[Scan]
initial_time=2016-01-18T20:10:09
final_time=2016-01-18T20:10:28
ip_count=19
run=1024
dataset=6
scan=439
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09302E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.35287E-8
ql2_vset=
ql2_vmon=-7.97534E-1
ql2_imon=1.93744E-9
ql3_vset=
ql3_vmon=-9.13186E0
ql3_imon=9.37343E-11
ql4_vset=
ql4_vmon=-9.14257E0
ql4_imon=-4.4167E-11
mult1=-9.75944E-9
mult2=-2.7213E-9
rf_tmon=-4.61566E-3
rf_agc=3.26897E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=1.65361E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04862E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.01991E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=2.50903E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.73242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.4928E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35258E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.26427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.3789E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63359E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.19827E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.0E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.3712E-8
tplens_vset=1.4E-1
tplens_vmon=1.67147E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26337E1
iondef2_imon=1.57427E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.05662E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30858E0
ionrepsh_imon=1.79886E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34096E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52187E0
os_ea2_imon=-7.8241E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71444E1
cs_ef2a_imon=3.16182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02212E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2301E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.25326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73128E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68556E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.07063E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.90429E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82687E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86014E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.57748E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.70868E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.43525E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07023E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66358E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.97669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63063E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6799E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55868E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22664E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.60493E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16631E-1	-7.9782E-1	-9.1321E0	-9.14266E0	4.50611E-3	9.48429E-2	2.73122E1	-3.26679E1	-3.26514E1	2.68597E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00453E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16846E-1	-7.9751E-1	-9.13224E0	-9.14259E0	4.3869E-3	9.49621E-2	2.73112E1	-3.26462E1	-3.26248E1	2.68207E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16798E-1	-7.97915E-1	-9.13224E0	-9.14266E0	4.62532E-3	9.52482E-2	2.73155E1	-3.2666E1	-3.2615E1	2.68325E1	1.20244E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.03349E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16941E-1	-7.97796E-1	-9.13222E0	-9.14233E0	4.45843E-3	9.52721E-2	2.73435E1	-3.26609E1	-3.2614E1	2.68214E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16751E-1	-7.9782E-1	-9.13196E0	-9.14304E0	4.05312E-3	9.50336E-2	2.73279E1	-3.26621E1	-3.26464E1	2.68581E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16798E-1	-7.97629E-1	-9.13198E0	-9.14261E0	4.31538E-3	9.50098E-2	2.73063E1	-3.2653E1	-3.2608E1	2.68496E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.97704E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16941E-1	-7.97653E-1	-9.13212E0	-9.14295E0	4.31538E-3	9.46999E-2	2.73279E1	-3.26561E1	-3.26134E1	2.68581E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16941E-1	-7.97844E-1	-9.13191E0	-9.14283E0	4.45843E-3	9.49144E-2	2.7349E1	-3.26885E1	-3.26326E1	2.684E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16774E-1	-7.97558E-1	-9.13227E0	-9.14273E0	4.3869E-3	9.47952E-2	2.73277E1	-3.26683E1	-3.26196E1	2.68337E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16798E-1	-7.97582E-1	-9.13205E0	-9.14249E0	4.17233E-3	9.46045E-2	2.73394E1	-3.26468E1	-3.26315E1	2.68154E1	1.19851E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16679E-1	-7.97534E-1	-9.13229E0	-9.14233E0	4.07696E-3	9.48191E-2	2.73057E1	-3.26837E1	-3.26398E1	2.6846E1	1.19713E-7	2.5225E-3	2.5225E-3	6.34661E-3	2.99083E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.17013E-1	-7.97725E-1	-9.1321E0	-9.14266E0	4.41074E-3	9.4676E-2	2.73315E1	-3.26705E1	-3.26452E1	2.6846E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97394E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09263E0	-8.16941E-1	-7.97772E-1	-9.13217E0	-9.14266E0	4.29153E-3	9.49144E-2	2.73175E1	-3.26531E1	-3.26207E1	2.68653E1	1.19809E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.98222E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.16941E-1	-7.98082E-1	-9.13234E0	-9.14321E0	4.33922E-3	9.4986E-2	2.73309E1	-3.26524E1	-3.26567E1	2.68358E1	1.20311E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.16846E-1	-7.98249E-1	-9.13217E0	-9.14299E0	4.79221E-3	9.50575E-2	2.73141E1	-3.26657E1	-3.26302E1	2.68514E1	1.2033E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16607E-1	-7.9782E-1	-9.13203E0	-9.14273E0	4.45843E-3	9.50575E-2	2.73033E1	-3.26416E1	-3.2638E1	2.68244E1	1.20137E-7	2.52585E-3	2.52585E-3	6.32978E-3	3.00676E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.16751E-1	-7.97915E-1	-9.13229E0	-9.14283E0	4.36306E-3	9.49383E-2	2.73195E1	-3.26573E1	-3.26705E1	2.68448E1	1.19697E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.16369E-1	-7.97772E-1	-9.132E0	-9.14264E0	4.02927E-3	9.51529E-2	2.72532E1	-3.25776E1	-3.26278E1	2.68569E1	1.20036E-7	2.51647E-3	2.51647E-3	6.32099E-3	3.0012E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-8.16298E-1	-7.97844E-1	-9.13179E0	-9.1428E0	4.12464E-3	9.49383E-2	2.73333E1	-3.26356E1	-3.26362E1	2.68274E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09302E0	-8.1656E-1	-7.97534E-1	-9.13186E0	-9.14257E0	4.12464E-3	9.50813E-2	2.73128E1	-3.26337E1	-3.26178E1	2.68556E1	1.19757E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1