[Scan]
initial_time=2016-01-18T20:07:56
final_time=2016-01-18T20:08:15
ip_count=19
run=1024
dataset=6
scan=434
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09325E0
qbias_imon=-1.08701E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.34967E-8
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=1.94758E-9
ql3_vset=
ql3_vmon=-9.1326E0
ql3_imon=1.07574E-10
ql4_vset=
ql4_vmon=-9.1429E0
ql4_imon=-4.83871E-11
mult1=-1.00313E-8
mult2=-2.6919E-9
rf_tmon=-5.31174E-3
rf_agc=3.36689E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.64136E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19346E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.84719E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02438E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.50975E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32209E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64987E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.49568E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83992E1
cs_ef1a_imon=2.92504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.35208E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11688E1
os_restr1_imon=4.26571E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.32518E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.06343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20223E0
cs_ionrep_imon=1.1907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91958E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.99928E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.37149E-8
tplens_vset=1.4E-1
tplens_vmon=1.70152E0
tplens_imon=-1.11888E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.05754E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29476E0
ionrepsh_imon=1.78985E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.16981E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74958E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53989E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32863E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.43536E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.27477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01563E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.12473E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.08604E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.89201E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39019E-4
mask2_vset=0.0E0
mask2_vmon=-1.86068E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=6.8637E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=5.86152E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.43838E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66437E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.98041E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64072E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68254E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.88221E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27106E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22838E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.7522E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16727E-1	-7.98273E-1	-9.13174E0	-9.14247E0	4.33922E-3	9.51529E-2	2.73051E1	-3.2659E1	-3.26614E1	2.681E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.1656E-1	-7.98273E-1	-9.13205E0	-9.14242E0	4.36306E-3	9.49383E-2	2.73235E1	-3.26523E1	-3.26389E1	2.68538E1	1.20209E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.1656E-1	-7.98178E-1	-9.13219E0	-9.1428E0	4.55379E-3	9.4986E-2	2.73145E1	-3.26549E1	-3.25877E1	2.68587E1	1.19766E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.98554E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16464E-1	-7.98106E-1	-9.13241E0	-9.14283E0	4.31538E-3	9.49383E-2	2.73275E1	-3.26767E1	-3.26195E1	2.6843E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9841E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.1656E-1	-7.97915E-1	-9.13203E0	-9.14273E0	4.36306E-3	9.50575E-2	2.73321E1	-3.26512E1	-3.26212E1	2.68563E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09325E0	-8.16536E-1	-7.97939E-1	-9.13205E0	-9.14321E0	4.57764E-3	9.46283E-2	2.73393E1	-3.2638E1	-3.26194E1	2.6816E1	1.20466E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16584E-1	-7.9813E-1	-9.13186E0	-9.1429E0	4.673E-3	9.46522E-2	2.73092E1	-3.26402E1	-3.2616E1	2.68328E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16917E-1	-7.97987E-1	-9.13179E0	-9.14278E0	4.31538E-3	9.47714E-2	2.73252E1	-3.26579E1	-3.26248E1	2.68354E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16846E-1	-7.97915E-1	-9.13181E0	-9.14268E0	4.41074E-3	9.49144E-2	2.73255E1	-3.26362E1	-3.26074E1	2.68328E1	1.19851E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.1656E-1	-7.97915E-1	-9.13191E0	-9.14276E0	4.57764E-3	9.48668E-2	2.73183E1	-3.26482E1	-3.26044E1	2.68166E1	1.19705E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16584E-1	-7.98082E-1	-9.13205E0	-9.14218E0	4.86374E-3	9.50575E-2	2.73375E1	-3.26537E1	-3.26101E1	2.68178E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16464E-1	-7.97844E-1	-9.13222E0	-9.1428E0	4.48227E-3	9.50813E-2	2.73243E1	-3.2653E1	-3.2614E1	2.68538E1	1.19953E-7	2.52276E-3	2.52276E-3	6.28056E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16512E-1	-7.97987E-1	-9.13215E0	-9.14271E0	4.50611E-3	9.49144E-2	2.73225E1	-3.26554E1	-3.2605E1	2.6846E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16488E-1	-7.97868E-1	-9.13217E0	-9.14249E0	4.48227E-3	9.50575E-2	2.73033E1	-3.26344E1	-3.26242E1	2.68082E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16679E-1	-7.97987E-1	-9.13222E0	-9.1423E0	4.57764E-3	9.46522E-2	2.72955E1	-3.26549E1	-3.26326E1	2.68424E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.1687E-1	-7.98059E-1	-9.13231E0	-9.14276E0	4.41074E-3	9.49383E-2	2.73189E1	-3.26627E1	-3.26122E1	2.68526E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16751E-1	-7.98178E-1	-9.13231E0	-9.14273E0	4.24385E-3	9.47714E-2	2.73231E1	-3.26344E1	-3.26038E1	2.68659E1	1.20122E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09325E0	-8.16989E-1	-7.98035E-1	-9.13224E0	-9.14247E0	4.33922E-3	9.49144E-2	2.73305E1	-3.26508E1	-3.2626E1	2.68389E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16941E-1	-7.9813E-1	-9.13215E0	-9.14257E0	4.52995E-3	9.46045E-2	2.73098E1	-3.26585E1	-3.26337E1	2.68208E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09325E0	-8.16917E-1	-7.97582E-1	-9.1326E0	-9.1429E0	4.48227E-3	9.49144E-2	2.73063E1	-3.26762E1	-3.2626E1	2.68484E1	1.19705E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01609E-1