[Scan]
initial_time=2016-01-18T20:06:36
final_time=2016-01-18T20:06:55
ip_count=19
run=1024
dataset=6
scan=431
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.36513E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.95102E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=1.31273E-10
ql4_vset=
ql4_vmon=-9.14276E0
ql4_imon=-1.69039E-11
mult1=-1.03458E-8
mult2=-2.77362E-9
rf_tmon=-4.97314E-3
rf_agc=3.26431E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.66508E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.15038E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54031E1
cs_ef1b_imon=2.84215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04562E2
lens23_imon=1.02011E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04546E1
cs_ea1_imon=2.5376E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34483E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.5186E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.94954E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=1.35455E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.36558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2462E0
cs_ionrep_imon=1.1905E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.99063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.36581E-8
tplens_vset=1.4E-1
tplens_vmon=1.66916E0
tplens_imon=-1.6085E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26889E1
iondef2_imon=1.55647E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.06232E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31109E0
ionrepsh_imon=1.79503E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33481E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52699E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71528E1
cs_ef2a_imon=3.1492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04855E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.114E1
os_restr2_imon=3.42923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.28512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73648E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68494E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.08413E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.90499E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.8623E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.43826E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.43307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50082E3
multb_neg_imon=6.53571E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63588E0
defgridb_imon=6.24194E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3337E1
os_fil1_imon=9.43423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6631E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.97351E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64096E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67969E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66113E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62303E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22871E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9413E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.16774E-1	-7.97558E-1	-9.13203E0	-9.14276E0	4.95911E-3	9.50813E-2	2.73086E1	-3.26537E1	-3.26762E1	2.68348E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16798E-1	-7.97963E-1	-9.13179E0	-9.14268E0	4.88758E-3	9.4986E-2	2.73039E1	-3.2648E1	-3.26419E1	2.68514E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16607E-1	-7.97892E-1	-9.13181E0	-9.14249E0	4.43459E-3	9.5129E-2	2.73178E1	-3.26596E1	-3.25994E1	2.68308E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00676E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1656E-1	-7.97868E-1	-9.13184E0	-9.14273E0	4.33922E-3	9.49144E-2	2.73328E1	-3.26284E1	-3.26172E1	2.68472E1	1.19991E-7	2.51814E-3	2.51814E-3	6.33388E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16774E-1	-7.98178E-1	-9.1321E0	-9.14249E0	4.33922E-3	9.48191E-2	2.7321E1	-3.26555E1	-3.25912E1	2.68382E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16584E-1	-7.98178E-1	-9.13217E0	-9.14285E0	4.69685E-3	9.47714E-2	2.73315E1	-3.26332E1	-3.26368E1	2.68227E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-8.16989E-1	-7.97868E-1	-9.13169E0	-9.14273E0	4.69685E-3	9.47475E-2	2.73345E1	-3.26783E1	-3.26362E1	2.68466E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16822E-1	-7.97701E-1	-9.13222E0	-9.14299E0	4.57764E-3	9.47237E-2	2.73263E1	-3.26343E1	-3.26119E1	2.68274E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16464E-1	-7.98178E-1	-9.132E0	-9.14278E0	4.55379E-3	9.48668E-2	2.72951E1	-3.26744E1	-3.26101E1	2.68511E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16679E-1	-7.97772E-1	-9.13179E0	-9.14268E0	4.72069E-3	9.48429E-2	2.73604E1	-3.26549E1	-3.26248E1	2.68338E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9892E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16965E-1	-7.97749E-1	-9.132E0	-9.14285E0	4.72069E-3	9.4676E-2	2.73183E1	-3.26843E1	-3.26128E1	2.68447E1	1.19757E-7	2.50898E-3	2.50898E-3	6.33486E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.16631E-1	-7.97915E-1	-9.13222E0	-9.14288E0	4.91142E-3	9.5129E-2	2.73045E1	-3.26443E1	-3.26726E1	2.68298E1	1.20069E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16488E-1	-7.98249E-1	-9.13217E0	-9.14276E0	4.76837E-3	9.51767E-2	2.73363E1	-3.26554E1	-3.26452E1	2.68442E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16607E-1	-7.98321E-1	-9.13222E0	-9.14257E0	4.41074E-3	9.50575E-2	2.73363E1	-3.27017E1	-3.25882E1	2.684E1	1.20004E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.16774E-1	-7.97963E-1	-9.13196E0	-9.14268E0	4.76837E-3	9.49144E-2	2.73308E1	-3.2678E1	-3.26015E1	2.68334E1	1.19872E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.02545E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16846E-1	-7.98059E-1	-9.13208E0	-9.14285E0	4.72069E-3	9.50336E-2	2.73231E1	-3.26326E1	-3.26368E1	2.68148E1	1.19925E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.00676E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17084E-1	-7.98154E-1	-9.13205E0	-9.14252E0	4.86374E-3	9.49144E-2	2.72921E1	-3.26372E1	-3.26225E1	2.68364E1	1.19653E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.16727E-1	-7.97915E-1	-9.13208E0	-9.14273E0	4.74453E-3	9.50336E-2	2.73267E1	-3.26591E1	-3.2602E1	2.68352E1	1.19902E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16989E-1	-7.97772E-1	-9.13222E0	-9.14247E0	4.74453E-3	9.48191E-2	2.73045E1	-3.26365E1	-3.26486E1	2.68369E1	1.20284E-7	2.51955E-3	2.51955E-3	6.30478E-3	3.02047E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.1687E-1	-7.97915E-1	-9.13196E0	-9.14276E0	4.64916E-3	9.48906E-2	2.73648E1	-3.26889E1	-3.26338E1	2.68494E1