[Scan]
initial_time=2016-01-18T20:04:49
final_time=2016-01-18T20:05:09
ip_count=19
run=1024
dataset=6
scan=427
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08838E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36433E-8
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=1.93578E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=9.57251E-11
ql4_vset=
ql4_vmon=-9.14304E0
ql4_imon=-2.30551E-11
mult1=-8.88551E-9
mult2=-2.70863E-9
rf_tmon=-5.40165E-3
rf_agc=3.25825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.67469E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64659E0
bslens_imon=2.61114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19422E1
lens5a_imon=1.99365E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05156E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53968E1
cs_ef1b_imon=2.8449E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04665E2
lens23_imon=1.02295E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04617E1
cs_ea1_imon=2.52621E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34417E0
lens1_imon=2.65633E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6473E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03887E1
cs_ea2_imon=1.49134E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84504E1
cs_ef1a_imon=2.94221E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.36315E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11483E1
os_restr1_imon=4.2562E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1519E1
os_ea1_imon=2.35796E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23008E0
cs_ionrep_imon=1.19239E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91939E2
cs_nozzle_imon=1.93469E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01676E1
cs_anode1_imon=2.99121E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.36249E-8
tplens_vset=1.4E-1
tplens_vmon=1.69184E0
tplens_imon=-3.74921E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.50664E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.57025E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.06359E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27585E0
ionrepsh_imon=1.7823E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.15599E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.12779E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5412E0
os_ea2_imon=-8.3378E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00512E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.16393E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0534E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.20399E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.42874E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.25063E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73297E1
iondef1_imon=1.12773E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.10032E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.0895E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.96672E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14868E0
cs_ionaccel_imon=-1.92123E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47344E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56388E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.50701E-1
window_imon=-7.50074E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86402E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=8.18697E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.47668E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.02244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48191E0
defgridb_imon=6.16382E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.42843E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66561E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.97995E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63988E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68173E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48136E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4104E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35145E-1
cs_fil2_imon=-2.68656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98592E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16727E-1	-7.97892E-1	-9.13215E0	-9.14288E0	4.19617E-3	9.47952E-2	2.73281E1	-3.2662E1	-3.26054E1	2.68331E1	1.19871E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01163E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16631E-1	-7.97868E-1	-9.13231E0	-9.14323E0	4.26769E-3	9.49621E-2	2.73273E1	-3.26434E1	-3.2614E1	2.68419E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.16393E-1	-7.97677E-1	-9.13248E0	-9.14257E0	4.12464E-3	9.47237E-2	2.73277E1	-3.26579E1	-3.26614E1	2.68215E1	1.20435E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-8.16488E-1	-7.98059E-1	-9.13246E0	-9.1424E0	4.45843E-3	9.4986E-2	2.73247E1	-3.26529E1	-3.25923E1	2.6849E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16655E-1	-7.98035E-1	-9.13215E0	-9.14252E0	4.33922E-3	9.49144E-2	2.73098E1	-3.2659E1	-3.26201E1	2.68163E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16607E-1	-7.98178E-1	-9.13203E0	-9.14268E0	4.62532E-3	9.48906E-2	2.72898E1	-3.26697E1	-3.26083E1	2.6834E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16584E-1	-7.97963E-1	-9.13215E0	-9.14314E0	4.43459E-3	9.50336E-2	2.73375E1	-3.26701E1	-3.26236E1	2.684E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16512E-1	-7.98297E-1	-9.13198E0	-9.14268E0	4.64916E-3	9.48429E-2	2.73163E1	-3.26826E1	-3.26296E1	2.68508E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16798E-1	-7.97987E-1	-9.13229E0	-9.14295E0	4.72069E-3	9.51767E-2	2.73243E1	-3.26591E1	-3.2632E1	2.68214E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16798E-1	-7.98082E-1	-9.13215E0	-9.14273E0	4.17233E-3	9.46999E-2	2.72967E1	-3.26723E1	-3.26188E1	2.68316E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09325E0	-8.16679E-1	-7.98154E-1	-9.132E0	-9.1428E0	4.07696E-3	9.47714E-2	2.73051E1	-3.26695E1	-3.26309E1	2.6846E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16822E-1	-7.98202E-1	-9.13203E0	-9.1429E0	4.26769E-3	9.47952E-2	2.72997E1	-3.26777E1	-3.26374E1	2.68364E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0924E0	-8.16798E-1	-7.97939E-1	-9.13239E0	-9.14319E0	4.52995E-3	9.47952E-2	2.7334E1	-3.26697E1	-3.2626E1	2.68046E1	1.2054E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02922E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-8.16488E-1	-7.97749E-1	-9.13219E0	-9.14319E0	4.31538E-3	9.48191E-2	2.72974E1	-3.26514E1	-3.26248E1	2.68286E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02133E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-8.16679E-1	-7.97677E-1	-9.13203E0	-9.14326E0	4.81606E-3	9.50575E-2	2.73231E1	-3.26651E1	-3.2596E1	2.68725E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16751E-1	-7.97892E-1	-9.13227E0	-9.14347E0	4.60148E-3	9.51529E-2	2.73284E1	-3.26474E1	-3.26083E1	2.68124E1	1.19749E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.16846E-1	-7.97915E-1	-9.13196E0	-9.14316E0	4.673E-3	9.49144E-2	2.72998E1	-3.26567E1	-3.26602E1	2.68471E1	1.19978E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00942E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16965E-1	-7.97701E-1	-9.13234E0	-9.14307E0	4.62532E-3	9.50575E-2	2.73405E1	-3.26392E1	-3.26074E1	2.68324E1	1.20209E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16989E-1	-7.97892E-1	-9.13239E0	-9.14271E0	4.55379E-3	9.52721E-2	2.73329E1	-3.26712E1	-3.25982E1	2.68292E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16679E-1	-7.97772E-1	-9.13253E0	-9.14304E0	4.26769E-3	9.49144E-2	2.73297E1	-3.26669E1	-3.26272E1	2.68478E1	1.19749E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1