[Scan]
initial_time=2016-01-18T19:57:16
final_time=2016-01-18T19:57:36
ip_count=19
run=1024
dataset=6
scan=410
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.36164E-8
ql2_vset=
ql2_vmon=-7.97677E-1
ql2_imon=1.93608E-9
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=1.31166E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=5.00679E-13
mult1=-9.46345E-9
mult2=-2.71861E-9
rf_tmon=-3.91761E-3
rf_agc=3.4355E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.68574E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=2.8562E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02489E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.47479E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35994E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03546E1
cs_ea2_imon=1.50758E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84827E1
cs_ef1a_imon=2.94162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.37878E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.2549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.33311E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.22315E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.00613E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.39099E-8
tplens_vset=1.4E-1
tplens_vmon=1.73036E0
tplens_imon=-4.111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.54327E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98238E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.05183E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=1.79057E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.16296E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53328E0
os_ea2_imon=-5.58903E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=3.44257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.12384E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=8.02425E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=6.71229E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.83628E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33411E1
os_fil1_imon=9.43447E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07455E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67258E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30899E1
cs_fil1_imon=1.00093E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62996E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68634E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.09722E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22926E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13952E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16584E-1	-7.98059E-1	-9.13253E0	-9.14257E0	4.62532E-3	9.49383E-2	2.7321E1	-3.26514E1	-3.26602E1	2.68418E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16584E-1	-7.98059E-1	-9.13227E0	-9.14254E0	4.86374E-3	9.48429E-2	2.73297E1	-3.26609E1	-3.26242E1	2.68202E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16607E-1	-7.97606E-1	-9.13203E0	-9.14257E0	4.69685E-3	9.46999E-2	2.7311E1	-3.26773E1	-3.26089E1	2.68076E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16655E-1	-7.98082E-1	-9.13234E0	-9.14283E0	4.45843E-3	9.49144E-2	2.73003E1	-3.26609E1	-3.26567E1	2.68334E1	1.20106E-7	2.51096E-3	2.51096E-3	6.34518E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16393E-1	-7.97963E-1	-9.13188E0	-9.14295E0	4.62532E-3	9.51767E-2	2.73458E1	-3.26561E1	-3.26207E1	2.68178E1	1.19646E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16512E-1	-7.9813E-1	-9.13177E0	-9.14285E0	4.48227E-3	9.49383E-2	2.73454E1	-3.26819E1	-3.2653E1	2.68412E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17108E-1	-7.98011E-1	-9.13165E0	-9.14304E0	4.50611E-3	9.50098E-2	2.73087E1	-3.2653E1	-3.26188E1	2.6825E1	1.20017E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16703E-1	-7.98059E-1	-9.13169E0	-9.14283E0	4.17233E-3	9.47475E-2	2.73166E1	-3.26629E1	-3.26447E1	2.68445E1	1.20414E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16679E-1	-7.97963E-1	-9.13203E0	-9.14276E0	4.52995E-3	9.47714E-2	2.73025E1	-3.26591E1	-3.26001E1	2.68653E1	1.19773E-7	2.52364E-3	2.52364E-3	6.32784E-3	3.00149E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16822E-1	-7.97963E-1	-9.13217E0	-9.1428E0	4.45843E-3	9.51052E-2	2.72986E1	-3.26443E1	-3.26478E1	2.6822E1	1.1995E-7	2.51874E-3	2.51874E-3	6.3016E-3	2.98985E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16703E-1	-7.97772E-1	-9.13193E0	-9.14297E0	4.48227E-3	9.4986E-2	2.73399E1	-3.2653E1	-3.26536E1	2.68346E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16655E-1	-7.97963E-1	-9.13224E0	-9.14297E0	4.41074E-3	9.50336E-2	2.73652E1	-3.26933E1	-3.26218E1	2.68244E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16894E-1	-7.97701E-1	-9.13198E0	-9.14295E0	4.69685E-3	9.50813E-2	2.73327E1	-3.26615E1	-3.26146E1	2.6829E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02922E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16584E-1	-7.97725E-1	-9.13184E0	-9.14304E0	4.95911E-3	9.4986E-2	2.73339E1	-3.26452E1	-3.26627E1	2.68469E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16655E-1	-7.97963E-1	-9.13236E0	-9.14292E0	4.60148E-3	9.50813E-2	2.73267E1	-3.2653E1	-3.2599E1	2.68447E1	1.20031E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.99613E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16751E-1	-7.9782E-1	-9.13215E0	-9.14285E0	4.86374E-3	9.49621E-2	2.73028E1	-3.26104E1	-3.2644E1	2.6843E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.98156E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16607E-1	-7.97439E-1	-9.13224E0	-9.14292E0	4.81606E-3	9.5129E-2	2.73177E1	-3.26903E1	-3.25816E1	2.6849E1	1.20055E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16727E-1	-7.97629E-1	-9.13203E0	-9.14297E0	4.72069E-3	9.49383E-2	2.73339E1	-3.26561E1	-3.26272E1	2.68418E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16751E-1	-7.97701E-1	-9.13186E0	-9.14314E0	4.62532E-3	9.4986E-2	2.73328E1	-3.26655E1	-3.26419E1	2.68267E1	1.20069E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16655E-1	-7.97677E-1	-9.13198E0	-9.14268E0	4.57764E-3	9.50813E-2	2.73219E1	-3.26549E1	-3.26422E1	2.68322E1	1.19902E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.00966E-1