[Scan]
initial_time=2016-01-18T20:16:47
final_time=2016-01-18T20:17:07
ip_count=19
run=1024
dataset=6
scan=454
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.36262E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.95004E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=1.04868E-10
ql4_vset=
ql4_vmon=-9.14307E0
ql4_imon=-5.96404E-11
mult1=-9.5959E-9
mult2=-2.76053E-9
rf_tmon=-5.48576E-3
rf_agc=3.25825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.64582E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.36983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.04845E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.83566E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0438E1
cs_ea1_imon=2.53972E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3466E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.50621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.92612E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.34382E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1164E1
os_restr1_imon=4.26391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14875E1
os_ea1_imon=2.37726E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.19298E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93703E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.97477E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.35591E-8
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-4.54621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.55931E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0305E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.03863E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=1.79538E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57713E0
os_ea2_imon=-8.1918E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73397E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.43284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.26141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01479E1
cs_anode2_imon=2.26119E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7346E1
iondef1_imon=1.11971E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.02253E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.87706E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.96358E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.9221E-6
window_vset=0.0E0
window_vmon=2.64795E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82679E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86044E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9274E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.29314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.42042E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07918E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66063E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.96269E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62582E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67825E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91107E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72934E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.55687E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22639E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88124E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17013E-1	-7.97963E-1	-9.1321E0	-9.14268E0	4.45843E-3	9.51052E-2	2.73334E1	-3.26561E1	-3.26378E1	2.68343E1	1.19749E-7	2.51203E-3	2.51203E-3	6.34518E-3	3.00966E-1
2.0E0	4.1E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.17084E-1	-7.97939E-1	-9.13215E0	-9.14273E0	4.43459E-3	9.48429E-2	2.73406E1	-3.26774E1	-3.26376E1	2.68494E1	1.19913E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.03712E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16989E-1	-7.98178E-1	-9.13241E0	-9.14268E0	4.673E-3	9.47714E-2	2.73063E1	-3.26782E1	-3.26063E1	2.68464E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16798E-1	-7.97868E-1	-9.13196E0	-9.14259E0	4.62532E-3	9.50813E-2	2.73165E1	-3.26723E1	-3.26464E1	2.68424E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16727E-1	-7.97677E-1	-9.13188E0	-9.14285E0	4.52995E-3	9.49383E-2	2.73291E1	-3.27137E1	-3.26122E1	2.6837E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16822E-1	-7.97868E-1	-9.132E0	-9.14285E0	4.41074E-3	9.4986E-2	2.73279E1	-3.26386E1	-3.26176E1	2.68286E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.17013E-1	-7.97677E-1	-9.13215E0	-9.14249E0	4.76837E-3	9.51052E-2	2.73201E1	-3.26464E1	-3.26338E1	2.68322E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16774E-1	-7.97391E-1	-9.13243E0	-9.14304E0	4.45843E-3	9.50575E-2	2.73287E1	-3.26897E1	-3.25995E1	2.68603E1	1.19705E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.17204E-1	-7.97868E-1	-9.13224E0	-9.14283E0	4.52995E-3	9.52959E-2	2.73149E1	-3.26113E1	-3.26597E1	2.68356E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.1656E-1	-7.97892E-1	-9.13248E0	-9.14283E0	4.36306E-3	9.51529E-2	2.73482E1	-3.26957E1	-3.26196E1	2.68359E1	1.19601E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01085E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16679E-1	-7.97844E-1	-9.13229E0	-9.14304E0	4.33922E-3	9.50336E-2	2.72865E1	-3.26639E1	-3.25984E1	2.68671E1	1.19934E-7	2.51377E-3	2.51377E-3	6.33658E-3	3.00336E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16774E-1	-7.97415E-1	-9.1325E0	-9.14302E0	4.33922E-3	9.49621E-2	2.73267E1	-3.26897E1	-3.26254E1	2.68016E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16417E-1	-7.97725E-1	-9.13231E0	-9.14242E0	4.24385E-3	9.52244E-2	2.73339E1	-3.26585E1	-3.26338E1	2.68322E1	1.19757E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16369E-1	-7.97534E-1	-9.13229E0	-9.14254E0	4.29153E-3	9.48668E-2	2.73299E1	-3.26095E1	-3.26478E1	2.684E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16488E-1	-7.9782E-1	-9.13205E0	-9.14259E0	4.36306E-3	9.49383E-2	2.7334E1	-3.27051E1	-3.26018E1	2.68366E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16655E-1	-7.97606E-1	-9.13198E0	-9.14276E0	4.36306E-3	9.50336E-2	2.73279E1	-3.26494E1	-3.262E1	2.68875E1	1.20004E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.01995E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16846E-1	-7.97868E-1	-9.13229E0	-9.14297E0	4.22001E-3	9.52005E-2	2.73303E1	-3.26645E1	-3.25972E1	2.68214E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16846E-1	-7.98059E-1	-9.13224E0	-9.14283E0	4.64916E-3	9.5129E-2	2.72929E1	-3.26301E1	-3.26289E1	2.68354E1	1.19809E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.17275E-1	-7.98082E-1	-9.13219E0	-9.1428E0	4.57764E-3	9.51767E-2	2.73381E1	-3.26621E1	-3.26128E1	2.68532E1	1.19841E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16941E-1	-7.9813E-1	-9.13188E0	-9.14307E0	4.26769E-3	9.4986E-2	2.7346E1	-3.26687E1	-3.26248E1	2.68184E1	1.19809E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1