[Scan]
initial_time=2016-01-18T20:19:01
final_time=2016-01-18T20:19:20
ip_count=19
run=1024
dataset=6
scan=459
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.36236E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=1.97046E-9
ql3_vset=
ql3_vmon=-9.13191E0
ql3_imon=1.2815E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-4.78625E-11
mult1=-9.13836E-9
mult2=-2.87031E-9
rf_tmon=-4.55448E-3
rf_agc=3.364E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.66881E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.32506E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=2.01552E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04808E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.83602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.5303E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64374E1
os_ef1alow_imon=2.96901E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.50614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.93333E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.33809E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15516E1
os_ea1_imon=2.37313E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.1907E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93658E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.97297E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.34636E-8
tplens_vset=1.4E-1
tplens_vmon=1.68469E0
tplens_imon=-4.111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26615E1
iondef3_imon=1.48523E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26422E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.97985E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.06193E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24248E0
ionrepsh_imon=1.77723E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3352E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52127E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.4213E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.00677E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.85043E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.31758E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.06918E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.576E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.437E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07497E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6591E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.97188E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62558E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67389E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.851E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68887E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22693E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.96381E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8452E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16727E-1	-7.97963E-1	-9.13215E0	-9.14266E0	4.36306E-3	9.4676E-2	2.7324E1	-3.2682E1	-3.26178E1	2.68514E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01609E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16584E-1	-7.97987E-1	-9.13217E0	-9.14278E0	4.26769E-3	9.48668E-2	2.73467E1	-3.2648E1	-3.26572E1	2.68338E1	1.19757E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.16846E-1	-7.98035E-1	-9.13196E0	-9.14266E0	4.43459E-3	9.49621E-2	2.73423E1	-3.26296E1	-3.26337E1	2.68418E1	1.20031E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.03618E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09317E0	-8.16441E-1	-7.98106E-1	-9.1316E0	-9.1429E0	4.55379E-3	9.49383E-2	2.73305E1	-3.2652E1	-3.2613E1	2.68256E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16536E-1	-7.98488E-1	-9.13205E0	-9.14226E0	4.41074E-3	9.47237E-2	2.72984E1	-3.2697E1	-3.25899E1	2.68298E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16441E-1	-7.98416E-1	-9.13236E0	-9.14268E0	4.57764E-3	9.51052E-2	2.73153E1	-3.26428E1	-3.2635E1	2.68623E1	1.20017E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16441E-1	-7.98106E-1	-9.1321E0	-9.14268E0	4.33922E-3	9.47714E-2	2.73255E1	-3.2626E1	-3.26182E1	2.68442E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16369E-1	-7.98178E-1	-9.13203E0	-9.14292E0	4.31538E-3	9.47237E-2	2.73092E1	-3.26602E1	-3.26178E1	2.6813E1	1.20226E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16536E-1	-7.9813E-1	-9.13205E0	-9.14271E0	4.26769E-3	9.47714E-2	2.73183E1	-3.26651E1	-3.26362E1	2.68701E1	1.20383E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16464E-1	-7.97987E-1	-9.132E0	-9.14254E0	4.52995E-3	9.48191E-2	2.73358E1	-3.26626E1	-3.26178E1	2.68569E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16417E-1	-7.98035E-1	-9.13224E0	-9.14254E0	4.29153E-3	9.47237E-2	2.73021E1	-3.26362E1	-3.26134E1	2.6825E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16536E-1	-7.98225E-1	-9.13229E0	-9.14283E0	4.22001E-3	9.48191E-2	2.73131E1	-3.26554E1	-3.26327E1	2.68346E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16464E-1	-7.97987E-1	-9.13217E0	-9.14283E0	4.36306E-3	9.47714E-2	2.73128E1	-3.26301E1	-3.26189E1	2.6813E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16345E-1	-7.98368E-1	-9.13224E0	-9.14257E0	4.22001E-3	9.49383E-2	2.73057E1	-3.26591E1	-3.26002E1	2.68064E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01347E-1
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16345E-1	-7.98178E-1	-9.13236E0	-9.14261E0	4.17233E-3	9.47237E-2	2.73526E1	-3.26639E1	-3.2596E1	2.68424E1	1.20069E-7	2.50898E-3	2.50898E-3	6.3074E-3	3.01871E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16584E-1	-7.97844E-1	-9.13231E0	-9.14278E0	4.17233E-3	9.50575E-2	2.73033E1	-3.26614E1	-3.25936E1	2.68394E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9943E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16011E-1	-7.98011E-1	-9.13215E0	-9.14273E0	4.31538E-3	9.48906E-2	2.73375E1	-3.26543E1	-3.2629E1	2.68464E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16441E-1	-7.98154E-1	-9.13224E0	-9.14297E0	4.33922E-3	9.48906E-2	2.73141E1	-3.26434E1	-3.26092E1	2.68022E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.98665E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16345E-1	-7.98082E-1	-9.13224E0	-9.14264E0	4.29153E-3	9.46283E-2	2.7334E1	-3.26938E1	-3.26354E1	2.68466E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.98222E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16536E-1	-7.98368E-1	-9.13191E0	-9.14264E0	4.36306E-3	9.4986E-2	2.73237E1	-3.26422E1	-3.26615E1	2.68316E1	1.19902E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.96381E-1