[Scan]
initial_time=2016-01-18T20:20:47
final_time=2016-01-18T20:21:07
ip_count=19
run=1024
dataset=6
scan=463
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.36628E-8
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=1.94281E-9
ql3_vset=
ql3_vmon=-9.1321E0
ql3_imon=1.27053E-10
ql4_vset=
ql4_vmon=-9.14264E0
ql4_imon=-5.27143E-11
mult1=-9.03472E-9
mult2=-2.72581E-9
rf_tmon=-5.12655E-3
rf_agc=3.39923E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.68917E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68981E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19612E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=2.83962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.0227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.53194E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34424E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65233E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.49984E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.95026E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.3334E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=2.37125E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.19227E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93349E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.97225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.34356E-8
tplens_vset=1.4E-1
tplens_vmon=1.70455E0
tplens_imon=-8.65226E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26173E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26689E1
iondef2_imon=1.55718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.06352E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.18295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52286E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25655E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.42779E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.28159E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73514E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68343E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.02537E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.82385E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.43661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.24713E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.42528E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07041E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65781E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.96378E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62498E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67618E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.69912E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99763E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22683E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=3.00676E-1
chamber_ion_pmon=1.19978E-7
chamber_cvt_pmon=2.51915E-3
foreline_cvt_pmon=2.51915E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31972E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16727E-1	-7.97844E-1	-9.13234E0	-9.14233E0	4.55379E-3	9.46283E-2	2.73237E1	-3.26158E1	-3.2623E1	2.68214E1	1.20055E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99941E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16846E-1	-7.97701E-1	-9.13212E0	-9.14271E0	4.43459E-3	9.50098E-2	2.73039E1	-3.26878E1	-3.25807E1	2.68316E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16703E-1	-7.98106E-1	-9.13255E0	-9.14314E0	4.14848E-3	9.48668E-2	2.73594E1	-3.27251E1	-3.26083E1	2.68563E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02133E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.1656E-1	-7.98249E-1	-9.13255E0	-9.14297E0	4.07696E-3	9.49383E-2	2.73364E1	-3.26467E1	-3.26136E1	2.68226E1	1.198E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16512E-1	-7.97915E-1	-9.13253E0	-9.14297E0	4.26769E-3	9.4676E-2	2.73382E1	-3.26603E1	-3.26052E1	2.6855E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16822E-1	-7.97868E-1	-9.13239E0	-9.14233E0	4.22001E-3	9.49621E-2	2.72943E1	-3.26573E1	-3.26422E1	2.683E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.97704E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16941E-1	-7.9813E-1	-9.13219E0	-9.14237E0	4.43459E-3	9.50336E-2	2.72985E1	-3.26356E1	-3.25834E1	2.68499E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16822E-1	-7.98583E-1	-9.13219E0	-9.14261E0	4.31538E-3	9.51767E-2	2.73091E1	-3.26368E1	-3.26271E1	2.68876E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16989E-1	-7.98464E-1	-9.13243E0	-9.1424E0	4.22001E-3	9.5129E-2	2.73013E1	-3.26648E1	-3.26209E1	2.68593E1	1.20142E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.00852E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.1687E-1	-7.98392E-1	-9.13217E0	-9.14314E0	4.00543E-3	9.52005E-2	2.73514E1	-3.26609E1	-3.26086E1	2.68525E1	1.19991E-7	2.51952E-3	2.51952E-3	6.31879E-3	2.99981E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16679E-1	-7.9844E-1	-9.13181E0	-9.14288E0	4.26769E-3	9.49383E-2	2.73405E1	-3.26549E1	-3.26254E1	2.68713E1	1.19819E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.02545E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16822E-1	-7.98154E-1	-9.13205E0	-9.14261E0	4.22001E-3	9.50575E-2	2.73045E1	-3.26784E1	-3.26146E1	2.68852E1	1.19902E-7	2.50775E-3	2.50775E-3	6.33436E-3	2.99686E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.1687E-1	-7.98273E-1	-9.13174E0	-9.1424E0	4.02927E-3	9.51767E-2	2.73528E1	-3.26493E1	-3.26144E1	2.68328E1	1.19782E-7	2.51575E-3	2.51575E-3	6.3126E-3	2.9926E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16727E-1	-7.97987E-1	-9.1321E0	-9.14266E0	4.41074E-3	9.50336E-2	2.73328E1	-3.26467E1	-3.26396E1	2.68316E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99879E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16894E-1	-7.98035E-1	-9.13246E0	-9.14261E0	4.45843E-3	9.49383E-2	2.73442E1	-3.26717E1	-3.26062E1	2.68442E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.16751E-1	-7.98273E-1	-9.1321E0	-9.14249E0	4.57764E-3	9.5439E-2	2.73069E1	-3.26738E1	-3.26172E1	2.6834E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.16894E-1	-7.97915E-1	-9.13198E0	-9.14259E0	4.36306E-3	9.52482E-2	2.73267E1	-3.26591E1	-3.26278E1	2.68605E1	1.198E-7	2.51739E-3	2.51739E-3	6.35059E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.1718E-1	-7.97939E-1	-9.13196E0	-9.14235E0	4.36306E-3	9.50098E-2	2.7326E1	-3.26399E1	-3.26544E1	2.68356E1	1.19925E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.00676E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17299E-1	-7.98035E-1	-9.13215E0	-9.14261E0	4.33922E-3	9.51052E-2	2.73177E1	-3.26374E1	-3.2635E1	2.68282E1	1.1988E-7	2.5199E-3	2.5199E-3	6.323E-3	3.01981E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16989E-1	-7.97939E-1	-9.1321E0	-9.14264E0	4.43459E-3	9.52244E-2	2.73514E1	-3.26689E1	-3.26173E1	2.68343E1	1.19978E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.00676E-1