[Scan]
initial_time=2016-01-18T20:13:42
final_time=2016-01-18T20:14:01
ip_count=19
run=1024
dataset=6
scan=447
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.36317E-8
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=1.98768E-9
ql3_vset=
ql3_vmon=-9.13179E0
ql3_imon=9.27806E-11
ql4_vset=
ql4_vmon=-9.14254E0
ql4_imon=-4.01616E-11
mult1=-9.73579E-9
mult2=-2.75069E-9
rf_tmon=-4.20863E-3
rf_agc=3.46423E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.74317E-3
ql5_imon=1.6619E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.40522E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19535E1
lens5a_imon=2.00846E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.83133E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.53264E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3413E0
lens1_imon=2.60697E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64296E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.4963E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.92323E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.35341E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.34966E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22614E0
cs_ionrep_imon=1.18554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02182E1
cs_anode1_imon=2.9809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.35824E-8
tplens_vset=1.4E-1
tplens_vmon=1.66326E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26189E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26408E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03024E2
lens6_imon=2.98141E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=4.03125E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=1.77096E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53407E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00732E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.16866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05833E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11316E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.23668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6829E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.03522E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.90857E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.70201E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.38983E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-3.8144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.93732E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.43171E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66213E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30854E1
cs_fil1_imon=9.94792E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62654E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68153E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51167E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-3.02636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22732E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03418E-1
chamber_ion_pmon=1.19785E-7
chamber_cvt_pmon=2.52338E-3
foreline_cvt_pmon=2.52338E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.27457E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.1687E-1	-7.97796E-1	-9.13222E0	-9.14254E0	4.24385E-3	9.47237E-2	2.73315E1	-3.26573E1	-3.26494E1	2.68082E1	1.198E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.0148E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.16822E-1	-7.97725E-1	-9.13215E0	-9.14273E0	4.07696E-3	9.49144E-2	2.73327E1	-3.26675E1	-3.26266E1	2.68486E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16703E-1	-7.97749E-1	-9.13222E0	-9.14276E0	3.83854E-3	9.49621E-2	2.7337E1	-3.2659E1	-3.26313E1	2.68273E1	1.19872E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01209E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16774E-1	-7.9782E-1	-9.13212E0	-9.14257E0	4.33922E-3	9.46522E-2	2.73411E1	-3.26632E1	-3.26343E1	2.68262E1	1.20004E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.16655E-1	-7.97725E-1	-9.13227E0	-9.14278E0	4.43459E-3	9.49621E-2	2.73222E1	-3.26762E1	-3.26089E1	2.68337E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16798E-1	-7.98178E-1	-9.13224E0	-9.14254E0	4.62532E-3	9.4986E-2	2.73364E1	-3.26779E1	-3.26366E1	2.68106E1	1.1979E-7	2.51919E-3	2.51919E-3	6.33919E-3	3.00852E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.1687E-1	-7.98106E-1	-9.13219E0	-9.14252E0	4.41074E-3	9.49144E-2	2.73265E1	-3.26499E1	-3.26407E1	2.6852E1	1.19978E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16679E-1	-7.98106E-1	-9.13231E0	-9.14268E0	4.45843E-3	9.50575E-2	2.73063E1	-3.26573E1	-3.26032E1	2.68845E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16655E-1	-7.98059E-1	-9.13224E0	-9.14276E0	4.24385E-3	9.50575E-2	2.73351E1	-3.26536E1	-3.26242E1	2.68334E1	1.19653E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16846E-1	-7.97987E-1	-9.13239E0	-9.14276E0	4.43459E-3	9.48906E-2	2.73213E1	-3.26615E1	-3.26188E1	2.68406E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16894E-1	-7.97725E-1	-9.13234E0	-9.14235E0	4.57764E-3	9.4986E-2	2.73128E1	-3.26183E1	-3.2626E1	2.68484E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.16894E-1	-7.97892E-1	-9.13227E0	-9.14292E0	4.29153E-3	9.4676E-2	2.73277E1	-3.26529E1	-3.2626E1	2.68412E1	1.19965E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.17037E-1	-7.98202E-1	-9.13239E0	-9.14278E0	4.3869E-3	9.47714E-2	2.72915E1	-3.26537E1	-3.26119E1	2.68274E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-8.16846E-1	-7.97844E-1	-9.13231E0	-9.1428E0	4.17233E-3	9.48668E-2	2.72901E1	-3.26554E1	-3.26326E1	2.68502E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01085E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09371E0	-8.16894E-1	-7.98273E-1	-9.13248E0	-9.14257E0	4.07696E-3	9.50098E-2	2.7323E1	-3.26534E1	-3.26534E1	2.68261E1	1.19705E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.16727E-1	-7.97844E-1	-9.13231E0	-9.14288E0	4.17233E-3	9.50098E-2	2.7333E1	-3.26643E1	-3.26409E1	2.68419E1	1.20113E-7	2.51447E-3	2.51447E-3	6.3023E-3	2.99663E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16631E-1	-7.97939E-1	-9.13219E0	-9.14311E0	4.60148E-3	9.48906E-2	2.73234E1	-3.26408E1	-3.26065E1	2.68192E1	1.20281E-7	2.51758E-3	2.51758E-3	6.32483E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16488E-1	-7.98106E-1	-9.13222E0	-9.14252E0	4.24385E-3	9.48429E-2	2.73269E1	-3.26819E1	-3.26227E1	2.68219E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9952E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16393E-1	-7.97987E-1	-9.1321E0	-9.14268E0	4.26769E-3	9.45568E-2	2.73096E1	-3.26635E1	-3.26604E1	2.6819E1	1.20016E-7	2.51752E-3	2.51752E-3	6.28703E-3	3.00392E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16417E-1	-7.98059E-1	-9.13179E0	-9.14254E0	3.74317E-3	9.47475E-2	2.73134E1	-3.26408E1	-3.26189E1	2.6829E1	1.19785E-7	2.52338E-3	2.52338E-3	6.3074E-3	3.03418E-1