[Scan]
initial_time=2016-01-18T19:58:10
final_time=2016-01-18T19:58:29
ip_count=19
run=1024
dataset=6
scan=412
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.3635E-8
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=1.93152E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=1.00219E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-2.93493E-11
mult1=-9.85907E-9
mult2=-2.75853E-9
rf_tmon=-1.77781E-3
rf_agc=3.67096E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.64806E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68888E0
bslens_imon=2.32808E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19522E1
lens5a_imon=1.99634E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04786E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53918E1
cs_ef1b_imon=2.84999E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.0193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04723E1
cs_ea1_imon=2.49373E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30833E0
lens1_imon=2.48302E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64822E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03776E1
cs_ea2_imon=1.50371E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84258E1
cs_ef1a_imon=2.9434E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.37455E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11558E1
os_restr1_imon=4.25899E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15147E1
os_ea1_imon=2.35031E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63603E1
os_ef1bup_imon=3.07224E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23157E0
cs_ionrep_imon=1.20177E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01854E1
cs_anode1_imon=3.02086E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.38874E-8
tplens_vset=1.4E-1
tplens_vmon=1.67653E0
tplens_imon=-2.8603E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26335E1
iondef3_imon=1.49298E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.267E1
iondef2_imon=1.55059E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98135E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.05371E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26335E0
ionrepsh_imon=1.8124E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33625E1
lens5b_imon=2.16756E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74612E1
cs_ef2b_imon=3.12673E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55933E0
os_ea2_imon=-7.3893E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71173E1
cs_ef2a_imon=3.15981E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08959E0
os_ef2alow_imon=-2.48659E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38077E-1
os_ef2bup_imon=-5.33185E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11162E1
os_restr2_imon=3.44123E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.27545E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.24396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.1104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68441E1
iondef4_imon=1.10391E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.08504E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=8.02214E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14376E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56632E1
einzel_imon=7.66059E-6
window_vset=0.0E0
window_vmon=2.71714E-1
window_imon=-8.09015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39107E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.89553E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.19079E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.97626E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=7.45697E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43551E0
defgridb_imon=6.1817E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33374E1
os_fil1_imon=9.43212E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07297E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66996E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=1.00133E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63261E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68757E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35877E-2
os_fil2_imon=-2.55497E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94062E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.12648E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34686E-1
cs_fil2_imon=-2.49009E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.10758E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2297E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15922E-1
res40_imon=-2.45156E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16822E-1	-7.98202E-1	-9.13167E0	-9.14307E0	4.8399E-3	9.52005E-2	2.73352E1	-3.26573E1	-3.26319E1	2.68424E1	1.20188E-7	2.51793E-3	2.51793E-3	6.31925E-3	3.01609E-1
2.0E0	4.3E1	2.0E0	3.16E2	1.6E2	-2.09526E0	-8.17227E-1	-7.97987E-1	-9.13179E0	-9.14266E0	4.93526E-3	9.50098E-2	2.73003E1	-3.26921E1	-3.26188E1	2.68208E1	1.19697E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16798E-1	-7.9813E-1	-9.13236E0	-9.1429E0	4.8399E-3	9.51767E-2	2.73173E1	-3.26886E1	-3.26121E1	2.68325E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00942E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.16774E-1	-7.97987E-1	-9.13191E0	-9.1428E0	4.74453E-3	9.50813E-2	2.73321E1	-3.26579E1	-3.26302E1	2.68424E1	1.20042E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.16751E-1	-7.98297E-1	-9.13198E0	-9.14319E0	4.93526E-3	9.52005E-2	2.73069E1	-3.26627E1	-3.26296E1	2.684E1	1.19953E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.16703E-1	-7.98249E-1	-9.13215E0	-9.14307E0	5.03063E-3	9.53197E-2	2.73255E1	-3.26609E1	-3.26008E1	2.68472E1	1.20244E-7	2.5225E-3	2.5225E-3	6.31299E-3	2.99879E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.16846E-1	-7.98059E-1	-9.13222E0	-9.14297E0	4.8399E-3	9.50575E-2	2.73063E1	-3.26488E1	-3.26242E1	2.68352E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.97901E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16751E-1	-7.98059E-1	-9.13219E0	-9.14304E0	4.74453E-3	9.48668E-2	2.73195E1	-3.26344E1	-3.25936E1	2.68454E1	1.19925E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.98819E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16417E-1	-7.97963E-1	-9.13227E0	-9.14268E0	4.76837E-3	9.47475E-2	2.73393E1	-3.26585E1	-3.26384E1	2.68123E1	1.2026E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16655E-1	-7.97987E-1	-9.13219E0	-9.14302E0	4.673E-3	9.50336E-2	2.73181E1	-3.26697E1	-3.26042E1	2.6852E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02511E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16727E-1	-7.98154E-1	-9.13198E0	-9.14288E0	4.88758E-3	9.50098E-2	2.73351E1	-3.26398E1	-3.26693E1	2.68538E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.16727E-1	-7.97725E-1	-9.13215E0	-9.14295E0	4.64916E-3	9.50813E-2	2.73309E1	-3.265E1	-3.26314E1	2.68268E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09317E0	-8.16798E-1	-7.97915E-1	-9.13224E0	-9.14278E0	4.8399E-3	9.48191E-2	2.73117E1	-3.26494E1	-3.26627E1	2.68268E1	1.19757E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16774E-1	-7.97987E-1	-9.132E0	-9.14252E0	4.69685E-3	9.50336E-2	2.73151E1	-3.27015E1	-3.26278E1	2.68346E1	1.20017E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.9874E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09333E0	-8.16894E-1	-7.97772E-1	-9.132E0	-9.14271E0	4.48227E-3	9.48429E-2	2.73231E1	-3.26573E1	-3.2602E1	2.68364E1	1.19891E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.00348E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09294E0	-8.16822E-1	-7.97844E-1	-9.13172E0	-9.1423E0	4.62532E-3	9.49383E-2	2.73369E1	-3.26597E1	-3.26278E1	2.68364E1	1.19872E-7	2.52027E-3	2.52027E-3	6.35786E-3	3.0041E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09271E0	-8.17013E-1	-7.97701E-1	-9.13165E0	-9.1428E0	4.72069E-3	9.4986E-2	2.73482E1	-3.26762E1	-3.26213E1	2.68377E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.17132E-1	-7.97701E-1	-9.13205E0	-9.14264E0	4.76837E-3	9.49383E-2	2.73237E1	-3.26609E1	-3.2647E1	2.68286E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16774E-1	-7.97486E-1	-9.13184E0	-9.14278E0	4.91142E-3	9.47952E-2	2.73169E1	-3.26449E1	-3.26172E1	2.68478E1	1.20069E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-8.16536E-1	-7.97796E-1	-9.13231E0	-9.14283E0	4.673E-3	9.50813E-2	2.73387E1	-3.267E1	-3.26335E1	2.68441E1	1.20158E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01223E-1