[Scan]
initial_time=2016-01-18T19:59:29
final_time=2016-01-18T19:59:49
ip_count=19
run=1024
dataset=6
scan=415
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08848E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.36045E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.9503E-9
ql3_vset=
ql3_vmon=-9.13186E0
ql3_imon=1.27864E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-3.61681E-11
mult1=-9.23928E-9
mult2=-2.94079E-9
rf_tmon=-4.51537E-3
rf_agc=3.33209E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.66121E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62669E0
bslens_imon=2.33797E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1999E1
lens5a_imon=1.98156E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05164E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54115E1
cs_ef1b_imon=2.85152E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04655E2
lens23_imon=1.01994E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.52026E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30177E0
lens1_imon=2.69899E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.95747E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.47861E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.95423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.37282E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.25058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14692E1
os_ea1_imon=2.36983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.18059E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91961E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=3.00757E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.37909E-8
tplens_vset=1.4E-1
tplens_vmon=1.64438E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98024E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=4.04404E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=1.8152E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.15747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56652E0
os_ea2_imon=-9.35981E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00839E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.4404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.27698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.2565E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.11157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68505E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.06696E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=8.01451E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.68247E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02113E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.8593E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.65416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.13576E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.44534E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.06143E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.46126E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06837E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66695E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=1.00062E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62474E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68434E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.25603E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22794E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35786E-3
inlet_lpb_pmon=3.01209E-1
chamber_ion_pmon=1.20031E-7
chamber_cvt_pmon=2.51136E-3
foreline_cvt_pmon=2.51136E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77622E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17108E-1	-7.97868E-1	-9.13239E0	-9.14278E0	4.48227E-3	9.49621E-2	2.73458E1	-3.26968E1	-3.259E1	2.68609E1	1.19902E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01995E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.1718E-1	-7.97844E-1	-9.1321E0	-9.14297E0	4.60148E-3	9.47475E-2	2.73296E1	-3.26872E1	-3.26193E1	2.68169E1	1.198E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16727E-1	-7.97772E-1	-9.1321E0	-9.14276E0	4.86374E-3	9.50813E-2	2.73103E1	-3.267E1	-3.26289E1	2.6847E1	1.19819E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.0041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16798E-1	-7.97939E-1	-9.13236E0	-9.14273E0	4.74453E-3	9.50098E-2	2.73508E1	-3.26524E1	-3.26302E1	2.68192E1	1.20092E-7	2.51603E-3	2.51603E-3	6.29684E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16774E-1	-7.97915E-1	-9.13222E0	-9.14297E0	4.69685E-3	9.50336E-2	2.73464E1	-3.26738E1	-3.26419E1	2.68388E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.97963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17013E-1	-7.9782E-1	-9.13186E0	-9.14268E0	4.69685E-3	9.49621E-2	2.73015E1	-3.26663E1	-3.26314E1	2.68316E1	1.20158E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.1687E-1	-7.97749E-1	-9.13224E0	-9.14247E0	4.36306E-3	9.48906E-2	2.73429E1	-3.26615E1	-3.26074E1	2.68358E1	1.20226E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16679E-1	-7.97701E-1	-9.13231E0	-9.14242E0	4.43459E-3	9.48429E-2	2.72907E1	-3.26687E1	-3.262E1	2.68496E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.1706E-1	-7.9782E-1	-9.13217E0	-9.14257E0	4.86374E-3	9.4676E-2	2.72823E1	-3.26741E1	-3.259E1	2.6843E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16727E-1	-7.9782E-1	-9.13236E0	-9.14247E0	4.93526E-3	9.47952E-2	2.73237E1	-3.26621E1	-3.2614E1	2.68388E1	1.20069E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17013E-1	-7.97796E-1	-9.13219E0	-9.14273E0	5.07832E-3	9.44853E-2	2.7318E1	-3.26597E1	-3.26254E1	2.68088E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.1687E-1	-7.9782E-1	-9.13215E0	-9.1428E0	4.95911E-3	9.47475E-2	2.73257E1	-3.26419E1	-3.26649E1	2.68232E1	1.19819E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.99879E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16727E-1	-7.9813E-1	-9.13222E0	-9.14273E0	4.95911E-3	9.50336E-2	2.73087E1	-3.2638E1	-3.26332E1	2.68328E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.02769E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16464E-1	-7.97987E-1	-9.13239E0	-9.14268E0	5.00679E-3	9.48906E-2	2.73201E1	-3.26723E1	-3.2626E1	2.6846E1	1.20122E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.1656E-1	-7.97892E-1	-9.13246E0	-9.1424E0	4.74453E-3	9.50336E-2	2.73141E1	-3.26482E1	-3.2617E1	2.68298E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16607E-1	-7.97939E-1	-9.13231E0	-9.14268E0	4.64916E-3	9.51529E-2	2.73399E1	-3.26549E1	-3.26183E1	2.68505E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16631E-1	-7.97963E-1	-9.13215E0	-9.14271E0	4.62532E-3	9.50098E-2	2.73387E1	-3.26705E1	-3.2641E1	2.68436E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16512E-1	-7.97725E-1	-9.13179E0	-9.14245E0	4.86374E-3	9.4676E-2	2.73241E1	-3.26629E1	-3.26484E1	2.68328E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16321E-1	-7.97772E-1	-9.13193E0	-9.14266E0	4.98295E-3	9.48429E-2	2.73213E1	-3.26633E1	-3.26561E1	2.68188E1	1.20016E-7	2.51345E-3	2.51345E-3	6.33809E-3	3.01121E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16441E-1	-7.98035E-1	-9.13186E0	-9.14283E0	4.88758E-3	9.51767E-2	2.73393E1	-3.26561E1	-3.26278E1	2.68505E1	1.20031E-7	2.51136E-3	2.51136E-3	6.35786E-3	3.01209E-1