[Scan]
initial_time=2016-01-18T20:03:29
final_time=2016-01-18T20:03:49
ip_count=19
run=1024
dataset=6
scan=424
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.3633E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.8942E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=1.3175E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-3.12328E-11
mult1=-1.00414E-8
mult2=-2.70863E-9
rf_tmon=-5.32955E-3
rf_agc=3.28589E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.63565E-9
bslens_vset=-6.2E0
bslens_vmon=-6.73156E0
bslens_imon=2.49531E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19321E1
lens5a_imon=1.9975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05049E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.84034E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04927E1
cs_ea1_imon=2.51686E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35542E0
lens1_imon=2.72303E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.035E1
cs_ea2_imon=1.51156E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.93909E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.36037E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11622E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14785E1
os_ea1_imon=2.35414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22884E0
cs_ionrep_imon=1.19532E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.99748E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.3709E-8
tplens_vset=1.4E-1
tplens_vmon=1.64266E0
tplens_imon=-4.76125E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.50348E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.57327E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98118E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.04828E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28822E0
ionrepsh_imon=1.80687E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33701E1
lens5b_imon=2.16425E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56552E0
os_ea2_imon=-7.2956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00865E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.14848E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1143E1
os_restr2_imon=3.43824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.2912E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02392E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.09835E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.99418E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.93593E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.85611E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.43546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.46579E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.06081E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=6.03238E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.43507E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66834E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.98714E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62876E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68217E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55481E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.21348E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22866E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.00348E-1
chamber_ion_pmon=1.20142E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.61695E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16751E-1	-7.98178E-1	-9.13224E0	-9.14288E0	4.8399E-3	9.51052E-2	2.72903E1	-3.26496E1	-3.26254E1	2.68279E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16989E-1	-7.97987E-1	-9.13198E0	-9.14254E0	4.673E-3	9.5129E-2	2.73255E1	-3.26518E1	-3.26308E1	2.68316E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16679E-1	-7.97677E-1	-9.13217E0	-9.14295E0	4.76837E-3	9.50813E-2	2.73619E1	-3.26446E1	-3.26359E1	2.68372E1	1.19819E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.0041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16798E-1	-7.98392E-1	-9.13191E0	-9.14283E0	4.60148E-3	9.52244E-2	2.72979E1	-3.26633E1	-3.26416E1	2.68556E1	1.20226E-7	2.51162E-3	2.51162E-3	6.3126E-3	3.01485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16536E-1	-7.98464E-1	-9.13205E0	-9.14266E0	4.07696E-3	9.53436E-2	2.72967E1	-3.26723E1	-3.26278E1	2.68532E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16584E-1	-7.98225E-1	-9.13186E0	-9.1424E0	4.26769E-3	9.51052E-2	2.73151E1	-3.26697E1	-3.26349E1	2.684E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16464E-1	-7.97796E-1	-9.13208E0	-9.14235E0	4.3869E-3	9.52959E-2	2.73339E1	-3.26164E1	-3.26476E1	2.68334E1	1.20158E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16369E-1	-7.97915E-1	-9.13219E0	-9.14237E0	4.673E-3	9.52244E-2	2.73033E1	-3.26573E1	-3.26122E1	2.68514E1	1.20191E-7	2.52809E-3	2.52809E-3	6.31858E-3	3.02277E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16679E-1	-7.97844E-1	-9.1321E0	-9.14235E0	4.76837E-3	9.50575E-2	2.73105E1	-3.26338E1	-3.2605E1	2.6828E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16607E-1	-7.97987E-1	-9.13184E0	-9.14252E0	4.76837E-3	9.50098E-2	2.73111E1	-3.26753E1	-3.26116E1	2.68556E1	1.20383E-7	2.52867E-3	2.52867E-3	6.31288E-3	3.02659E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16679E-1	-7.9813E-1	-9.13198E0	-9.14299E0	4.62532E-3	9.51052E-2	2.73117E1	-3.26789E1	-3.25918E1	2.684E1	1.19902E-7	2.52599E-3	2.52599E-3	6.32896E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.16727E-1	-7.98249E-1	-9.13217E0	-9.14233E0	4.57764E-3	9.50336E-2	2.73432E1	-3.26898E1	-3.26004E1	2.68362E1	1.20122E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16751E-1	-7.98082E-1	-9.13193E0	-9.14264E0	4.31538E-3	9.52482E-2	2.73305E1	-3.26572E1	-3.2668E1	2.68225E1	1.19991E-7	2.51287E-3	2.51287E-3	6.31269E-3	2.97843E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.16917E-1	-7.97629E-1	-9.13186E0	-9.14266E0	4.43459E-3	9.50336E-2	2.73003E1	-3.26723E1	-3.26248E1	2.68226E1	1.20337E-7	2.52454E-3	2.52454E-3	6.3074E-3	3.00087E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16703E-1	-7.97892E-1	-9.13179E0	-9.14266E0	4.3869E-3	9.50098E-2	2.72959E1	-3.2667E1	-3.26076E1	2.68448E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16655E-1	-7.97629E-1	-9.13196E0	-9.14283E0	4.52995E-3	9.5129E-2	2.73375E1	-3.26776E1	-3.25797E1	2.6846E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16774E-1	-7.97868E-1	-9.13179E0	-9.1428E0	4.74453E-3	9.48906E-2	2.73424E1	-3.2623E1	-3.26488E1	2.6825E1	1.19953E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02511E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16727E-1	-7.97915E-1	-9.13186E0	-9.14259E0	4.52995E-3	9.48429E-2	2.73285E1	-3.26416E1	-3.26434E1	2.6845E1	1.19653E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16393E-1	-7.98011E-1	-9.1321E0	-9.14268E0	4.74453E-3	9.50098E-2	2.72974E1	-3.26602E1	-3.26349E1	2.68377E1	1.20174E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16464E-1	-7.9813E-1	-9.13208E0	-9.14283E0	4.52995E-3	9.50813E-2	2.73315E1	-3.26524E1	-3.26158E1	2.68514E1	1.20142E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.00348E-1