2	2.73243E1	-3.26807E1	-3.259E1	2.68587E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.1656E-1	-7.97963E-1	-9.13196E0	-9.14278E0	4.31538E-3	9.51052E-2	2.72974E1	-3.26638E1	-3.2639E1	2.68214E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16441E-1	-7.97749E-1	-9.132E0	-9.14295E0	4.17233E-3	9.50098E-2	2.73279E1	-3.26591E1	-3.26392E1	2.68454E1	1.19851E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16798E-1	-7.97772E-1	-9.13215E0	-9.14259E0	4.45843E-3	9.4986E-2	2.7288E1	-3.26885E1	-3.2603E1	2.68563E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16393E-1	-7.97701E-1	-9.13181E0	-9.14271E0	4.45843E-3	9.50336E-2	2.73213E1	-3.26663E1	-3.26038E1	2.68514E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16584E-1	-7.98106E-1	-9.132E0	-9.14285E0	4.43459E-3	9.50336E-2	2.73688E1	-3.26422E1	-3.26248E1	2.68076E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09325E0	-8.16679E-1	-7.9782E-1	-9.13179E0	-9.14254E0	4.3869E-3	9.48668E-2	2.73147E1	-3.26711E1	-3.26344E1	2.68466E1	1.2033E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.16441E-1	-7.97892E-1	-9.13184E0	-9.14242E0	4.22001E-3	9.48191E-2	2.7347E1	-3.26756E1	-3.26178E1	2.68389E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16512E-1	-7.9751E-1	-9.13188E0	-9.14257E0	4.36306E-3	9.53197E-2	2.73616E1	-3.26585E1	-3.26386E1	2.683E1	1.19851E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.1656E-1	-7.98154E-1	-9.13188E0	-9.1428E0	4.36306E-3	9.51529E-2	2.73201E1	-3.26212E1	-3.26044E1	2.68554E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16607E-1	-7.97629E-1	-9.13203E0	-9.14304E0	4.55379E-3	9.51767E-2	2.73375E1	-3.26524E1	-3.26206E1	2.68587E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.1656E-1	-7.9782E-1	-9.13188E0	-9.14307E0	4.43459E-3	9.52482E-2	2.73275E1	-3.26809E1	-3.26183E1	2.68577E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.96929E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16655E-1	-7.97987E-1	-9.13186E0	-9.14288E0	4.64916E-3	9.52244E-2	2.73508E1	-3.2632E1	-3.26609E1	2.68472E1	1.20414E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16941E-1	-7.98106E-1	-9.1321E0	-9.14271E0	4.36306E-3	9.50336E-2	2.73375E1	-3.26697E1	-3.26419E1	2.68196E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.9926E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16679E-1	-7.98059E-1	-9.13217E0	-9.1428E0	4.45843E-3	9.48429E-2	2.73293E1	-3.26708E1	-3.26437E1	2.68319E1	1.20311E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-8.16798E-1	-7.97796E-1	-9.13184E0	-9.14268E0	4.14848E-3	9.50098E-2	2.73111E1	-3.26861E1	-3.26128E1	2.68298E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02253E-1