[Scan]
initial_time=2016-01-18T20:00:23
final_time=2016-01-18T20:00:42
ip_count=19
run=1024
dataset=6
scan=417
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=1.36633E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.91212E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=1.3175E-10
ql4_vset=
ql4_vmon=-9.14273E0
ql4_imon=-9.59635E-12
mult1=-1.00896E-8
mult2=-2.74057E-9
rf_tmon=-5.37761E-3
rf_agc=3.32795E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.64654E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6963E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.85007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04504E1
cs_ea1_imon=2.49619E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37197E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.514E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.93909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.36584E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.2549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.35709E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.20784E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.01117E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.38048E-8
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.54444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.9807E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.09312E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=1.783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55177E0
os_ea2_imon=-6.31592E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.43284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.28159E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.25362E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7358E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68215E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.06855E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.95846E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.85701E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92538E3
multa_neg_imon=8.05412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=6.96044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.42805E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07527E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66961E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30905E1
cs_fil1_imon=1.00028E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68339E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44586E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.14339E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.229E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40982E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16703E-1	-7.97868E-1	-9.13205E0	-9.14268E0	4.98295E-3	9.52005E-2	2.73234E1	-3.26419E1	-3.26567E1	2.68215E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16655E-1	-7.97987E-1	-9.13227E0	-9.14309E0	4.55379E-3	9.54628E-2	2.73467E1	-3.2656E1	-3.26242E1	2.68213E1	1.20004E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16488E-1	-7.98035E-1	-9.13234E0	-9.14252E0	4.72069E-3	9.52244E-2	2.73281E1	-3.26655E1	-3.26596E1	2.6836E1	1.19819E-7	2.52585E-3	2.52585E-3	6.31299E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.16441E-1	-7.98035E-1	-9.13229E0	-9.14285E0	4.64916E-3	9.48429E-2	2.72927E1	-3.26537E1	-3.2636E1	2.6819E1	1.198E-7	2.51203E-3	2.51203E-3	6.33977E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16512E-1	-7.97749E-1	-9.13215E0	-9.14247E0	4.69685E-3	9.49383E-2	2.73027E1	-3.26555E1	-3.26006E1	2.68267E1	1.198E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16703E-1	-7.97868E-1	-9.13198E0	-9.14257E0	4.81606E-3	9.47714E-2	2.7307E1	-3.2646E1	-3.26603E1	2.685E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09255E0	-8.16822E-1	-7.97915E-1	-9.13198E0	-9.14214E0	4.72069E-3	9.52721E-2	2.73275E1	-3.26679E1	-3.26213E1	2.68388E1	1.19883E-7	2.51838E-3	2.51838E-3	6.30171E-3	3.01881E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09255E0	-8.16917E-1	-7.9813E-1	-9.13208E0	-9.14237E0	4.79221E-3	9.50098E-2	2.73075E1	-3.26663E1	-3.2623E1	2.68418E1	1.20311E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-8.16703E-1	-7.98059E-1	-9.1321E0	-9.14273E0	4.79221E-3	9.47714E-2	2.72889E1	-3.26451E1	-3.26671E1	2.68255E1	1.19819E-7	2.51581E-3	2.51581E-3	6.34099E-3	2.99083E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09263E0	-8.16846E-1	-7.97915E-1	-9.13217E0	-9.14268E0	4.95911E-3	9.50098E-2	2.72924E1	-3.26559E1	-3.26864E1	2.6851E1	1.20078E-7	2.51369E-3	2.51369E-3	6.31779E-3	3.00741E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-8.16846E-1	-7.97844E-1	-9.13222E0	-9.14266E0	4.79221E-3	9.47952E-2	2.73411E1	-3.26614E1	-3.26089E1	2.68286E1	1.20226E-7	2.52222E-3	2.52222E-3	6.31321E-3	3.02303E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.17013E-1	-7.97844E-1	-9.132E0	-9.14252E0	5.17368E-3	9.50336E-2	2.73228E1	-3.26793E1	-3.26303E1	2.68304E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16846E-1	-7.97772E-1	-9.13224E0	-9.14264E0	4.74453E-3	9.51529E-2	2.73255E1	-3.26813E1	-3.25936E1	2.68184E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01871E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.17108E-1	-7.97915E-1	-9.132E0	-9.14235E0	4.86374E-3	9.4676E-2	2.73299E1	-3.26596E1	-3.26307E1	2.68528E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17204E-1	-7.97772E-1	-9.132E0	-9.14297E0	4.41074E-3	9.46999E-2	2.73315E1	-3.26603E1	-3.26386E1	2.68088E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17037E-1	-7.98202E-1	-9.13205E0	-9.14304E0	4.81606E-3	9.47714E-2	2.73448E1	-3.26909E1	-3.26332E1	2.68743E1	1.20122E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16965E-1	-7.98059E-1	-9.13215E0	-9.14304E0	4.98295E-3	9.49621E-2	2.72827E1	-3.26567E1	-3.26331E1	2.68483E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-8.1718E-1	-7.97892E-1	-9.13193E0	-9.14271E0	4.74453E-3	9.45807E-2	2.73279E1	-3.26651E1	-3.26086E1	2.68502E1	1.19953E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16989E-1	-7.98106E-1	-9.13193E0	-9.14273E0	4.72069E-3	9.48191E-2	2.73281E1	-3.26579E1	-3.2613E1	2.68358E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.16751E-1	-7.97987E-1	-9.132E0	-9.14273E0	4.72069E-3	9.48429E-2	2.7358E1	-3.26591E1	-3.26062E1	2.68215E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1