[Scan]
initial_time=2016-01-18T20:17:41
final_time=2016-01-18T20:18:00
ip_count=19
run=1024
dataset=6
scan=456
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.35388E-8
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=1.96441E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=6.37293E-11
ql4_vset=
ql4_vmon=-9.14338E0
ql4_imon=-5.77569E-11
mult1=-9.41787E-9
mult2=-2.69501E-9
rf_tmon=-5.36989E-3
rf_agc=3.27351E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.64309E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.24215E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1952E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05316E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.82127E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04579E1
cs_ea1_imon=2.53535E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37076E0
lens1_imon=2.63869E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65205E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03744E1
cs_ea2_imon=1.47585E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.92587E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.33954E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=2.37637E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63323E1
os_ef1bup_imon=3.07288E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.19142E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=2.97904E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.36246E-8
tplens_vset=1.4E-1
tplens_vmon=1.63062E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26498E1
iondef2_imon=1.53966E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98032E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.04265E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=1.78408E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.14377E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52848E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.15037E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08989E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31404E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11233E1
os_restr2_imon=3.43917E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29171E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.24333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73161E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.09163E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.05189E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.84141E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16026E0
cs_ionaccel_imon=-1.68839E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47358E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.82337E-6
window_vset=0.0E0
window_vmon=2.29849E-1
window_imon=-7.95253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82679E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92556E3
multa_neg_imon=7.39362E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.29051E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.45491E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=5.77861E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.44117E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06901E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65781E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.9686E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62268E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67609E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97115E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32523E-1
cs_fil2_imon=-2.5823E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.41454E-1
res40_imon=-2.55721E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16774E-1	-7.97844E-1	-9.13203E0	-9.14288E0	4.29153E-3	9.51052E-2	2.72933E1	-3.27287E1	-3.26284E1	2.68442E1	1.20069E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02133E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16917E-1	-7.97749E-1	-9.13212E0	-9.14302E0	4.48227E-3	9.53674E-2	2.73267E1	-3.2644E1	-3.26308E1	2.6828E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.1656E-1	-7.97772E-1	-9.13181E0	-9.14292E0	4.24385E-3	9.51529E-2	2.73269E1	-3.26555E1	-3.26101E1	2.6829E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16679E-1	-7.9813E-1	-9.13229E0	-9.1428E0	4.64916E-3	9.5129E-2	2.73381E1	-3.26518E1	-3.26008E1	2.68643E1	1.20311E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16774E-1	-7.97963E-1	-9.13224E0	-9.14299E0	4.64916E-3	9.52482E-2	2.73111E1	-3.26687E1	-3.26188E1	2.68256E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.1706E-1	-7.97915E-1	-9.13231E0	-9.14297E0	4.36306E-3	9.53436E-2	2.73327E1	-3.265E1	-3.2632E1	2.68496E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17037E-1	-7.9782E-1	-9.13241E0	-9.14319E0	4.48227E-3	9.53436E-2	2.7298E1	-3.26242E1	-3.26372E1	2.68458E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.1687E-1	-7.97963E-1	-9.13241E0	-9.14273E0	4.74453E-3	9.52244E-2	2.72986E1	-3.26443E1	-3.26166E1	2.68581E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.1706E-1	-7.97868E-1	-9.13227E0	-9.14264E0	4.31538E-3	9.50575E-2	2.73008E1	-3.26805E1	-3.26076E1	2.68274E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16941E-1	-7.97868E-1	-9.13248E0	-9.14288E0	4.60148E-3	9.50813E-2	2.73476E1	-3.26758E1	-3.26176E1	2.6825E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.98026E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16941E-1	-7.97939E-1	-9.13241E0	-9.1428E0	4.76837E-3	9.51052E-2	2.73479E1	-3.26598E1	-3.26208E1	2.68114E1	1.20016E-7	2.5216E-3	2.5216E-3	6.3074E-3	2.99906E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.16941E-1	-7.97963E-1	-9.13219E0	-9.14302E0	4.36306E-3	9.5439E-2	2.72877E1	-3.26783E1	-3.26236E1	2.68364E1	1.20019E-7	2.51793E-3	2.51793E-3	6.30149E-3	3.01892E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16917E-1	-7.97963E-1	-9.13186E0	-9.14276E0	4.3869E-3	9.51529E-2	2.73177E1	-3.26717E1	-3.26176E1	2.6819E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16965E-1	-7.98011E-1	-9.13215E0	-9.14307E0	4.22001E-3	9.52721E-2	2.73429E1	-3.26789E1	-3.2608E1	2.68424E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02659E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.1687E-1	-7.97844E-1	-9.13193E0	-9.14319E0	4.12464E-3	9.50336E-2	2.73505E1	-3.26543E1	-3.26638E1	2.68647E1	1.20466E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02253E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16703E-1	-7.98178E-1	-9.13205E0	-9.14307E0	4.48227E-3	9.50575E-2	2.73249E1	-3.26687E1	-3.26326E1	2.68478E1	1.2212E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01871E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16703E-1	-7.98178E-1	-9.132E0	-9.14309E0	4.41074E-3	9.48668E-2	2.73323E1	-3.26625E1	-3.26388E1	2.68424E1	1.2212E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09325E0	-8.17084E-1	-7.98178E-1	-9.13188E0	-9.14307E0	4.52995E-3	9.49383E-2	2.73002E1	-3.26529E1	-3.26768E1	2.68388E1	1.2212E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.02115E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-8.1687E-1	-7.97987E-1	-9.13196E0	-9.14285E0	4.673E-3	9.50098E-2	2.73564E1	-3.27015E1	-3.26372E1	2.68482E1	1.22066E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.02813E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.17132E-1	-7.97892E-1	-9.13188E0	-9.14338E0	4.36306E-3	9.52005E-2	2.73161E1	-3.26498E1	-3.26446E1	2.6816E1	1.2212E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.03545E-1