[Scan]
initial_time=2016-01-18T20:12:49
final_time=2016-01-18T20:13:08
ip_count=19
run=1024
dataset=6
scan=445
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.35859E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.9487E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=1.07765E-10
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-5.76854E-11
mult1=-9.33101E-9
mult2=-2.79446E-9
rf_tmon=-4.72872E-3
rf_agc=3.3658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.69605E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.62788E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1946E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.83097E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.52057E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35153E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.49136E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.93441E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.35287E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.27328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14927E1
os_ea1_imon=2.36736E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.20512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.98378E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.36136E-8
tplens_vset=1.4E-1
tplens_vmon=1.68589E0
tplens_imon=-2.77716E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=4.10482E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=1.78732E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53569E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.15533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.10624E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73592E1
iondef1_imon=1.11969E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.05692E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.91303E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.42246E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.87812E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.00068E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.42618E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07101E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6649E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.97549E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62822E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67861E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.39111E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22837E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.45477E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.1687E-1	-7.97868E-1	-9.13243E0	-9.14285E0	4.3869E-3	9.51767E-2	2.73287E1	-3.26561E1	-3.25971E1	2.68406E1	1.20383E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01871E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16679E-1	-7.98011E-1	-9.13258E0	-9.14283E0	4.24385E-3	9.48906E-2	2.73411E1	-3.26741E1	-3.26482E1	2.68334E1	1.19985E-7	2.51593E-3	2.51593E-3	6.31012E-3	3.01934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17084E-1	-7.97987E-1	-9.13231E0	-9.14297E0	4.55379E-3	9.49621E-2	2.73159E1	-3.26494E1	-3.26182E1	2.68418E1					
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16655E-1	-7.97892E-1	-9.13229E0	-9.14271E0	4.22001E-3	9.4986E-2	2.73417E1	-3.26585E1	-3.26296E1	2.68389E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16846E-1	-7.97939E-1	-9.13243E0	-9.14288E0	4.07696E-3	9.49144E-2	2.73106E1	-3.26487E1	-3.26389E1	2.68194E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16989E-1	-7.97796E-1	-9.13205E0	-9.14247E0	4.29153E-3	9.48191E-2	2.73263E1	-3.26431E1	-3.26236E1	2.6843E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16774E-1	-7.98154E-1	-9.13219E0	-9.14247E0	4.31538E-3	9.51052E-2	2.73159E1	-3.26476E1	-3.26128E1	2.68575E1	1.19861E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16679E-1	-7.98178E-1	-9.13243E0	-9.14295E0	4.69685E-3	9.51052E-2	2.73321E1	-3.26669E1	-3.26212E1	2.68352E1	1.20011E-7	2.52134E-3	2.52134E-3	6.29926E-3	3.01414E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16798E-1	-7.97725E-1	-9.13243E0	-9.14299E0	4.62532E-3	9.52721E-2	2.72915E1	-3.2649E1	-3.2616E1	2.68304E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16751E-1	-7.97868E-1	-9.13239E0	-9.14268E0	4.24385E-3	9.51529E-2	2.73225E1	-3.265E1	-3.2638E1	2.68388E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16798E-1	-7.9782E-1	-9.13227E0	-9.14283E0	4.29153E-3	9.51529E-2	2.73147E1	-3.26807E1	-3.25852E1	2.68226E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16584E-1	-7.97939E-1	-9.13243E0	-9.14264E0	4.26769E-3	9.51529E-2	2.73231E1	-3.26543E1	-3.26464E1	2.68695E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16584E-1	-7.97987E-1	-9.13241E0	-9.14299E0	4.33922E-3	9.48191E-2	2.72961E1	-3.26897E1	-3.26176E1	2.6837E1	1.20278E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16631E-1	-7.98082E-1	-9.13234E0	-9.14297E0	4.60148E-3	9.48429E-2	2.73033E1	-3.26398E1	-3.2641E1	2.68268E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16917E-1	-7.97868E-1	-9.13231E0	-9.14285E0	4.52995E-3	9.49383E-2	2.73484E1	-3.26855E1	-3.26374E1	2.68388E1	1.19757E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16846E-1	-7.98178E-1	-9.13212E0	-9.14268E0	4.8399E-3	9.50575E-2	2.73393E1	-3.2647E1	-3.26284E1	2.68232E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16751E-1	-7.98154E-1	-9.13219E0	-9.14283E0	4.76837E-3	9.50575E-2	2.73263E1	-3.26478E1	-3.25953E1	2.68094E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16679E-1	-7.98035E-1	-9.13248E0	-9.14299E0	4.60148E-3	9.54151E-2	2.73658E1	-3.2629E1	-3.2495E1	2.6849E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16917E-1	-7.98392E-1	-9.13236E0	-9.14297E0	4.52995E-3	9.52244E-2	2.73381E1	-3.26744E1	-3.26543E1	2.68418E1	1.19913E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16798E-1	-7.98178E-1	-9.13236E0	-9.14254E0	4.45843E-3	9.51767E-2	2.73592E1	-3.26885E1	-3.26224E1	2.68418E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.00197E-1