[Scan]
initial_time=2016-01-18T19:59:03
final_time=2016-01-18T19:59:22
ip_count=19
run=1024
dataset=6
scan=414
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.35418E-8
ql2_vset=
ql2_vmon=-7.97677E-1
ql2_imon=1.91728E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=1.2821E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-2.26617E-11
mult1=-9.35259E-9
mult2=-2.77684E-9
rf_tmon=-5.33578E-3
rf_agc=3.27101E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.65076E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65474E0
bslens_imon=2.42503E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19825E1
lens5a_imon=1.99002E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04924E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54119E1
cs_ef1b_imon=2.85388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02158E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04607E1
cs_ea1_imon=2.47481E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35259E0
lens1_imon=2.78816E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97804E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03565E1
cs_ea2_imon=1.49249E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84433E1
cs_ef1a_imon=2.93756E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.37094E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1124E1
os_restr1_imon=4.24226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14857E1
os_ea1_imon=2.36812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6359E1
os_ef1bup_imon=3.08275E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27082E0
cs_ionrep_imon=1.20124E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91947E2
cs_nozzle_imon=1.93506E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01841E1
cs_anode1_imon=3.01697E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.38383E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-1.95496E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2596E1
iondef3_imon=1.50485E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26578E1
iondef2_imon=1.55688E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02994E2
lens6_imon=2.9817E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.04321E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30014E0
ionrepsh_imon=1.80471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33639E1
lens5b_imon=2.16447E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12634E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57717E0
os_ea2_imon=-8.58114E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00589E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71394E1
cs_ef2a_imon=3.1567E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07013E0
os_ef2alow_imon=-2.50605E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38725E-1
os_ef2bup_imon=-5.29293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11305E1
os_restr2_imon=3.43072E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29404E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.24863E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72947E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.09223E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.11194E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=8.00512E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1496E0
cs_ionaccel_imon=-1.93778E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47397E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56451E1
einzel_imon=7.82407E-6
window_vset=0.0E0
window_vmon=2.5355E-1
window_imon=-8.47938E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.85481E1
mask2_imon=-7.38954E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.24305E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.58043E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.41151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40561E0
defgridb_imon=6.06756E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33368E1
os_fil1_imon=9.48297E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07154E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66824E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=1.00151E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63027E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68493E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4651E-2
os_fil2_imon=-2.56794E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.27664E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38182E-1
cs_fil2_imon=-2.47712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80525E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22899E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.06938E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17013E-1	-7.98059E-1	-9.13188E0	-9.1429E0	4.48227E-3	9.51052E-2	2.72931E1	-3.26585E1	-3.26326E1	2.68302E1	1.19895E-7	2.5199E-3	2.5199E-3	6.3016E-3	3.01748E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16846E-1	-7.97939E-1	-9.13231E0	-9.14266E0	4.74453E-3	9.50575E-2	2.73375E1	-3.26663E1	-3.26254E1	2.68519E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17108E-1	-7.97606E-1	-9.1321E0	-9.14273E0	4.52995E-3	9.52244E-2	2.72964E1	-3.26422E1	-3.26173E1	2.68296E1	1.19913E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.02659E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16894E-1	-7.97725E-1	-9.13215E0	-9.14261E0	4.57764E-3	9.51052E-2	2.73345E1	-3.26681E1	-3.26266E1	2.68436E1	1.20311E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.1718E-1	-7.97749E-1	-9.13184E0	-9.14259E0	4.57764E-3	9.4986E-2	2.73201E1	-3.26897E1	-3.26314E1	2.68406E1	1.20158E-7	2.52384E-3	2.52384E-3	6.2752E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.17108E-1	-7.98059E-1	-9.13181E0	-9.14264E0	4.79221E-3	9.46045E-2	2.73187E1	-3.26649E1	-3.26372E1	2.68388E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17728E-1	-7.97939E-1	-9.13157E0	-9.14249E0	4.69685E-3	9.48191E-2	2.72967E1	-3.2638E1	-3.26074E1	2.68418E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17323E-1	-7.98035E-1	-9.132E0	-9.14273E0	4.81606E-3	9.49383E-2	2.72841E1	-3.26573E1	-3.26062E1	2.68298E1	1.19653E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.17013E-1	-7.97772E-1	-9.13198E0	-9.14292E0	4.79221E-3	9.4986E-2	2.73092E1	-3.26809E1	-3.26266E1	2.68611E1	1.20106E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.03286E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.17156E-1	-7.97844E-1	-9.13186E0	-9.14252E0	4.673E-3	9.48906E-2	2.73315E1	-3.26669E1	-3.26236E1	2.68394E1	1.2033E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16965E-1	-7.98106E-1	-9.13186E0	-9.14276E0	4.52995E-3	9.4986E-2	2.73634E1	-3.26591E1	-3.2635E1	2.68441E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16727E-1	-7.97725E-1	-9.13188E0	-9.14271E0	4.45843E-3	9.47952E-2	2.73201E1	-3.26795E1	-3.26152E1	2.68581E1	1.19705E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.1656E-1	-7.9782E-1	-9.132E0	-9.14307E0	4.41074E-3	9.48191E-2	2.73381E1	-3.26891E1	-3.26172E1	2.68274E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16679E-1	-7.97987E-1	-9.13179E0	-9.14233E0	4.45843E-3	9.50575E-2	2.73388E1	-3.26425E1	-3.26517E1	2.68244E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16679E-1	-7.97939E-1	-9.13186E0	-9.14247E0	4.3869E-3	9.53436E-2	2.73135E1	-3.26795E1	-3.26038E1	2.68364E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16631E-1	-7.98106E-1	-9.13208E0	-9.14252E0	4.72069E-3	9.53197E-2	2.7286E1	-3.26428E1	-3.26092E1	2.68292E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16607E-1	-7.97844E-1	-9.13215E0	-9.14271E0	4.74453E-3	9.5129E-2	2.72794E1	-3.26627E1	-3.26162E1	2.68358E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16393E-1	-7.97939E-1	-9.13212E0	-9.14254E0	4.57764E-3	9.49621E-2	2.73393E1	-3.26845E1	-3.26173E1	2.68592E1	1.19861E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.1656E-1	-7.97939E-1	-9.13188E0	-9.14264E0	4.48227E-3	9.51767E-2	2.73128E1	-3.26408E1	-3.26396E1	2.68346E1	1.20042E-7	2.52131E-3	2.52131E-3	6.32858E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16417E-1	-7.97677E-1	-9.13196E0	-9.14264E0	4.673E-3	9.49144E-2	2.72947E1	-3.26578E1	-3.2596E1	2.68328E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1