[Scan]
initial_time=2016-01-18T20:04:23
final_time=2016-01-18T20:04:42
ip_count=19
run=1024
dataset=6
scan=426
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08851E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.36377E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.92968E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=1.0314E-10
ql4_vset=
ql4_vmon=-9.14283E0
ql4_imon=-2.78711E-11
mult1=-9.70836E-9
mult2=-2.75243E-9
rf_tmon=-6.00916E-3
rf_agc=3.21653E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.66529E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65626E0
bslens_imon=2.3741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=2.00227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.83998E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04556E2
lens23_imon=1.0207E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04486E1
cs_ea1_imon=2.52677E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34562E0
lens1_imon=2.78915E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04125E1
cs_ea2_imon=1.50716E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.93945E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.35879E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.26463E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15391E1
os_ea1_imon=2.36369E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.06739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20251E0
cs_ionrep_imon=1.21332E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93567E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.99279E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.3784E-8
tplens_vset=1.4E-1
tplens_vmon=1.65674E0
tplens_imon=-3.03495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26285E1
iondef3_imon=1.51083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26438E1
iondef2_imon=1.56078E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98159E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=4.06102E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28271E0
ionrepsh_imon=1.78851E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33639E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56552E0
os_ea2_imon=-9.24227E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00744E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29414E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7302E1
iondef1_imon=1.11672E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68269E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.08659E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.94788E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.83744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47392E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.4428E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.63475E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.47586E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66095E0
defgridb_imon=6.08748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.44348E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06933E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66475E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.99531E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62666E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68123E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58109E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.43542E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22828E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=2.99594E-1
chamber_ion_pmon=1.1969E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.89325E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16774E-1	-7.9782E-1	-9.13222E0	-9.14245E0	4.91142E-3	9.50098E-2	2.73312E1	-3.26706E1	-3.26469E1	2.68377E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16846E-1	-7.97796E-1	-9.13205E0	-9.14257E0	4.79221E-3	9.49144E-2	2.73319E1	-3.26628E1	-3.26347E1	2.68294E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02253E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.1687E-1	-7.9751E-1	-9.13224E0	-9.14264E0	4.64916E-3	9.49621E-2	2.73068E1	-3.26834E1	-3.26115E1	2.68319E1	1.19925E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.01209E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16822E-1	-7.97915E-1	-9.13239E0	-9.14261E0	4.62532E-3	9.48668E-2	2.73442E1	-3.2641E1	-3.2647E1	2.6843E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16846E-1	-7.97462E-1	-9.13239E0	-9.14271E0	4.50611E-3	9.4986E-2	2.73183E1	-3.26488E1	-3.26008E1	2.68358E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.17013E-1	-7.97868E-1	-9.13236E0	-9.14333E0	3.91006E-3	9.50575E-2	2.73173E1	-3.2666E1	-3.25988E1	2.68435E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16846E-1	-7.98011E-1	-9.13239E0	-9.14297E0	4.45843E-3	9.50098E-2	2.728E1	-3.26646E1	-3.2634E1	2.68519E1	1.20127E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.00741E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16727E-1	-7.98082E-1	-9.13222E0	-9.14273E0	4.55379E-3	9.50813E-2	2.73339E1	-3.2647E1	-3.26284E1	2.68466E1	1.20262E-7	2.51271E-3	2.51271E-3	6.29035E-3	3.01065E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16774E-1	-7.98321E-1	-9.13193E0	-9.14309E0	4.29153E-3	9.4986E-2	2.73255E1	-3.26398E1	-3.26146E1	2.68511E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16631E-1	-7.98059E-1	-9.13224E0	-9.14299E0	4.79221E-3	9.50098E-2	2.73073E1	-3.26696E1	-3.2626E1	2.6829E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16584E-1	-7.9813E-1	-9.13239E0	-9.14264E0	4.55379E-3	9.47952E-2	2.73051E1	-3.265E1	-3.26202E1	2.68375E1	1.20028E-7	2.51265E-3	2.51265E-3	6.31779E-3	3.00494E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16703E-1	-7.9813E-1	-9.13212E0	-9.14285E0	4.57764E-3	9.47237E-2	2.73165E1	-3.26585E1	-3.26188E1	2.68388E1	1.20337E-7	2.52338E-3	2.52338E-3	6.31902E-3	3.02025E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16703E-1	-7.97725E-1	-9.13234E0	-9.14278E0	4.55379E-3	9.47714E-2	2.73093E1	-3.26458E1	-3.26332E1	2.68749E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16894E-1	-7.97772E-1	-9.13241E0	-9.14247E0	4.33922E-3	9.47952E-2	2.73375E1	-3.26633E1	-3.26416E1	2.684E1	1.19809E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16751E-1	-7.97915E-1	-9.1321E0	-9.14268E0	4.24385E-3	9.47237E-2	2.73352E1	-3.26744E1	-3.2616E1	2.68442E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.1656E-1	-7.97963E-1	-9.13248E0	-9.14252E0	4.22001E-3	9.46999E-2	2.73265E1	-3.26891E1	-3.2626E1	2.68256E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01347E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.1687E-1	-7.9813E-1	-9.13236E0	-9.14295E0	4.22001E-3	9.47952E-2	2.73069E1	-3.26488E1	-3.26573E1	2.68599E1	1.19965E-7	2.52647E-3	2.52647E-3	6.34588E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16727E-1	-7.98249E-1	-9.13229E0	-9.14299E0	4.55379E-3	9.49621E-2	2.73484E1	-3.26909E1	-3.26062E1	2.68581E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16774E-1	-7.97939E-1	-9.13241E0	-9.1429E0	4.673E-3	9.46999E-2	2.73115E1	-3.26747E1	-3.2615E1	2.68487E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16774E-1	-7.98249E-1	-9.13203E0	-9.14283E0	4.69685E-3	9.47237E-2	2.7302E1	-3.26438E1	-3.26285E1	2.68269E1	1.1969E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.99594E-1