[Scan]
initial_time=2016-01-18T20:06:09
final_time=2016-01-18T20:06:29
ip_count=19
run=1024
dataset=6
scan=430
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.36451E-8
ql2_vset=
ql2_vmon=-7.97653E-1
ql2_imon=1.95079E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=1.51587E-10
ql4_vset=
ql4_vmon=-9.1429E0
ql4_imon=-4.3118E-11
mult1=-9.97222E-9
mult2=-2.78009E-9
rf_tmon=-4.81032E-3
rf_agc=3.45656E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.70926E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68096E0
bslens_imon=2.24949E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=2.00279E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.83962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02351E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04398E1
cs_ea1_imon=2.52733E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38318E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.49453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.93765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.36042E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.2531E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.18059E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.99063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.36141E-8
tplens_vset=1.4E-1
tplens_vmon=1.69275E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26337E1
iondef3_imon=1.51436E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26343E1
iondef2_imon=1.55506E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98169E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.03883E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=1.80494E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52758E0
os_ea2_imon=-6.52828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11239E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.4386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01575E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73346E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.1072E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.0553E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.93569E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.4197E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92552E3
multa_neg_imon=8.52132E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.31273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.43802E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06903E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66543E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.98203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6227E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68215E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66113E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.45851E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.73204E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93839E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22831E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31711E-3
inlet_lpb_pmon=2.99413E-1
chamber_ion_pmon=1.19888E-7
chamber_cvt_pmon=2.5128E-3
foreline_cvt_pmon=2.5128E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.41583E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16464E-1	-7.98321E-1	-9.13205E0	-9.1429E0	4.69685E-3	9.44138E-2	2.73015E1	-3.26711E1	-3.26236E1	2.68286E1	1.20158E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.02511E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16679E-1	-7.98154E-1	-9.13193E0	-9.14264E0	4.60148E-3	9.4676E-2	2.73222E1	-3.26567E1	-3.26266E1	2.68412E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16822E-1	-7.98154E-1	-9.13191E0	-9.14283E0	4.93526E-3	9.46045E-2	2.73305E1	-3.26543E1	-3.26207E1	2.6843E1	1.19732E-7	2.51783E-3	2.51783E-3	6.29703E-3	3.00494E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16846E-1	-7.98059E-1	-9.13222E0	-9.14283E0	4.52995E-3	9.46283E-2	2.73145E1	-3.26797E1	-3.26124E1	2.68215E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16536E-1	-7.98106E-1	-9.13196E0	-9.14278E0	4.98295E-3	9.49144E-2	2.73466E1	-3.26741E1	-3.2614E1	2.68364E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16751E-1	-7.98082E-1	-9.13181E0	-9.14252E0	4.31538E-3	9.44853E-2	2.73544E1	-3.26753E1	-3.26032E1	2.68365E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16798E-1	-7.98178E-1	-9.13172E0	-9.14271E0	4.33922E-3	9.47952E-2	2.73187E1	-3.26703E1	-3.26242E1	2.6852E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16441E-1	-7.98225E-1	-9.13174E0	-9.14266E0	4.24385E-3	9.49144E-2	2.73161E1	-3.26689E1	-3.26278E1	2.68142E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16441E-1	-7.97677E-1	-9.13153E0	-9.14221E0	4.24385E-3	9.46999E-2	2.73263E1	-3.26661E1	-3.26425E1	2.6843E1	1.20137E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16488E-1	-7.97677E-1	-9.13162E0	-9.14268E0	4.36306E-3	9.46522E-2	2.73478E1	-3.26717E1	-3.2599E1	2.68545E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.1656E-1	-7.97677E-1	-9.13179E0	-9.14283E0	4.45843E-3	9.49383E-2	2.73117E1	-3.26747E1	-3.262E1	2.68322E1	1.20435E-7	2.52209E-3	2.52209E-3	6.34037E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16345E-1	-7.97725E-1	-9.13188E0	-9.14245E0	4.57764E-3	9.49144E-2	2.73141E1	-3.26543E1	-3.26104E1	2.68388E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16631E-1	-7.98011E-1	-9.13208E0	-9.14271E0	4.43459E-3	9.47237E-2	2.73424E1	-3.26488E1	-3.26296E1	2.67992E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.1656E-1	-7.97963E-1	-9.13208E0	-9.14245E0	4.43459E-3	9.47475E-2	2.73605E1	-3.26573E1	-3.26396E1	2.68569E1	1.20017E-7	2.52318E-3	2.52318E-3	6.28552E-3	2.9952E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.16607E-1	-7.97868E-1	-9.13227E0	-9.14268E0	4.69685E-3	9.50336E-2	2.73165E1	-3.2647E1	-3.2647E1	2.68569E1	1.20055E-7	2.50989E-3	2.50989E-3	6.32896E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16488E-1	-7.98154E-1	-9.13234E0	-9.14285E0	4.72069E-3	9.49383E-2	2.73309E1	-3.26536E1	-3.26098E1	2.684E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01347E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.1656E-1	-7.98059E-1	-9.13229E0	-9.14283E0	4.8399E-3	9.47475E-2	2.73333E1	-3.26783E1	-3.26158E1	2.68267E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16298E-1	-7.97987E-1	-9.13227E0	-9.1428E0	5.00679E-3	9.47475E-2	2.73134E1	-3.26555E1	-3.26537E1	2.68274E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16464E-1	-7.97963E-1	-9.13241E0	-9.14268E0	4.74453E-3	9.47952E-2	2.72886E1	-3.26404E1	-3.2634E1	2.68323E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.97394E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.16369E-1	-7.97653E-1	-9.13212E0	-9.1429E0	4.673E-3	9.4986E-2	2.73346E1	-3.26343E1	-3.26337E1	2.68484E1	1.19888E-7	2.5128E-3	2.5128E-3	6.31711E-3	2.99413E-1