[Scan]
initial_time=2016-01-18T20:11:02
final_time=2016-01-18T20:11:22
ip_count=19
run=1024
dataset=6
scan=441
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.3616E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.96027E-9
ql3_vset=
ql3_vmon=-9.13253E0
ql3_imon=1.28388E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-2.83957E-11
mult1=-1.00775E-8
mult2=-2.69466E-9
rf_tmon=-4.7888E-3
rf_agc=3.31173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.63083E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=2.81223E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04718E1
cs_ea1_imon=2.53535E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37376E0
lens1_imon=2.67835E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65305E1
os_ef1alow_imon=2.98775E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.51983E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.9654E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.35251E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11988E1
os_restr1_imon=4.24481E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14771E1
os_ea1_imon=2.33131E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62957E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20283E0
cs_ionrep_imon=1.20008E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.98234E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.36472E-8
tplens_vset=1.4E-1
tplens_vmon=1.64804E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.48631E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.03349E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.78119E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.15935E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74369E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53929E0
os_ea2_imon=-8.68929E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.15173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2986E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.43428E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73411E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68779E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.00633E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.9116E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.40673E-6
window_vset=0.0E0
window_vmon=2.76207E-1
window_imon=-6.2651E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82678E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-3.85044E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.61713E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.98987E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.43141E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07389E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66283E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.99165E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62384E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67481E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59993E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-2.51311E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22746E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.05543E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16464E-1	-7.97796E-1	-9.13222E0	-9.14314E0	4.31538E-3	9.5129E-2	2.7312E1	-3.26608E1	-3.26428E1	2.68453E1	1.20122E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00563E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16631E-1	-7.98035E-1	-9.13219E0	-9.14292E0	4.88758E-3	9.49383E-2	2.73418E1	-3.26701E1	-3.2604E1	2.68809E1	1.20192E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16345E-1	-7.98297E-1	-9.13229E0	-9.1424E0	4.79221E-3	9.49383E-2	2.73068E1	-3.26642E1	-3.26109E1	2.68731E1	1.19925E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01209E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16536E-1	-7.98106E-1	-9.13231E0	-9.14235E0	4.57764E-3	9.47237E-2	2.73201E1	-3.26717E1	-3.26176E1	2.68052E1	1.20042E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.02875E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.16607E-1	-7.98011E-1	-9.13243E0	-9.14266E0	4.33922E-3	9.45807E-2	2.7349E1	-3.26627E1	-3.26398E1	2.68364E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-8.16798E-1	-7.98154E-1	-9.13231E0	-9.14304E0	4.50611E-3	9.48906E-2	2.73153E1	-3.26476E1	-3.26062E1	2.68076E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16703E-1	-7.97963E-1	-9.13239E0	-9.1428E0	4.29153E-3	9.44614E-2	2.73219E1	-3.26717E1	-3.26338E1	2.69139E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.97704E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16631E-1	-7.98082E-1	-9.13239E0	-9.1429E0	4.43459E-3	9.45091E-2	2.73153E1	-3.26404E1	-3.26476E1	2.68154E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16798E-1	-7.97796E-1	-9.13215E0	-9.14288E0	4.41074E-3	9.50098E-2	2.73303E1	-3.26579E1	-3.2635E1	2.68689E1	1.20122E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.1687E-1	-7.97915E-1	-9.13229E0	-9.14304E0	4.26769E-3	9.51529E-2	2.73399E1	-3.26585E1	-3.2623E1	2.68214E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16607E-1	-7.97963E-1	-9.13219E0	-9.14259E0	4.45843E-3	9.47952E-2	2.73003E1	-3.26536E1	-3.26122E1	2.67854E1	1.20174E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16727E-1	-7.97963E-1	-9.13208E0	-9.1424E0	4.64916E-3	9.48668E-2	2.73104E1	-3.26608E1	-3.26201E1	2.68478E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16822E-1	-7.97915E-1	-9.13215E0	-9.14276E0	4.43459E-3	9.52482E-2	2.73069E1	-3.26759E1	-3.25954E1	2.68184E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16941E-1	-7.98202E-1	-9.13239E0	-9.14254E0	4.3869E-3	9.4986E-2	2.73387E1	-3.26927E1	-3.26178E1	2.68477E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16822E-1	-7.98225E-1	-9.13227E0	-9.14228E0	4.43459E-3	9.47475E-2	2.72859E1	-3.26609E1	-3.26044E1	2.68377E1	1.19705E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16631E-1	-7.97939E-1	-9.13208E0	-9.14259E0	4.31538E-3	9.50336E-2	2.73169E1	-3.26944E1	-3.26071E1	2.68478E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01995E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16655E-1	-7.98059E-1	-9.13205E0	-9.14233E0	4.36306E-3	9.51052E-2	2.73496E1	-3.26603E1	-3.26164E1	2.6825E1	1.20414E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16703E-1	-7.97939E-1	-9.13227E0	-9.14257E0	4.43459E-3	9.52005E-2	2.73187E1	-3.25706E1	-3.2636E1	2.68267E1	1.20191E-7	2.52473E-3	2.52473E-3	6.33538E-3	3.01475E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16751E-1	-7.98082E-1	-9.13253E0	-9.14271E0	4.45843E-3	9.52721E-2	2.73309E1	-3.26711E1	-3.26404E1	2.68388E1	1.19991E-7	2.51919E-3	2.51919E-3	6.28103E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16607E-1	-7.98249E-1	-9.13253E0	-9.14264E0	4.33922E-3	9.48429E-2	2.73411E1	-3.26476E1	-3.25984E1	2.68779E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1