[Scan]
initial_time=2016-01-18T20:17:14
final_time=2016-01-18T20:17:33
ip_count=19
run=1024
dataset=6
scan=455
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.36455E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=1.94981E-9
ql3_vset=
ql3_vmon=-9.13246E0
ql3_imon=1.0432E-10
ql4_vset=
ql4_vmon=-9.14321E0
ql4_imon=-4.89235E-11
mult1=-9.61758E-9
mult2=-2.75265E-9
rf_tmon=-4.30891E-3
rf_agc=3.37633E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.67767E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.27099E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=2.8335E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04399E1
cs_ea1_imon=2.5285E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34973E0
lens1_imon=2.83696E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.96684E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.50325E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.94306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.3474E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.25418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.3843E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.20152E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=2.98198E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.35624E-8
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-4.86804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26502E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2682E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.05593E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.7985E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.16873E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52968E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.43644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.2827E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.2511E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.07931E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.02819E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.89571E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.46174E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-8.78788E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.26745E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=5.86873E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33336E1
os_fil1_imon=9.44102E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.661E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.97873E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67495E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6154E-2
os_fil2_imon=-2.80412E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82807E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22729E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.54797E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16703E-1	-7.98035E-1	-9.13208E0	-9.14249E0	4.57764E-3	9.50098E-2	2.72933E1	-3.26231E1	-3.2613E1	2.68012E1	1.20069E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.99E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16607E-1	-7.9782E-1	-9.13208E0	-9.14268E0	4.36306E-3	9.5129E-2	2.73339E1	-3.26762E1	-3.2593E1	2.68419E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16822E-1	-7.98202E-1	-9.13203E0	-9.14259E0	4.69685E-3	9.52482E-2	2.73509E1	-3.26776E1	-3.26399E1	2.68018E1	1.19819E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99348E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.17013E-1	-7.97892E-1	-9.13191E0	-9.14285E0	4.673E-3	9.52721E-2	2.73004E1	-3.26579E1	-3.2652E1	2.68267E1	1.19841E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17108E-1	-7.98345E-1	-9.13196E0	-9.14273E0	4.24385E-3	9.52244E-2	2.73265E1	-3.26842E1	-3.26156E1	2.68611E1	1.20209E-7	2.5131E-3	2.5131E-3	6.34518E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17156E-1	-7.97844E-1	-9.13212E0	-9.14268E0	4.48227E-3	9.54151E-2	2.72921E1	-3.26726E1	-3.26349E1	2.68322E1	1.19872E-7	2.5225E-3	2.5225E-3	6.32418E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16965E-1	-7.98082E-1	-9.13246E0	-9.14252E0	4.41074E-3	9.50336E-2	2.72919E1	-3.2653E1	-3.25918E1	2.68677E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17037E-1	-7.98059E-1	-9.1321E0	-9.14271E0	4.43459E-3	9.46283E-2	2.73333E1	-3.2647E1	-3.2617E1	2.68268E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16631E-1	-7.97749E-1	-9.13205E0	-9.14259E0	4.41074E-3	9.50098E-2	2.72967E1	-3.26308E1	-3.26014E1	2.68545E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.03185E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16774E-1	-7.97796E-1	-9.13203E0	-9.14276E0	4.50611E-3	9.50575E-2	2.73234E1	-3.26708E1	-3.26372E1	2.68376E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02659E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.1687E-1	-7.97868E-1	-9.13231E0	-9.1429E0	4.43459E-3	9.48668E-2	2.73094E1	-3.26664E1	-3.26027E1	2.68382E1	1.20004E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16965E-1	-7.97963E-1	-9.13222E0	-9.14268E0	4.05312E-3	9.50098E-2	2.73588E1	-3.26626E1	-3.26065E1	2.68343E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99083E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16727E-1	-7.97892E-1	-9.13227E0	-9.14311E0	4.05312E-3	9.4986E-2	2.73169E1	-3.26809E1	-3.26236E1	2.68334E1	1.20106E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.99175E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.17442E-1	-7.97629E-1	-9.13262E0	-9.14316E0	4.07696E-3	9.50336E-2	2.73363E1	-3.27047E1	-3.26092E1	2.67944E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17156E-1	-7.97582E-1	-9.13234E0	-9.14292E0	4.45843E-3	9.53674E-2	2.73321E1	-3.2614E1	-3.2641E1	2.68436E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16917E-1	-7.97772E-1	-9.13203E0	-9.14257E0	4.31538E-3	9.50336E-2	2.73257E1	-3.26726E1	-3.26484E1	2.68508E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02659E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.16941E-1	-7.97606E-1	-9.13191E0	-9.14304E0	4.22001E-3	9.50336E-2	2.73522E1	-3.26836E1	-3.26272E1	2.68256E1	1.198E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.02769E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.17108E-1	-7.97772E-1	-9.13179E0	-9.14271E0	4.43459E-3	9.52959E-2	2.73086E1	-3.2648E1	-3.25889E1	2.68563E1	1.19766E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16703E-1	-7.97749E-1	-9.13215E0	-9.14292E0	4.14848E-3	9.51052E-2	2.7346E1	-3.26789E1	-3.26182E1	2.68406E1	1.19891E-7	2.52342E-3	2.52342E-3	6.31798E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16631E-1	-7.98011E-1	-9.13246E0	-9.14321E0	4.33922E-3	9.4986E-2	2.73057E1	-3.2682E1	-3.26502E1	2.68382E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1