[Scan]
initial_time=2016-01-18T20:15:54
final_time=2016-01-18T20:16:14
ip_count=19
run=1024
dataset=6
scan=452
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=1.36293E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=1.97765E-9
ql3_vset=
ql3_vmon=-9.13231E0
ql3_imon=9.42111E-11
ql4_vset=
ql4_vmon=-9.14252E0
ql4_imon=-4.81486E-11
mult1=-9.40792E-9
mult2=-2.72554E-9
rf_tmon=-5.49569E-3
rf_agc=3.29611E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.73287E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62348E0
bslens_imon=2.43681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19496E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.84791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04573E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04513E1
cs_ea1_imon=2.51516E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37556E0
lens1_imon=2.80812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6435E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.51695E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.93405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.34886E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.25274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.36159E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24609E0
cs_ionrep_imon=1.17484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.97765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.36624E-8
tplens_vset=1.4E-1
tplens_vmon=1.67868E0
tplens_imon=-1.91197E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.51659E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26664E1
iondef2_imon=1.55769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03015E2
lens6_imon=2.97935E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.05417E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=1.78876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52427E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.23848E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7325E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.075E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.89116E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-7.995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.0836E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.00429E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.41898E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6596E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30883E1
cs_fil1_imon=9.95705E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63441E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67644E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74687E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22652E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31242E-3
inlet_lpb_pmon=3.02449E-1
chamber_ion_pmon=1.20099E-7
chamber_cvt_pmon=2.52123E-3
foreline_cvt_pmon=2.52123E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.16645E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17156E-1	-7.97868E-1	-9.13243E0	-9.14276E0	4.26769E-3	9.50336E-2	2.72949E1	-3.26488E1	-3.26362E1	2.68124E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01609E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16798E-1	-7.97629E-1	-9.1325E0	-9.14297E0	4.31538E-3	9.53197E-2	2.73351E1	-3.26933E1	-3.26272E1	2.68376E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16846E-1	-7.97653E-1	-9.13231E0	-9.14264E0	4.36306E-3	9.51529E-2	2.73482E1	-3.26773E1	-3.26266E1	2.68337E1	1.19872E-7	2.51248E-3	2.51248E-3	6.32978E-3	3.00676E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16941E-1	-7.9782E-1	-9.13217E0	-9.14295E0	4.48227E-3	9.5129E-2	2.7357E1	-3.2652E1	-3.26095E1	2.68478E1	1.19941E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16727E-1	-7.97939E-1	-9.13265E0	-9.14288E0	4.8399E-3	9.50098E-2	2.73195E1	-3.26536E1	-3.26098E1	2.68496E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17013E-1	-7.97677E-1	-9.13243E0	-9.14261E0	4.50611E-3	9.52244E-2	2.73448E1	-3.26651E1	-3.26212E1	2.6837E1	1.19925E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16822E-1	-7.9782E-1	-9.13231E0	-9.14283E0	4.31538E-3	9.50098E-2	2.73317E1	-3.26451E1	-3.26324E1	2.68354E1	1.20311E-7	2.52492E-3	2.52492E-3	6.35601E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16703E-1	-7.9782E-1	-9.13262E0	-9.14309E0	4.3869E-3	9.49144E-2	2.7297E1	-3.26547E1	-3.26042E1	2.68556E1	1.19991E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.99845E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.1706E-1	-7.97915E-1	-9.13248E0	-9.14299E0	4.36306E-3	9.49383E-2	2.72919E1	-3.26729E1	-3.26188E1	2.68135E1	1.19925E-7	2.51748E-3	2.51748E-3	6.29346E-3	3.01075E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16965E-1	-7.97749E-1	-9.1325E0	-9.14302E0	4.05312E-3	9.49383E-2	2.73081E1	-3.26627E1	-3.26266E1	2.68204E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16774E-1	-7.97796E-1	-9.1325E0	-9.14276E0	4.64916E-3	9.47952E-2	2.73273E1	-3.26783E1	-3.26164E1	2.68587E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16894E-1	-7.97844E-1	-9.13241E0	-9.14288E0	4.33922E-3	9.53674E-2	2.73393E1	-3.26773E1	-3.26443E1	2.68325E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16774E-1	-7.98011E-1	-9.132E0	-9.14237E0	4.29153E-3	9.48191E-2	2.73412E1	-3.26597E1	-3.2648E1	2.68496E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9978E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.17013E-1	-7.98059E-1	-9.13198E0	-9.14271E0	4.05312E-3	9.4986E-2	2.73706E1	-3.26608E1	-3.26107E1	2.68316E1	1.19913E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.1687E-1	-7.97963E-1	-9.13243E0	-9.14276E0	4.33922E-3	9.50098E-2	2.73027E1	-3.26705E1	-3.26098E1	2.68274E1	1.20004E-7	2.52599E-3	2.52599E-3	6.32356E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16846E-1	-7.97772E-1	-9.13219E0	-9.14295E0	4.26769E-3	9.49621E-2	2.73305E1	-3.2672E1	-3.2606E1	2.68388E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.97499E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.17013E-1	-7.97844E-1	-9.13222E0	-9.14295E0	4.41074E-3	9.48906E-2	2.73123E1	-3.26675E1	-3.26164E1	2.68088E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.1656E-1	-7.97868E-1	-9.13234E0	-9.14295E0	4.05312E-3	9.51767E-2	2.73263E1	-3.26585E1	-3.26024E1	2.68279E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9952E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16727E-1	-7.97749E-1	-9.13212E0	-9.14276E0	4.31538E-3	9.51052E-2	2.73573E1	-3.26678E1	-3.2637E1	2.68373E1	1.20158E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17108E-1	-7.97987E-1	-9.13231E0	-9.14252E0	4.29153E-3	9.49383E-2	2.7325E1	-3.26664E1	-3.2626E1	2.68244E1	1.20099E-7	2.52123E-3	2.52123E-3	6.31242E-3	3.02449E-1