[Scan]
initial_time=2016-01-18T20:05:16
final_time=2016-01-18T20:05:35
ip_count=19
run=1024
dataset=6
scan=428
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.36616E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.89616E-9
ql3_vset=
ql3_vmon=-9.132E0
ql3_imon=1.1977E-10
ql4_vset=
ql4_vmon=-9.14288E0
ql4_imon=-3.45588E-11
mult1=-9.14471E-9
mult2=-2.73306E-9
rf_tmon=-4.79263E-3
rf_agc=3.35628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.6721E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=2.00362E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.84431E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04201E1
cs_ea1_imon=2.49822E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34612E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.51226E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.93477E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.36618E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14795E1
os_ea1_imon=2.36411E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.19323E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=2.99856E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.36276E-8
tplens_vset=1.4E-1
tplens_vmon=1.67208E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25959E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.57211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98086E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=4.0549E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.80282E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53268E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.43536E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.1072E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.06021E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.94938E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.76636E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27825E0
defgridb_imon=5.92641E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.43489E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07696E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66547E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3089E1
cs_fil1_imon=9.9899E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63279E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6814E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.39111E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.99613E-1
chamber_ion_pmon=1.20137E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.56599E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16488E-1	-7.97915E-1	-9.13229E0	-9.14323E0	4.673E-3	9.50098E-2	2.73068E1	-3.26741E1	-3.26254E1	2.68441E1	1.19809E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00824E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.16727E-1	-7.98154E-1	-9.13205E0	-9.14259E0	4.60148E-3	9.48668E-2	2.73486E1	-3.26719E1	-3.25936E1	2.68262E1	1.19891E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.16679E-1	-7.98059E-1	-9.13222E0	-9.14268E0	4.76837E-3	9.47475E-2	2.73155E1	-3.267E1	-3.26092E1	2.68442E1	1.19872E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00942E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16894E-1	-7.98202E-1	-9.13219E0	-9.14292E0	4.74453E-3	9.47952E-2	2.73196E1	-3.26635E1	-3.26154E1	2.67985E1	1.19941E-7	2.51182E-3	2.51182E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16727E-1	-7.9813E-1	-9.13236E0	-9.14257E0	4.52995E-3	9.49621E-2	2.73291E1	-3.26766E1	-3.26312E1	2.68334E1	1.20064E-7	2.51752E-3	2.51752E-3	6.33809E-3	2.99906E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1687E-1	-7.98106E-1	-9.13205E0	-9.14249E0	4.31538E-3	9.45568E-2	2.73195E1	-3.26543E1	-3.2593E1	2.68394E1	1.20188E-7	2.51911E-3	2.51911E-3	6.31332E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16774E-1	-7.98297E-1	-9.13188E0	-9.14261E0	4.33922E-3	9.4676E-2	2.73112E1	-3.26566E1	-3.26303E1	2.6843E1	1.19872E-7	2.52585E-3	2.52585E-3	6.32418E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16703E-1	-7.97796E-1	-9.13169E0	-9.1429E0	4.41074E-3	9.46283E-2	2.7376E1	-3.26705E1	-3.26194E1	2.68448E1	1.20174E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16655E-1	-7.98249E-1	-9.13186E0	-9.14266E0	4.43459E-3	9.43661E-2	2.72962E1	-3.26325E1	-3.26378E1	2.6836E1	1.20017E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16512E-1	-7.98297E-1	-9.13198E0	-9.14299E0	4.07696E-3	9.4676E-2	2.73252E1	-3.26543E1	-3.26372E1	2.68268E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9892E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.1656E-1	-7.98273E-1	-9.13184E0	-9.14311E0	4.50611E-3	9.48191E-2	2.73124E1	-3.26615E1	-3.2634E1	2.68425E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16655E-1	-7.97844E-1	-9.13196E0	-9.14307E0	4.91142E-3	9.48429E-2	2.72979E1	-3.26386E1	-3.26008E1	2.6828E1	1.19713E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.99879E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16536E-1	-7.98106E-1	-9.13193E0	-9.14311E0	4.81606E-3	9.46522E-2	2.73261E1	-3.26783E1	-3.26206E1	2.68902E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16536E-1	-7.98178E-1	-9.13191E0	-9.14297E0	4.79221E-3	9.48429E-2	2.73225E1	-3.26561E1	-3.25906E1	2.68412E1	1.20174E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.16393E-1	-7.98202E-1	-9.13212E0	-9.14309E0	4.45843E-3	9.47237E-2	2.73321E1	-3.26813E1	-3.26639E1	2.68364E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16774E-1	-7.98154E-1	-9.13222E0	-9.14297E0	4.50611E-3	9.48668E-2	2.73399E1	-3.2649E1	-3.26337E1	2.68142E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16751E-1	-7.98106E-1	-9.13215E0	-9.14299E0	4.52995E-3	9.47952E-2	2.73207E1	-3.26687E1	-3.26026E1	2.68563E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.02769E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16464E-1	-7.97939E-1	-9.13203E0	-9.14297E0	4.57764E-3	9.47237E-2	2.73491E1	-3.26741E1	-3.26648E1	2.68569E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02133E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16441E-1	-7.97963E-1	-9.13172E0	-9.14268E0	4.62532E-3	9.50336E-2	2.73222E1	-3.26615E1	-3.26138E1	2.68376E1	1.20042E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16679E-1	-7.98249E-1	-9.132E0	-9.14288E0	4.60148E-3	9.47237E-2	2.73269E1	-3.26531E1	-3.25959E1	2.68274E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99613E-1