[Scan]
initial_time=2016-01-18T19:57:43
final_time=2016-01-18T19:58:02
ip_count=19
run=1024
dataset=6
scan=411
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36242E-8
ql2_vset=
ql2_vmon=-7.9782E-1
ql2_imon=1.92208E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=1.41656E-10
ql4_vset=
ql4_vmon=-9.14295E0
ql4_imon=-2.06947E-11
mult1=-9.29489E-9
mult2=-2.65873E-9
rf_tmon=-3.08246E-3
rf_agc=3.33816E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.66363E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.33089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=2.02049E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54127E1
cs_ef1b_imon=2.86521E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04434E1
cs_ea1_imon=2.47778E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34542E0
lens1_imon=2.46539E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04139E1
cs_ea2_imon=1.49807E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.94522E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.38172E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.24841E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1471E1
os_ea1_imon=2.34081E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28749E0
cs_ionrep_imon=1.2358E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.01586E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.38386E-8
tplens_vset=1.4E-1
tplens_vmon=1.61135E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.4825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.57099E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.9796E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.05375E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28808E0
ionrepsh_imon=1.80211E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58421E0
os_ea2_imon=-8.68732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15444E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.43968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.26637E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.25037E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.11237E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=8.04716E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-1.87709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.69664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.57464E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.8578E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34355E0
defgridb_imon=6.04373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33393E1
os_fil1_imon=9.43856E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.67218E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=1.00158E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63135E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68671E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.03456E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22904E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74308E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16751E-1	-7.98225E-1	-9.13248E0	-9.14257E0	4.62532E-3	9.51529E-2	2.72915E1	-3.26425E1	-3.26095E1	2.68065E1	1.20017E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.01085E-1
2.0E0	5.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16774E-1	-7.98082E-1	-9.13229E0	-9.14266E0	4.52995E-3	9.50098E-2	2.73499E1	-3.26773E1	-3.26354E1	2.68322E1	1.1974E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16774E-1	-7.98202E-1	-9.13248E0	-9.14321E0	4.69685E-3	9.51052E-2	2.737E1	-3.26838E1	-3.26154E1	2.68526E1	1.19757E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.1687E-1	-7.98202E-1	-9.13222E0	-9.14254E0	4.55379E-3	9.52005E-2	2.73424E1	-3.26759E1	-3.26536E1	2.68348E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.1687E-1	-7.97939E-1	-9.13217E0	-9.14254E0	4.31538E-3	9.53436E-2	2.73094E1	-3.26499E1	-3.26168E1	2.68194E1	1.20414E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16727E-1	-7.97915E-1	-9.13222E0	-9.14283E0	4.36306E-3	9.53436E-2	2.73605E1	-3.26732E1	-3.26349E1	2.68458E1	1.19925E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.01742E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16655E-1	-7.98178E-1	-9.13196E0	-9.1429E0	4.36306E-3	9.52959E-2	2.73267E1	-3.26711E1	-3.26002E1	2.6849E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16703E-1	-7.98059E-1	-9.13203E0	-9.14257E0	4.62532E-3	9.52721E-2	2.73187E1	-3.26632E1	-3.26396E1	2.68328E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.17084E-1	-7.98154E-1	-9.13198E0	-9.14261E0	4.673E-3	9.48906E-2	2.73387E1	-3.26524E1	-3.26356E1	2.68106E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.16965E-1	-7.98106E-1	-9.13188E0	-9.1429E0	4.72069E-3	9.51052E-2	2.73231E1	-3.26314E1	-3.26236E1	2.68508E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00453E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16703E-1	-7.98011E-1	-9.13229E0	-9.14245E0	4.69685E-3	9.50098E-2	2.73045E1	-3.26549E1	-3.26248E1	2.68316E1	1.20226E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.01609E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16774E-1	-7.97892E-1	-9.13217E0	-9.14257E0	4.69685E-3	9.54151E-2	2.73216E1	-3.26567E1	-3.26443E1	2.6822E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01871E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16917E-1	-7.98178E-1	-9.13231E0	-9.14257E0	4.69685E-3	9.52721E-2	2.73442E1	-3.26867E1	-3.2602E1	2.68377E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.17084E-1	-7.98297E-1	-9.13224E0	-9.14259E0	4.8399E-3	9.51529E-2	2.73562E1	-3.26446E1	-3.26693E1	2.68381E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.1687E-1	-7.98392E-1	-9.13208E0	-9.14292E0	4.91142E-3	9.49621E-2	2.73297E1	-3.26777E1	-3.26206E1	2.68458E1	1.2035E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16488E-1	-7.97939E-1	-9.13212E0	-9.14288E0	4.88758E-3	9.5129E-2	2.73117E1	-3.26476E1	-3.26296E1	2.68462E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99686E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16417E-1	-7.9813E-1	-9.1321E0	-9.14295E0	4.91142E-3	9.51767E-2	2.72991E1	-3.26621E1	-3.26002E1	2.6822E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00676E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16488E-1	-7.97963E-1	-9.13174E0	-9.14304E0	4.88758E-3	9.51052E-2	2.73057E1	-3.26655E1	-3.25983E1	2.68395E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.1656E-1	-7.97963E-1	-9.13198E0	-9.14309E0	4.60148E-3	9.50336E-2	2.73039E1	-3.2672E1	-3.26372E1	2.68611E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16417E-1	-7.9782E-1	-9.13179E0	-9.14295E0	4.86374E-3	9.5129E-2	2.73345E1	-3.26885E1	-3.26398E1	2.6843E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1