[Scan]
initial_time=2016-01-18T20:14:08
final_time=2016-01-18T20:14:27
ip_count=19
run=1024
dataset=6
scan=448
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.17084E-1
ql1_imon=1.36397E-8
ql2_vset=
ql2_vmon=-7.9751E-1
ql2_imon=1.96503E-9
ql3_vset=
ql3_vmon=-9.13236E0
ql3_imon=1.6185E-10
ql4_vset=
ql4_vmon=-9.14259E0
ql4_imon=-4.48346E-11
mult1=-9.39296E-9
mult2=-2.6821E-9
rf_tmon=-3.86648E-3
rf_agc=3.42824E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.65349E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64253E0
bslens_imon=2.28785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19932E1
lens5a_imon=1.98323E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54119E1
cs_ef1b_imon=2.84455E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0471E1
cs_ea1_imon=2.54568E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35112E0
lens1_imon=2.60419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6528E1
os_ef1alow_imon=2.96653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03928E1
cs_ea2_imon=1.48613E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84493E1
cs_ef1a_imon=2.94812E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.34647E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=4.24786E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=2.35344E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63224E1
os_ef1bup_imon=3.07531E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23182E0
cs_ionrep_imon=1.18717E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=2.98287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.35838E-8
tplens_vset=1.4E-1
tplens_vmon=1.63622E0
tplens_imon=-2.01111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26018E1
iondef3_imon=1.50177E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26815E1
iondef2_imon=1.55878E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98259E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.02474E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29323E0
ionrepsh_imon=1.78752E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33582E1
lens5b_imon=2.17303E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74831E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51977E0
os_ea2_imon=-8.894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00668E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.17157E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06151E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07657E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1132E1
os_restr2_imon=3.42909E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.28329E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02203E1
cs_anode2_imon=2.24855E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73334E1
iondef1_imon=1.10931E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6852E1
iondef4_imon=1.07426E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.05683E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.88864E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.85173E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0204E2
cs_ionfocb_imon=1.4756E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56805E1
einzel_imon=7.62181E-6
window_vset=0.0E0
window_vmon=2.20003E-1
window_imon=-5.20708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.86373E1
mask2_imon=-8.12629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.37354E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.20901E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.17887E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3021E0
defgridb_imon=6.10125E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.43625E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06762E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66304E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.98852E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63229E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67286E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64304E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87181E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.40419E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-1.82933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.6978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22745E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32626E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19774E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40098E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74845E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=573
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16345E-1	-7.9782E-1	-9.13191E0	-9.14268E0	4.45843E-3	9.46999E-2	2.7326E1	-3.26469E1	-3.26283E1	2.68306E1					
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16345E-1	-7.97963E-1	-9.13212E0	-9.14218E0	4.45843E-3	9.48191E-2	2.72997E1	-3.265E1	-3.26075E1	2.68354E1	1.20042E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.1625E-1	-7.97915E-1	-9.13193E0	-9.14285E0	4.69685E-3	9.47475E-2	2.73167E1	-3.26422E1	-3.26277E1	2.68632E1	1.20008E-7	2.52081E-3	2.52081E-3	6.31429E-3	3.00132E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16178E-1	-7.97701E-1	-9.13184E0	-9.14283E0	4.62532E-3	9.5129E-2	2.73428E1	-3.26626E1	-3.26142E1	2.68803E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16679E-1	-7.97796E-1	-9.13198E0	-9.14268E0	4.62532E-3	9.51052E-2	2.73273E1	-3.26819E1	-3.26182E1	2.68863E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16441E-1	-7.97844E-1	-9.13203E0	-9.14254E0	4.33922E-3	9.48668E-2	2.73009E1	-3.26765E1	-3.26146E1	2.69151E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16679E-1	-7.97868E-1	-9.13215E0	-9.14278E0	4.48227E-3	9.47952E-2	2.7298E1	-3.2662E1	-3.26178E1	2.68945E1	1.20278E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16822E-1	-7.97725E-1	-9.13239E0	-9.14283E0	4.43459E-3	9.50336E-2	2.7321E1	-3.26634E1	-3.26199E1	2.68469E1	1.20383E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16703E-1	-7.98202E-1	-9.13234E0	-9.14276E0	4.33922E-3	9.51052E-2	2.72992E1	-3.26254E1	-3.25989E1	2.6854E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16751E-1	-7.98011E-1	-9.13239E0	-9.1429E0	4.31538E-3	9.49621E-2	2.73351E1	-3.26777E1	-3.26374E1	2.68202E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.16798E-1	-7.98249E-1	-9.132E0	-9.14285E0	4.52995E-3	9.48429E-2	2.73225E1	-3.26248E1	-3.2644E1	2.68454E1	1.19544E-7	2.52384E-3	2.52384E-3	6.28592E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16989E-1	-7.98011E-1	-9.13227E0	-9.14268E0	4.33922E-3	9.50098E-2	2.72998E1	-3.2688E1	-3.26337E1	2.68268E1	1.19872E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.99613E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17037E-1	-7.98059E-1	-9.13208E0	-9.14278E0	4.33922E-3	9.49144E-2	2.73045E1	-3.26609E1	-3.25978E1	2.6828E1	1.20055E-7	2.52599E-3	2.52599E-3	6.29128E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.17275E-1	-7.97725E-1	-9.13172E0	-9.14261E0	4.33922E-3	9.50098E-2	2.73544E1	-3.26693E1	-3.26314E1	2.68376E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17037E-1	-7.97558E-1	-9.13188E0	-9.14297E0	4.24385E-3	9.52005E-2	2.73538E1	-3.26807E1	-3.26482E1	2.6852E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.17084E-1	-7.97534E-1	-9.1321E0	-9.14252E0	4.45843E-3	9.50098E-2	2.73087E1	-3.26543E1	-3.26428E1	2.68827E1	1.19757E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00824E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.17013E-1	-7.97772E-1	-9.132E0	-9.14271E0	4.33922E-3	9.50098E-2	2.73246E1	-3.26579E1	-3.26107E1	2.68146E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.1687E-1	-7.97701E-1	-9.13231E0	-9.14283E0	4.41074E-3	9.51767E-2	2.73116E1	-3.26236E1	-3.26425E1	2.68448E1	1.19841E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.99594E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16989E-1	-7.97534E-1	-9.13205E0	-9.14292E0	4.50611E-3	9.52244E-2	2.73216E1	-3.26614E1	-3.26431E1	2.68134E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.17084E-1	-7.9751E-1	-9.13236E0	-9.14259E0	4.3869E-3	9.50813E-2	2.73334E1	-3.26815E1	-3.26018E1	2.6852E1	1.19774E-7	2.51847E-3	2.51847E-3	6.32626E-3	3.01609E-1