[Scan]
initial_time=2016-01-18T20:02:09
final_time=2016-01-18T20:02:29
ip_count=19
run=1024
dataset=6
scan=421
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.36402E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.95321E-9
ql3_vset=
ql3_vmon=-9.13219E0
ql3_imon=1.00863E-10
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-3.06964E-11
mult1=-1.02796E-8
mult2=-2.7115E-9
rf_tmon=-4.40919E-3
rf_agc=3.39875E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.67091E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.48728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1943E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54193E1
cs_ef1b_imon=2.86017E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04677E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.51444E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3293E0
lens1_imon=2.68195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03468E1
cs_ea2_imon=1.49821E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=2.93224E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.36849E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.37601E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.06307E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.22892E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=3.00468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.37625E-8
tplens_vset=1.4E-1
tplens_vmon=1.66366E0
tplens_imon=-3.13766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2603E1
iondef3_imon=1.51911E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.55336E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98083E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.0562E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2515E0
ionrepsh_imon=1.80499E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34102E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56333E0
os_ea2_imon=-8.36484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.14776E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.42887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.27729E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73476E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.1072E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.06415E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.98694E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.72572E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.85485E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=6.89975E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.22562E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.43147E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.95951E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68501E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.41173E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22822E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.60804E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16417E-1	-7.97963E-1	-9.13188E0	-9.14252E0	4.55379E-3	9.50813E-2	2.73472E1	-3.26597E1	-3.26014E1	2.68343E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9926E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16464E-1	-7.98416E-1	-9.13222E0	-9.1429E0	4.45843E-3	9.51052E-2	2.73098E1	-3.26581E1	-3.26088E1	2.6841E1	1.19904E-7	2.51315E-3	2.51315E-3	6.30956E-3	3.00218E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.1656E-1	-7.98297E-1	-9.13191E0	-9.14292E0	4.24385E-3	9.4986E-2	2.73062E1	-3.26691E1	-3.26366E1	2.68507E1					
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16607E-1	-7.98321E-1	-9.13177E0	-9.1429E0	4.45843E-3	9.49621E-2	2.73111E1	-3.26687E1	-3.26188E1	2.68502E1	1.20016E-7	2.52058E-3	2.52058E-3	6.29211E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16679E-1	-7.98297E-1	-9.13162E0	-9.14254E0	4.57764E-3	9.5129E-2	2.73326E1	-3.26627E1	-3.25905E1	2.68112E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16607E-1	-7.97892E-1	-9.13177E0	-9.14254E0	4.50611E-3	9.5129E-2	2.72937E1	-3.26753E1	-3.26122E1	2.68436E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16584E-1	-7.9813E-1	-9.13167E0	-9.14245E0	4.33922E-3	9.50336E-2	2.73177E1	-3.26729E1	-3.26452E1	2.68406E1	1.19978E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16488E-1	-7.9782E-1	-9.13169E0	-9.14209E0	4.33922E-3	9.49383E-2	2.72961E1	-3.26585E1	-3.26092E1	2.68382E1	1.19809E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16655E-1	-7.98011E-1	-9.13198E0	-9.14278E0	4.43459E-3	9.5129E-2	2.73151E1	-3.26738E1	-3.26189E1	2.68502E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16631E-1	-7.98059E-1	-9.13215E0	-9.14276E0	4.07696E-3	9.46045E-2	2.73333E1	-3.26675E1	-3.2611E1	2.68184E1	1.19851E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.16774E-1	-7.97915E-1	-9.13184E0	-9.14278E0	4.22001E-3	9.49383E-2	2.73328E1	-3.2662E1	-3.26201E1	2.68607E1	1.19757E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16774E-1	-7.97582E-1	-9.13179E0	-9.14257E0	4.57764E-3	9.46522E-2	2.73291E1	-3.26699E1	-3.265E1	2.68277E1	1.19544E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16989E-1	-7.98011E-1	-9.1321E0	-9.14216E0	4.50611E-3	9.48191E-2	2.73228E1	-3.26756E1	-3.26183E1	2.684E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.1687E-1	-7.98154E-1	-9.13196E0	-9.14254E0	4.60148E-3	9.48668E-2	2.73161E1	-3.2664E1	-3.26321E1	2.68196E1	1.198E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17013E-1	-7.98392E-1	-9.13198E0	-9.14273E0	4.60148E-3	9.50813E-2	2.7346E1	-3.26735E1	-3.25972E1	2.68508E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16727E-1	-7.98464E-1	-9.13198E0	-9.14295E0	4.36306E-3	9.48191E-2	2.73207E1	-3.26627E1	-3.25834E1	2.6846E1	1.19766E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.0041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16727E-1	-7.98082E-1	-9.13215E0	-9.14237E0	4.41074E-3	9.51052E-2	2.73175E1	-3.26561E1	-3.26561E1	2.68298E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17037E-1	-7.97915E-1	-9.13203E0	-9.14254E0	4.33922E-3	9.51052E-2	2.7347E1	-3.26703E1	-3.26236E1	2.68472E1	1.19851E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16846E-1	-7.98321E-1	-9.13219E0	-9.14245E0	4.48227E-3	9.53197E-2	2.73435E1	-3.26567E1	-3.26212E1	2.68528E1	1.19902E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16965E-1	-7.98249E-1	-9.13219E0	-9.14254E0	4.48227E-3	9.52721E-2	2.73476E1	-3.26579E1	-3.2603E1	2.68232E1	1.20004E-7	2.52276E-3	2.52276E-3	6.29128E-3	2.99686E-1