[Scan]
initial_time=2016-01-18T20:09:42
final_time=2016-01-18T20:10:02
ip_count=19
run=1024
dataset=6
scan=438
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.37018E-8
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=1.91846E-9
ql3_vset=
ql3_vmon=-9.1327E0
ql3_imon=1.441E-10
ql4_vset=
ql4_vmon=-9.14252E0
ql4_imon=-2.563E-11
mult1=-1.0055E-8
mult2=-2.6527E-9
rf_tmon=-4.63335E-3
rf_agc=3.29493E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.66928E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64663E0
bslens_imon=2.36887E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19513E1
lens5a_imon=2.02072E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05261E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54036E1
cs_ef1b_imon=2.83768E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02095E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04514E1
cs_ea1_imon=2.52835E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33762E0
lens1_imon=2.64216E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64746E1
os_ef1alow_imon=2.98327E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03765E1
cs_ea2_imon=1.49698E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.94584E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35158E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11691E1
os_restr1_imon=4.26136E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15038E1
os_ea1_imon=2.36326E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6386E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.20611E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93484E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=2.98739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.36367E-8
tplens_vset=1.4E-1
tplens_vmon=1.677E0
tplens_imon=-4.53804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.49923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26284E1
iondef2_imon=1.561E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03008E2
lens6_imon=2.98226E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.04806E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27082E0
ionrepsh_imon=1.78711E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.15623E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7442E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52101E0
os_ea2_imon=-6.97139E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00772E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71208E1
cs_ef2a_imon=3.16553E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06579E0
os_ef2alow_imon=-2.4583E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16345E-1
os_ef2bup_imon=-5.25026E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1136E1
os_restr2_imon=3.43949E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28356E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01853E1
cs_anode2_imon=2.24561E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.08032E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67769E1
iondef4_imon=1.10075E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=5.0433E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.90868E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13201E0
cs_ionaccel_imon=-1.87445E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56499E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.52527E-1
window_imon=-7.66649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86369E1
mask2_imon=-6.73084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92592E3
multa_neg_imon=8.03669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=6.02638E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.6249E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18386E0
defgridb_imon=6.04135E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=9.42745E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07909E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66255E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.97686E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67897E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47849E-2
os_fil2_imon=-2.69369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51223E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34761E-1
cs_fil2_imon=-2.22587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.61562E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22804E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42969E-1
res40_imon=-2.41338E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16917E-1	-7.97939E-1	-9.13205E0	-9.14307E0	4.48227E-3	9.47714E-2	2.73358E1	-3.26791E1	-3.26396E1	2.6843E1	1.19991E-7	2.52293E-3	2.52293E-3	6.3131E-3	3.00794E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16751E-1	-7.98059E-1	-9.13191E0	-9.14252E0	4.52995E-3	9.47714E-2	2.73243E1	-3.26759E1	-3.26236E1	2.68304E1	1.198E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16202E-1	-7.97987E-1	-9.13224E0	-9.14266E0	4.41074E-3	9.48668E-2	2.73134E1	-3.26632E1	-3.26307E1	2.68238E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16345E-1	-7.98178E-1	-9.13208E0	-9.14314E0	4.57764E-3	9.49144E-2	2.73405E1	-3.26753E1	-3.26026E1	2.68334E1	1.198E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16631E-1	-7.98202E-1	-9.13196E0	-9.14259E0	4.48227E-3	9.46999E-2	2.73417E1	-3.2652E1	-3.26349E1	2.68142E1	1.20055E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16345E-1	-7.98059E-1	-9.13215E0	-9.14259E0	4.43459E-3	9.49621E-2	2.73257E1	-3.26325E1	-3.25947E1	2.68395E1	1.20055E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-8.16751E-1	-7.97892E-1	-9.13205E0	-9.1429E0	4.60148E-3	9.4676E-2	2.7288E1	-3.26627E1	-3.26462E1	2.68356E1	1.20158E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16655E-1	-7.97725E-1	-9.13222E0	-9.14257E0	4.45843E-3	9.4986E-2	2.73369E1	-3.26681E1	-3.2623E1	2.68292E1	1.20297E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16393E-1	-7.97939E-1	-9.13188E0	-9.14302E0	4.69685E-3	9.4986E-2	2.72997E1	-3.26536E1	-3.26212E1	2.68484E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.1656E-1	-7.98082E-1	-9.13167E0	-9.14259E0	4.8399E-3	9.51052E-2	2.73123E1	-3.26585E1	-3.2626E1	2.68256E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16727E-1	-7.98035E-1	-9.13174E0	-9.14297E0	4.93526E-3	9.52005E-2	2.73249E1	-3.26603E1	-3.26056E1	2.68508E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16655E-1	-7.98082E-1	-9.13184E0	-9.14273E0	4.88758E-3	9.49383E-2	2.73311E1	-3.26455E1	-3.26425E1	2.6829E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16751E-1	-7.97844E-1	-9.13215E0	-9.14288E0	4.673E-3	9.47952E-2	2.73159E1	-3.26669E1	-3.26182E1	2.68274E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16607E-1	-7.97868E-1	-9.13203E0	-9.14283E0	4.64916E-3	9.50336E-2	2.73297E1	-3.26288E1	-3.26137E1	2.68395E1	1.20084E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.00144E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16846E-1	-7.97725E-1	-9.13234E0	-9.14245E0	4.52995E-3	9.50575E-2	2.73363E1	-3.26572E1	-3.26203E1	2.6827E1	1.1986E-7	2.52224E-3	2.52224E-3	6.29738E-3	3.00771E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16941E-1	-7.97629E-1	-9.13243E0	-9.14271E0	4.52995E-3	9.48429E-2	2.73057E1	-3.26831E1	-3.26036E1	2.68205E1	1.2006E-7	2.51527E-3	2.51527E-3	6.3074E-3	3.00087E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16941E-1	-7.97772E-1	-9.13231E0	-9.14299E0	4.12464E-3	9.54866E-2	2.73531E1	-3.26695E1	-3.2639E1	2.68303E1	1.19732E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.00247E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.17013E-1	-7.97796E-1	-9.13241E0	-9.14283E0	4.24385E-3	9.5129E-2	2.73069E1	-3.27312E1	-3.26873E1	2.68545E1	1.20019E-7	2.52266E-3	2.52266E-3	6.33112E-3	3.01043E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16941E-1	-7.97701E-1	-9.13258E0	-9.14285E0	4.45843E-3	9.50575E-2	2.73177E1	-3.26813E1	-3.25972E1	2.68364E1	1.20363E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.17013E-1	-7.97629E-1	-9.1327E0	-9.14252E0	4.33922E-3	9.48906E-2	2.73216E1	-3.26284E1	-3.26119E1	2.67769E1	1.19705E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1