[Scan]
initial_time=2016-01-18T20:15:27
final_time=2016-01-18T20:15:47
ip_count=19
run=1024
dataset=6
scan=451
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.36197E-8
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=1.93485E-9
ql3_vset=
ql3_vmon=-9.13224E0
ql3_imon=1.00231E-10
ql4_vset=
ql4_vmon=-9.14285E0
ql4_imon=-3.97325E-11
mult1=-9.66486E-9
mult2=-2.80949E-9
rf_tmon=-5.08758E-3
rf_agc=3.30849E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.69548E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70095E0
bslens_imon=2.53204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.99162E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=2.84215E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02176E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04376E1
cs_ea1_imon=2.50657E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34869E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0388E1
cs_ea2_imon=1.47483E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.93585E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.34589E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14896E1
os_ea1_imon=2.38536E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26863E0
cs_ionrep_imon=1.20046E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.98883E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.35639E-8
tplens_vset=1.4E-1
tplens_vmon=1.65429E0
tplens_imon=-2.88803E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.51377E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.54205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0309E2
lens6_imon=2.98511E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.07218E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30964E0
ionrepsh_imon=1.79108E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.16131E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55022E0
os_ea2_imon=-6.89157E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19648E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.42347E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.28569E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72951E1
iondef1_imon=1.10497E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68418E1
iondef4_imon=1.1108E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.07644E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.87634E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.80501E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.70201E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.85966E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=7.6338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.35193E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.78167E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.15534E0
defgridb_imon=6.11686E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.43195E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07383E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65989E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.97705E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63297E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67779E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52853E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8478E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-1.97521E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22727E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.43675E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.1656E-1	-7.97772E-1	-9.13203E0	-9.14254E0	4.57764E-3	9.4986E-2	2.73027E1	-3.26095E1	-3.26124E1	2.68208E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16774E-1	-7.97987E-1	-9.13227E0	-9.14266E0	4.62532E-3	9.49621E-2	2.73458E1	-3.26602E1	-3.26325E1	2.68389E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16631E-1	-7.97963E-1	-9.13241E0	-9.14268E0	4.673E-3	9.50813E-2	2.73275E1	-3.2662E1	-3.26089E1	2.68418E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.97647E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16655E-1	-7.97939E-1	-9.13239E0	-9.14285E0	4.55379E-3	9.5129E-2	2.7321E1	-3.26762E1	-3.26166E1	2.6825E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16894E-1	-7.97987E-1	-9.1325E0	-9.14268E0	4.52995E-3	9.49383E-2	2.73163E1	-3.26384E1	-3.2675E1	2.68569E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16894E-1	-7.97915E-1	-9.13253E0	-9.14288E0	4.62532E-3	9.50098E-2	2.72937E1	-3.26374E1	-3.26248E1	2.68274E1	1.20069E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16917E-1	-7.97868E-1	-9.13253E0	-9.14228E0	4.26769E-3	9.49144E-2	2.73393E1	-3.26627E1	-3.2626E1	2.68701E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17323E-1	-7.97725E-1	-9.1325E0	-9.14302E0	4.69685E-3	9.51052E-2	2.73269E1	-3.26738E1	-3.26024E1	2.68412E1	1.19861E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16751E-1	-7.97963E-1	-9.13253E0	-9.1428E0	4.69685E-3	9.51529E-2	2.73435E1	-3.26356E1	-3.26098E1	2.6846E1	1.2026E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16917E-1	-7.9782E-1	-9.13231E0	-9.14249E0	4.45843E-3	9.49383E-2	2.73586E1	-3.26663E1	-3.2632E1	2.68647E1	1.19872E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.01209E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16703E-1	-7.97987E-1	-9.13246E0	-9.14259E0	4.62532E-3	9.48668E-2	2.72991E1	-3.26645E1	-3.26206E1	2.68346E1	1.20069E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16655E-1	-7.98368E-1	-9.13196E0	-9.14292E0	4.81606E-3	9.51052E-2	2.73328E1	-3.26549E1	-3.2639E1	2.68593E1	1.20004E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.02253E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-8.16631E-1	-7.98178E-1	-9.13203E0	-9.14299E0	4.72069E-3	9.52482E-2	2.73189E1	-3.26639E1	-3.26098E1	2.68358E1	1.19913E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16894E-1	-7.98106E-1	-9.13157E0	-9.14295E0	4.48227E-3	9.51052E-2	2.7329E1	-3.26801E1	-3.26323E1	2.68479E1	1.19902E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16798E-1	-7.98035E-1	-9.13217E0	-9.14309E0	4.62532E-3	9.53674E-2	2.73249E1	-3.26464E1	-3.2635E1	2.68274E1	1.20028E-7	2.51886E-3	2.51886E-3	6.29703E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16798E-1	-7.97939E-1	-9.13208E0	-9.1429E0	4.3869E-3	9.50098E-2	2.73741E1	-3.26496E1	-3.26254E1	2.68953E1	1.19913E-7	2.51771E-3	2.51771E-3	6.35692E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16989E-1	-7.98106E-1	-9.13222E0	-9.14302E0	4.43459E-3	9.52244E-2	2.7318E1	-3.26548E1	-3.26327E1	2.68376E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.17108E-1	-7.97772E-1	-9.13229E0	-9.14278E0	4.43459E-3	9.51052E-2	2.73204E1	-3.26697E1	-3.26343E1	2.68232E1	1.20174E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16822E-1	-7.97939E-1	-9.13219E0	-9.14276E0	4.33922E-3	9.50098E-2	2.73092E1	-3.26921E1	-3.26319E1	2.68256E1	1.19705E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16774E-1	-7.97915E-1	-9.13224E0	-9.14285E0	4.26769E-3	9.50575E-2	2.72951E1	-3.26697E1	-3.26307E1	2.68418E1	1.19941E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.00852E-1