[Scan]
initial_time=2016-01-18T20:16:21
final_time=2016-01-18T20:16:40
ip_count=19
run=1024
dataset=6
scan=453
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.35387E-8
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=1.9806E-9
ql3_vset=
ql3_vmon=-9.13243E0
ql3_imon=8.0502E-11
ql4_vset=
ql4_vmon=-9.14311E0
ql4_imon=-4.7946E-11
mult1=-1.00294E-8
mult2=-2.6727E-9
rf_tmon=-5.23342E-3
rf_agc=3.30572E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.66734E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.35029E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.82593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02366E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04549E1
cs_ea1_imon=2.53535E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36775E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.49821E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.34901E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.26247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.36448E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=1.19323E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.98018E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.34925E-8
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.55697E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98032E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.07846E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30137E0
ionrepsh_imon=1.80066E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53869E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11298E1
os_restr2_imon=3.42635E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.2827E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.24317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.03786E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.90411E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.33016E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.24222E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.43657E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6605E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.96528E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61873E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67886E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75976E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22782E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47589E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16798E-1	-7.97868E-1	-9.13255E0	-9.14333E0	4.673E-3	9.52005E-2	2.7344E1	-3.26431E1	-3.2616E1	2.68412E1	1.19872E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.0041E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16894E-1	-7.97939E-1	-9.13219E0	-9.14288E0	4.79221E-3	9.4986E-2	2.73137E1	-3.2675E1	-3.26119E1	2.68436E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16488E-1	-7.98225E-1	-9.13212E0	-9.14335E0	4.673E-3	9.4986E-2	2.73346E1	-3.26437E1	-3.26337E1	2.68394E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99348E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16774E-1	-7.98059E-1	-9.1325E0	-9.14316E0	4.52995E-3	9.51052E-2	2.73159E1	-3.26524E1	-3.26152E1	2.68472E1	1.19941E-7	2.51709E-3	2.51709E-3	6.32858E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16679E-1	-7.97868E-1	-9.13253E0	-9.14266E0	4.50611E-3	9.51529E-2	2.7321E1	-3.26697E1	-3.2626E1	2.68493E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1656E-1	-7.98082E-1	-9.13255E0	-9.14288E0	4.62532E-3	9.51529E-2	2.73381E1	-3.26452E1	-3.2623E1	2.68304E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16798E-1	-7.98225E-1	-9.13253E0	-9.14316E0	4.76837E-3	9.51052E-2	2.73237E1	-3.26398E1	-3.26362E1	2.68346E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.17037E-1	-7.97844E-1	-9.13248E0	-9.1428E0	4.52995E-3	9.51052E-2	2.73183E1	-3.26374E1	-3.26212E1	2.68214E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16822E-1	-7.97844E-1	-9.13239E0	-9.14276E0	4.64916E-3	9.50575E-2	2.73249E1	-3.26843E1	-3.26326E1	2.6828E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16846E-1	-7.97772E-1	-9.13241E0	-9.14276E0	4.79221E-3	9.4986E-2	2.73526E1	-3.26482E1	-3.26645E1	2.6849E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.1687E-1	-7.98082E-1	-9.13234E0	-9.14278E0	4.81606E-3	9.50575E-2	2.73617E1	-3.26868E1	-3.26396E1	2.68352E1	1.19757E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16703E-1	-7.98059E-1	-9.13241E0	-9.14264E0	4.50611E-3	9.49144E-2	2.73429E1	-3.26651E1	-3.26392E1	2.6825E1	1.19861E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.16846E-1	-7.97987E-1	-9.13215E0	-9.14292E0	4.3869E-3	9.51767E-2	2.73141E1	-3.26753E1	-3.26368E1	2.68316E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0934E0	-8.17013E-1	-7.98011E-1	-9.13203E0	-9.14304E0	4.52995E-3	9.51529E-2	2.73039E1	-3.2653E1	-3.2644E1	2.68388E1	1.19953E-7	2.52815E-3	2.52815E-3	6.31817E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09279E0	-8.16655E-1	-7.97844E-1	-9.13208E0	-9.14273E0	4.48227E-3	9.51529E-2	2.73646E1	-3.26609E1	-3.2599E1	2.68343E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09317E0	-8.16846E-1	-7.9813E-1	-9.1321E0	-9.14319E0	4.48227E-3	9.50813E-2	2.73141E1	-3.26795E1	-3.26362E1	2.68424E1	1.19965E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01609E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09317E0	-8.16894E-1	-7.98345E-1	-9.13212E0	-9.14295E0	4.41074E-3	9.49621E-2	2.73328E1	-3.26242E1	-3.26779E1	2.68268E1	1.19809E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09333E0	-8.16584E-1	-7.98082E-1	-9.132E0	-9.14299E0	4.55379E-3	9.50813E-2	2.73204E1	-3.26443E1	-3.26402E1	2.68354E1	1.19705E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16798E-1	-7.98202E-1	-9.13239E0	-9.14297E0	4.50611E-3	9.50098E-2	2.73623E1	-3.26832E1	-3.26083E1	2.68478E1	1.1979E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.02621E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.16941E-1	-7.97892E-1	-9.13243E0	-9.14311E0	4.62532E-3	9.50813E-2	2.73261E1	-3.26657E1	-3.26284E1	2.68478E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00966E-1