[Scan]
initial_time=2016-01-18T20:01:16
final_time=2016-01-18T20:01:36
ip_count=19
run=1024
dataset=6
scan=419
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08735E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.36119E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.88577E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=1.25861E-10
ql4_vset=
ql4_vmon=-9.14278E0
ql4_imon=-3.36885E-11
mult1=-9.09742E-9
mult2=-2.69778E-9
rf_tmon=-3.44765E-3
rf_agc=3.37987E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.65977E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=2.00067E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54009E1
cs_ef1b_imon=2.8515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04056E1
cs_ea1_imon=2.51353E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35427E0
lens1_imon=2.66714E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.49524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.92935E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.36921E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=4.25724E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.34647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.08539E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.18448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.93371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.99468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.37648E-8
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.53949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98073E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.06567E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30991E0
ionrepsh_imon=1.79574E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.12223E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57949E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71321E1
cs_ef2a_imon=3.1681E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05688E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18662E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11303E1
os_restr2_imon=3.43569E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.26106E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.24994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.08149E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.0826E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.08846E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.98424E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13825E0
cs_ionaccel_imon=-1.73705E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.45488E-1
window_imon=-8.36956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82676E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86628E1
mask2_imon=-9.41213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.90546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.43862E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08435E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66724E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.98638E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62134E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68539E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.60547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.34968E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.88691E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22876E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73107E-1
res40_imon=-2.57458E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.16679E-1	-7.97939E-1	-9.13172E0	-9.14264E0	4.76837E-3	9.52244E-2	2.72979E1	-3.26615E1	-3.26086E1	2.68406E1	1.19891E-7	2.51603E-3	2.51603E-3	6.33388E-3	2.98592E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.16703E-1	-7.97749E-1	-9.13184E0	-9.14252E0	4.74453E-3	9.52244E-2	2.72889E1	-3.26735E1	-3.26212E1	2.68506E1	1.20297E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.0041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.16631E-1	-7.97963E-1	-9.13191E0	-9.14295E0	4.52995E-3	9.50098E-2	2.7315E1	-3.2692E1	-3.26029E1	2.68406E1	1.19809E-7	2.5199E-3	2.5199E-3	6.35692E-3	3.01347E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16703E-1	-7.98154E-1	-9.13191E0	-9.14257E0	4.93526E-3	9.49621E-2	2.73183E1	-3.26386E1	-3.26176E1	2.68532E1	1.20242E-7	2.51823E-3	2.51823E-3	6.3275E-3	3.01489E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16798E-1	-7.98035E-1	-9.13219E0	-9.14261E0	5.00679E-3	9.4986E-2	2.73444E1	-3.2689E1	-3.26191E1	2.68263E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.1706E-1	-7.98011E-1	-9.13205E0	-9.14245E0	4.8399E-3	9.48906E-2	2.73146E1	-3.26456E1	-3.26249E1	2.68468E1	1.20226E-7	2.51527E-3	2.51527E-3	6.31902E-3	2.98435E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16917E-1	-7.98225E-1	-9.13181E0	-9.14252E0	4.74453E-3	9.50575E-2	2.72783E1	-3.26716E1	-3.26354E1	2.684E1	1.20016E-7	2.51142E-3	2.51142E-3	6.3023E-3	2.99421E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17037E-1	-7.98035E-1	-9.132E0	-9.14271E0	4.95911E-3	9.50098E-2	2.73309E1	-3.2653E1	-3.26266E1	2.68394E1	1.19829E-7	2.51725E-3	2.51725E-3	6.30171E-3	3.01065E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16989E-1	-7.97939E-1	-9.13186E0	-9.14268E0	4.72069E-3	9.49144E-2	2.72799E1	-3.26723E1	-3.26122E1	2.68545E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17728E-1	-7.98011E-1	-9.13186E0	-9.14271E0	5.00679E-3	9.50813E-2	2.73151E1	-3.26537E1	-3.26372E1	2.68202E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.03185E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.17323E-1	-7.97963E-1	-9.13191E0	-9.14252E0	4.55379E-3	9.50336E-2	2.73646E1	-3.26759E1	-3.26272E1	2.6831E1	1.2026E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.1718E-1	-7.98035E-1	-9.13198E0	-9.14276E0	4.8399E-3	9.5129E-2	2.73333E1	-3.26543E1	-3.2608E1	2.68227E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.17204E-1	-7.97844E-1	-9.13203E0	-9.14273E0	4.36306E-3	9.48906E-2	2.73051E1	-3.26413E1	-3.2593E1	2.6834E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.16941E-1	-7.97749E-1	-9.13169E0	-9.14285E0	4.41074E-3	9.47714E-2	2.73216E1	-3.26927E1	-3.26508E1	2.68454E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.03027E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16751E-1	-7.98416E-1	-9.13172E0	-9.14268E0	4.62532E-3	9.5129E-2	2.73051E1	-3.26801E1	-3.259E1	2.68348E1	1.2026E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16774E-1	-7.98321E-1	-9.13191E0	-9.14307E0	4.52995E-3	9.51052E-2	2.73351E1	-3.26518E1	-3.26332E1	2.68088E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16703E-1	-7.98082E-1	-9.13217E0	-9.14314E0	4.64916E-3	9.50575E-2	2.73045E1	-3.26633E1	-3.262E1	2.68388E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16894E-1	-7.98178E-1	-9.13212E0	-9.14311E0	4.673E-3	9.52244E-2	2.73464E1	-3.2675E1	-3.26101E1	2.681E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16774E-1	-7.9813E-1	-9.13203E0	-9.14304E0	4.86374E-3	9.5439E-2	2.73293E1	-3.26785E1	-3.26531E1	2.68464E1	1.20106E-7	2.50989E-3	2.50989E-3	6.29665E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16441E-1	-7.9813E-1	-9.13212E0	-9.14278E0	4.45843E-3	9.49621E-2	2.73275E1	-3.26885E1	-3.26307E1	2.68046E1	1.198E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1