[Scan]
initial_time=2016-01-18T20:08:49
final_time=2016-01-18T20:09:08
ip_count=19
run=1024
dataset=6
scan=436
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.3644E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.94886E-9
ql3_vset=
ql3_vmon=-9.13234E0
ql3_imon=1.07586E-10
ql4_vset=
ql4_vmon=-9.14271E0
ql4_imon=-2.99454E-11
mult1=-9.27815E-9
mult2=-2.73113E-9
rf_tmon=-4.69664E-3
rf_agc=3.3478E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.70337E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65974E0
bslens_imon=2.3539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19775E1
lens5a_imon=1.98964E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53711E1
cs_ef1b_imon=2.84517E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04595E1
cs_ea1_imon=2.50401E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35634E0
lens1_imon=2.76195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6512E1
os_ef1alow_imon=2.99337E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.50747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84276E1
cs_ef1a_imon=2.91029E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.35548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11279E1
os_restr1_imon=4.27446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15112E1
os_ea1_imon=2.35577E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.18627E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93345E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01616E1
cs_anode1_imon=2.96418E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.36729E-8
tplens_vset=1.4E-1
tplens_vmon=1.66701E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26167E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26535E1
iondef2_imon=1.57747E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=4.03827E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28891E0
ionrepsh_imon=1.78075E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.16335E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7467E1
cs_ef2b_imon=3.14046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4973E0
os_ea2_imon=-9.36729E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.006E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71451E1
cs_ef2a_imon=3.15281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0477E0
os_ef2alow_imon=-2.56683E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83909E-1
os_ef2bup_imon=-5.08184E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11473E1
os_restr2_imon=3.43911E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01472E1
cs_anode2_imon=2.26469E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73221E1
iondef1_imon=1.09342E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68451E1
iondef4_imon=1.06931E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.06734E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.91299E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13139E0
cs_ionaccel_imon=-1.64241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47556E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56037E1
einzel_imon=7.47077E-6
window_vset=0.0E0
window_vmon=2.56894E-1
window_imon=-6.46886E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-8.19045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.55377E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.35207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.82751E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38687E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.45645E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66283E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30868E1
cs_fil1_imon=9.9985E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62896E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67859E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4651E-2
os_fil2_imon=-2.93072E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.42522E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33013E-1
cs_fil2_imon=-2.85587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.99582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22748E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13028E-1
res40_imon=-2.55186E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16846E-1	-7.9782E-1	-9.13241E0	-9.14276E0	4.55379E-3	9.50336E-2	2.73252E1	-3.26632E1	-3.26207E1	2.68366E1	1.201E-7	2.52407E-3	2.52407E-3	6.31879E-3	3.00522E-1
2.0E0	5.0E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16512E-1	-7.97844E-1	-9.13222E0	-9.14271E0	4.24385E-3	9.51529E-2	2.73484E1	-3.26603E1	-3.26128E1	2.68352E1	1.19991E-7	2.52342E-3	2.52342E-3	6.31798E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16631E-1	-7.97963E-1	-9.1325E0	-9.14297E0	4.45843E-3	9.48906E-2	2.73411E1	-3.26549E1	-3.26402E1	2.6798E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.00144E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16584E-1	-7.98106E-1	-9.1325E0	-9.14283E0	4.14848E-3	9.48906E-2	2.73263E1	-3.26703E1	-3.26484E1	2.68736E1	1.198E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16488E-1	-7.97939E-1	-9.13217E0	-9.14278E0	4.17233E-3	9.49383E-2	2.72965E1	-3.26487E1	-3.26456E1	2.68625E1	1.20311E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.1656E-1	-7.9782E-1	-9.13239E0	-9.14278E0	4.17233E-3	9.48906E-2	2.73309E1	-3.26524E1	-3.26332E1	2.6807E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16584E-1	-7.97844E-1	-9.13191E0	-9.14288E0	4.3869E-3	9.48906E-2	2.72968E1	-3.26679E1	-3.25877E1	2.68638E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16703E-1	-7.97963E-1	-9.13224E0	-9.14311E0	4.673E-3	9.51052E-2	2.73063E1	-3.26529E1	-3.26303E1	2.68388E1	1.19809E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17013E-1	-7.97868E-1	-9.1326E0	-9.14295E0	4.673E-3	9.48668E-2	2.73222E1	-3.26413E1	-3.26195E1	2.68337E1	1.20278E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.16941E-1	-7.98154E-1	-9.1326E0	-9.14319E0	4.79221E-3	9.49621E-2	2.73225E1	-3.26861E1	-3.26284E1	2.68304E1	1.20226E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.17013E-1	-7.98273E-1	-9.13236E0	-9.14302E0	4.673E-3	9.47475E-2	2.73327E1	-3.26699E1	-3.262E1	2.68466E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16846E-1	-7.98225E-1	-9.13241E0	-9.14271E0	4.52995E-3	9.50098E-2	2.73087E1	-3.26579E1	-3.26302E1	2.68454E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02922E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.1687E-1	-7.98035E-1	-9.13262E0	-9.14247E0	4.50611E-3	9.48191E-2	2.73496E1	-3.27047E1	-3.26242E1	2.68418E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16917E-1	-7.9782E-1	-9.13231E0	-9.14276E0	4.41074E-3	9.46283E-2	2.73057E1	-3.26332E1	-3.26278E1	2.68226E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16917E-1	-7.98059E-1	-9.13239E0	-9.1429E0	4.17233E-3	9.4676E-2	2.73423E1	-3.26791E1	-3.25918E1	2.6849E1	1.19965E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16894E-1	-7.97915E-1	-9.13222E0	-9.14257E0	4.1008E-3	9.50098E-2	2.73303E1	-3.26573E1	-3.26368E1	2.6825E1	1.20004E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.01738E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16941E-1	-7.98368E-1	-9.13188E0	-9.14252E0	4.12464E-3	9.46283E-2	2.73116E1	-3.26714E1	-3.2606E1	2.68352E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16822E-1	-7.98011E-1	-9.13208E0	-9.1424E0	4.24385E-3	9.4676E-2	2.73466E1	-3.26819E1	-3.25942E1	2.68586E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16584E-1	-7.98154E-1	-9.13236E0	-9.14292E0	4.43459E-3	9.4676E-2	2.7321E1	-3.2672E1	-3.26042E1	2.68328E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16917E-1	-7.9813E-1	-9.13234E0	-9.14271E0	4.50611E-3	9.47475E-2	2.73221E1	-3.26535E1	-3.26167E1	2.68451E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1